Process Valve

VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage Coil rated voltage CE-compliant Nil Q CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only Note) Electrical

XLAQ/XLDQ

Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface

CQM

6 q e r t !5 w !4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MY1

32, 40 L (LL) PA 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K YW PB QW LW Q + Stroke PG P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) P (Port) W CH LH RR1 SS NE RR2 SS H PP2 QQ PP1 QQ NH NC P (Port) P (Hexagon socket head taper plug) Back port (Refer to page 39.)

MLGP

12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5 93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q

MLGP

12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5 93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

, 32, 40 L (LL) PA 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K YW PB QW LW Q + Stroke PG P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) P (Port) W CH LH RR1 SS NE RR2 SS H PP2 QQ PP1 QQ NH NC P (Port) P (Hexagon socket head taper plug) Back port (Refer to page 39.)

MU

Calculation Example 1: MUB40-15S(T) Basic weight0.62kg 2 pcs. 5 10 15 15 Example 2: MUC50-5S(T) Basic weight1.06 Additional weight (mounting bracket)0.40 1.06 + 0.40 = 1.46 kg 1 pc. 5 5 10 15 Construction Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Stations: 3 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 2 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 12 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 5 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 10 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 3 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor), CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 2 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor), CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 12 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor), CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 5 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor), CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 10 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor), CE/UKCA Compliant: Q (CE/UKCA-Compliant)