Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: T (NPTF)

Stations: 3 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: T (NPTF)

Stations: 6 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: T (NPTF)

Thermo-chiller

heat C [cal/(kgfC)] 41F (5C) 1.00 4.2 x 103 1.00 1 x 103 1.02 3.91 x 103 1.02 0.93 x 103 1.02 3.91 x 103 1.02 0.93 x 103 50 (10) 1.00 4.19 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.93 x 103 59 (15) 1.00 4.19 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.93 x 103 68 (20) 1.00 4.18 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.94 x 103 77 (25) 1.00 4.18 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.94

HRS100/150

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

energy saving effect

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

Air Slide Table

For lubrication, specialized grease GR-F is recommended.

Lightweight and Compact

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For auto switch mounting position and its mounting height, refer to page 7-6-103.

MY1

8 MY1HG-F (W) Component Parts Description Material Note No.

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32UM ZP3E-80UM 3 6 Displacement [mm] Displacement [mm] 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100UM ZP3E-40UM 3 8 Displacement [mm] Displacement [mm] 6 2 N, S, U, F, CL N, S, U, F, CL 4 1 2

53

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

HRL

Water Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Conventional units Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 40C

KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

Air Cylinder

manual release: Suffix L With rod boot 8 8 l Width across flats B3 e JH JW f h ZZ + Stroke (mm) Bore size (mm) Stroke range A AL B1 B2 D DL E F FL G H H1 H2 HR HN Symbol (Max.)

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 24.4 24.9 23.5 21.4 25.3 25.8 23.7 24.6 30.7 29.1 36.1 30.9 32 32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5

CQ2

(mm) Head side with guide boss (mm) Bore (mm) W/o auto switch With auto switch H F E N D C M L K J S I P Q O B A 44 54 53.5 63.5 65 75 B 36 46 43.5 53.5 53 63 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 10.5 77 9 20 15 46 54 60 8 17 7 93 103 15 M10 X 1.5 14 Depth 10.5 Rc(PT)1/4 80 12.5 98 11 25 77 21 53.5 63.5 10 22 6 132 16 112.5 M16 X 2.0 17.5 Depth 13.5 Rc(PT)3/8 100 13 117

SFOD-OMT0005CN

(PLC ) Alarm _Comment _061 (01-061) <> (1) ()1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2[2](P.53) 3D B RESET (+)(-) Alarm _Comment _062 (01-062) (+)(-) 3E B RESET <> (01-096) C RESET <> -64- (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON (SVRE ON) DRIVE ON (01-099) <> SET OFF DRV C RESET <> <>12 (01-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] <> <>

Thermo-con/Rack Mount Type

Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density g: 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 6 Thermo-con/ Rack Mount Type