A

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

Soft Start-up Valve AV2000/3000/4000/5000 1

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125

SQ1000/2000

R1) 3 (R2) 1 (P) For applications which demand high speed, high frequency, long life and a precise response time. 1 2 (A) 4 (B) 2 1 2 1 2 SQ B31 N.O. valve N.O. valve 5 (R1) 3 (R2) A side B side 1 (P) A (A) 4 (B) 2 1 2 B SQ C31 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R P Features 2 Series SQ1000 Plug-in Type How to Order Manifolds SS5Q13 08 FD2 D Option Stations 01 Nil 1 station None 02

Soft Start-up Valve AV2000/3000/4000/5000

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

Round Type Low Pressure Hydraulic Cylinder Series CH
M

A1 L1 R1 U1 NDH10 U(H8) E1 MM NX Applicable bore size (mm) Applicable bore size (mm) I-02 I-03 I-04 IA-04 Part no.

0.4

D E Note) DIN rail mounting style Direct mounting style Option Nil 02 to 16 (1) B (2) K (3) N R S None DIN rail length specified Back pressure check valve Note) Refer to page 53 for details.

LECA6_C

. /. 53 14 /. 54 141. . 54 142. 55 143. . 56 144. . 57 145. . 58 146. . 58 15. . 59 15.1. /. 59 15.2 . 59 15.3. 61 15.4 . 61 15.5 . 62 15.6 . 62 15.7 . 62 16. . 63 16.1 . 63 16.2 . 65 3 - LECA6 Series/ 1.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

Series VQ Metal Seal/Rubber Seal Body Ported

SY SYJ Specifications Max. operating pressure Min. operating pressure SX 0.8MPa 0.15MPa 5 to 50C 2.7mm 2(0.15) 180CPM VVQ1000-FPG-02 1set VQ1000-FPG-C6M5-D 2 pcs.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

4-M5 X 0.8 5.5 (P, A, B, R port) 13 VZS L plug connector (L) 49 50.5 VFS M plug connector (M) VS VS7 1.13-7 Series VQD1000 How to Order Valve How to Order Manifold VQD11 L 5 5 1 M5 Plug lead unit manifold VV4QD1 5 Body 3 5 Body ported type Base mounted type Manifold 2 5 Body ported Base mounted Valve option Standard (2W) Vacuum (2W) Large flow (4W) Large flow, Vacuum (4W) Stations V U W 02

NVKF

Oooosite side of 02 2 stations 20 20 stations Same side as A port Port size I B3T lone touch frttina fors/32'tube B7T lone touch fittino for 1/4" tube Body ported / Type 21 (A pon: top porting) NW3KF3-21-@-OOT Applicable valves NVKF3330 OOO -M5 NVKF333O OOO -o1T .

Precision Cylinder Series MTS

105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16 Strokes other than the above are

3 Way Direct Acting NVKF 300 Series

Oooosite side of 02 2 stations 20 20 stations Same side as A port Port size I B3T lone touch frttina fors/32'tube B7T lone touch fittino for 1/4" tube Body ported / Type 21 (A pon: top porting) NW3KF3-21-@-OOT Applicable valves NVKF3330 OOO -M5 NVKF333O OOO -o1T .

Air Cylinder NCA1 Series

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LAT LZ USB cable (2.5 m) Cable for safety function device (3 m) LEC JZ CVSAF LC3F2 LEC JZ CVUSB * JZSP-CVS06-02-E manufactured by YASKAWA CONTROLS CO., LTD. * JZSP-CVH03-03-E manufactured by YASKAWA CONTROLS CO., LTD. Cable for connecting PC and driver when using the setup software (SigmaWin+TM). Do not use any cable other than this cable.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct Operated Poppet Solenoid Valve 10-VQD1000 Manifold Specifications How to Order [Option] 10 V V 4 Q D 1 5 CE-compliant Nil None Q CE-compliant Clean series Manifold type 2 Body ported 5 Base mounted Valve stations 02

NCA1

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 35 26 79 59 141 105 220 165 343 251 563 422 879 659 30 22 68 50 121 90 188 141 294 215 482 362 754 565 25 19 57 42 101 75 157 118 245 179 402 302 628 471 20 15 45 34 80 60 126 94 196 143 322 241 502 377 15 11 34 25 60 45 94 71 147 107 241 181

ZP

Material ZQ Series ZPY Without buffer ZPY U N 02 N4 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.) Pad diameter (mm) 02 04 2 4 ZCU Vacuum entry port (Refer to Table (2) for applications.) 06 6 AMJ 08 8 10 10 Misc. 13 13 Table (2) Vacuum Entry/Mounting Thread Diameter 16 16 Thread dia.

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.