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(Initial value) Note 3) Value for high pressure type (1.5W) specification Note 4) Value for the low power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-

A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

LVQ LQ LVN TI/ TIL PA PAX PB Circuit example (1) Circuit example (2) 3 port solenoid valve Air filter Ball valve Process Pump Process Pump Regulator AIR SUP FLUID OUT AIR EXH FLUID IN Air supply Bypass Strainer Silencer Throttle Transfer fluid 17-5-151 12 Series PA Dimensions: Automatically Operated Type PA3000 68 85 105 4-7 7.5 Reset button (185) FLUID OUT Rc 3/8 5.5 AIR SUP (Pilot air supply

5 . , ' , . i u , , MGQbll2 Slide bearing 0.24 0.24 o.32 0.35 0.39 MGOLI2 Ball bush bearing o.23 0.26 0.29 0.35 0.38 16 vepr,lrol Slide bearing 0.36 o.41 o.47 0.52 0.57 vcbr-ro Ball bush bearing 0.3s o.3s o.44 o.52 o.57 n MGOM20 Slide bearing 0.56 0.63 0.70 o.77 0.s6 1.10 MGOt20 Ball bush bearing 0.54 o.60 0.70 o.90 1.04 ,' .is MGOM25.

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A9 D-M9 22 (24.5) A 2.8 0.5 W B ( ): Dimensions for D-A93 Bore size (mm) D-A9 A B W 6 10 16 36 11.5 9.5 (7) D-M9 A B W 29.5 5.5 3.5 (1) 29.5 9.5 7.5 (5) 33.5 9.5 0.5 33.5 13.5 3.5 40 15.5 5.5 20 41 15 13 (10.5) 45 19 9 25 40.5 16.5 14.5 (12) 45.5 20.5 10.5 Note) The above mentioned values are indicated as a guide for auto switch

Theoretical Output (N) IN OUT Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.7 0.5 0.3 84.8 IN 59 42 25 12 113 OUT 79 57 34 151 IN 106 75 45 16 201 OUT 141 101 60 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628 377 8-27-3 4 Series CXT Weight

) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 314 283 251 220 188 157 126 94 63 314 OUT 20 10 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246 196 147 98 491 OUT 25 12 378 340 302 265 227 189 151

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX IN OUT DTheoretical Output (N) -X Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.3 0.2 20OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 Data 79 68 57 45 34 23 OUT 113 12 6 60 51 43 34 26 17 IN 85 OUT 201 141 121 101 80 60 40 16 8 IN 151

Environmental friendly as refrigerant R410A Convenient functions Self diagnosis function and check display Page 70 Page 71 Timer operation function/Unit conversion function/Power failure auto-restart function/Anti-freezing operation function 41 types of alarm codes Communication function Page 71 Easy maintenance Page 69 Equipped with serial communication (RS232C/RS485) and contact I/Os (2

Filtration rating . 0.3 I' m 0.01 I'm 0.3+0.01 I'm Oil misl removal rate : O.8ppm (1.0mglm3(ANR)} O .08ppm (O.1 mg/m3(ANR)) 008ppm (O.1 mglm3(ANR)) Micro-Mist Separator with Prefilter Micro-Mist Separator SeriesAMH Available Models Model AMH150 AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 Air flow rate NOle) Q/min (ANR) 200 500 1000 2000 3500 6000 12000 1/4 3/8 1/2 3/8 1/2 3/4 1/2 3/4 1 3/41

) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 283 314 220 251 157 188 94 126 314 63 OUT 20 10 236 212 189 165 142 118 94 71 47 236 IN 491 393 442 295 344 196 246 98 147 OUT 491 25 12 378 340 302 265 227 189 151

MGQ Theoretical Force MGG (N) MGC IN OUT Cylinder bore size (mm) Operating pressure (MPa) Operating direction Piston area (mm2) 0.7 0.5 0.3 MGF 84.8 IN 59 42 25 12 113 OUT 79 57 34 CY1 151 IN 106 75 45 16 201 OUT 141 101 60 MY1 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628

Specific Product Precautions. 126 127 127 128 129 130 131 131 131 134 135 136 138 139 139 139 143 146 148 150 151 152 152 153 154 155 156

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (2) End plate DIN rail clasp When a manifold contains a large number of stations and is difficult to remove all at once, separate the manifold into several sections before removing it. 30 41 1 2 Mounting and Removal of Valves Mounting Manifold on DIN

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40 5-8-12 7 Hand Valve Series VH Dimensions: Panel Mounted VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5

, #2 (#2 + #4) SMTS32, #3 9 Precision Cylinder Series MTS Dimensions/40 MTS40 86 16.5 12.5 81 Basic type 2-cushion needle Width across flats 17 12 8 Rod cross section 2-Rc 1/8 (port size) 7 8.5 M10 x 1.5 +0.018 0 4-M6 x 1.0, effective length 9 42 0.2 0 0.021 4-5.5 through 2 x 4-9, counter bore depth 5.5 (opposite side also) 50 0.2 20.5 20 10.5H7 36 0.2 20h7 5.5 42 0.2 54 47 48 90 47 26 151

.75 PS|G (5 tuffi 2way 3 way F O F 3.31 lbs (1 5 kg ) T T 900 '75 PSIG (5 Kgf/cm2) A B c D E F G H J K A B c D E F G H J K M N 2.64 (67) 1.95 49.s) 0.96 '24.5) 0.69 '17.5)0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 (24.5) 1.20 130.5) 0.24 (6) 3.31 (ul 2.09 (53) 1 . 1 0 (24\ 1.22 (31) 0.06 (1.5) 0.12 (3) 1.57 (40) 1.06 (27\ 1.42 (36) 1.26 432) 1.20 '30.51 ) 2 4 (6) Millimelers in Parentheses 1-N015 151

46.6 81 88 94 144 144 97 97 123 135 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-1/4,3/8,1/2NPT 4-3/4NPT VH42 -N06 (Bottom porting) VH42 -N02/N03/N04 (Bottom porting) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-3/4NPT 4-1/4,3/8,1/2NPT 6 Body Mount/Dinensions Series VH (mm) / Body mount type Dimensions Scale: 35% VH600-N06/N10 2 (A) 4 (B) 1 (P) 132 152 411 132 300 223 150 151

L3 [mm] 67 88 109 130 151 172 193 214 L2 [mm] 72 93 114 135 156 177 198 219 L1 [mm] 83 104 125 146 167 188 209 230 M3 18 : 2 pcs. ( Hexagon socket head cap screw ( with spring washer )) Note NOTE Holding with hand so that there will be no gap between units and tighten the bolts.