Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

D-Y7P D-Y7W D-Y7BAL D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV Finger position Air gripper model Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Note 1) There is no protrusion for sections of the table with no values entered.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.

Aluminum High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11

0.4

(D-sub connector) y u @0 i o !

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

LEC-OM069xx

i s p l a y a n d SigmaWin+TM 2.

Parallel Style Air Gripper Series MHZ

Standard Body Lead wire type In-line electrical entry type Perpendicular electrial entry type Explanatory drawing Auto switch model L L L Finger position D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL Air gripper model 11 13 3.5 6.5 4 11 13 5 7 5 3 8 6 5 3.5 5 3.5 No setting 9 11 1.5 4.5 2 9 11 3 5 3 1 6 4 3 1.5 3 1.5 13 15 5.5 8.5 3 6 4 13 15

REA/REB

D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) Note 1) D-F9N, D-F9P, D-F9B Note 2) Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for REAR10/15/20 and REBR15.

Battery-less

D-G

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

DZ/Y/YZ VFS1320-D/DZ/Y/YZ VFS1420-D/DZ/Y/YZ VFS1520-D/DZ/Y/YZ Lead wire O.D.

Filter Regulator

Hexagon wrench (Nominal size: 4) Tightening torque: 0.6+/0.05 N m Note) Applicable to the product without pressure gauge. (13) Plug assembly (13) Plug assembly Filter regulator Filter regulator (AW20-D / AW30-D / AW40-D/ AW60-D) (AW20K-D / AW30K-D / AW40K-D/ AW60K-D) -39- 11-9.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

7 (4) D-Z7/Z80 9 9 11 11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.

2/3 Port Valve

Oil (D, N) Vacuum (V, R, Y) 50 20 11 60 17 7 50 40 18 60 35 12 50 50 21 60 45 17 AC VX21 60 40 80 AC DC AC DC 60 60 40 100 60 40 Max. DC (1) (2) AC 20 10 Min. 10 5 VX22 Option Material DC No. Description Note 1) Dew point: 10C or less. Note 2) 50cSt or less Note 3) "D", "N", "V", etc. in the parenthesis are option symbols.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Valves are numbered from the D side according up to the number of stations. 939 Series VQZ1000/2000/3000 Dimensions: VQZ3000-SA: EX510 Gateway System Serial Transmission System U side D side L4 L3 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" 65.5 11 L5 (For 1/4) Manual override Output no. 16.5 + + 11.5 13 11 + + 1/4 [4(A), 2(B) port] 9 7 1/4 [1(P)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

D-B5, B6 20 to 100 D-G5, K5, G5W D-K59W 20 to 100 Hs Hs 24.5 24.5 B A B A Auto Switch Proper Mounting Position (Detection at Stroke End) (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-G5/K59 D-G5W/K59W D-B5 D-B64 D-A9 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-M9 D-M9W D-A9 Bore size Bore size A 41 40.5 42 39 46 44.5 A 31.5 31 32.5 29.5 36.5 35 48 47 A 37 36.5

Guide Cylinder Series MGG

D-M9/M9W ~ = ~ = Hs 11 B A 16.5 8.5 Auto switch D-A9 D-M9/M9W D-C7/C8 D-H7 ~ = ~ = Hs 11.5 B A 16 8.5 Auto switch D-C7/C8 D-H7 D-B5/B6 D-G5/K5 ~ = ~ = Hs 14.5 B A 24.5 12 8.5 Auto switch D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 ~ = ~ = Hs 14.5 B A 11 8.5 Auto switch D-B7/B8 D-G7/K7 Auto Switch Mounting Height Auto Switch Proper Mounting Position (mm) (mm) D-G5/K5 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W

Proposals for Energy Saving

Air Preparation Equipment 35 D H2 H1 8.5 A L1 High efficiency nozzle/KNH (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 KNH-R02-100 KNH-R02-150 KNH-R02-200 D H1 A L1 Low noise nozzle with self-align fitting/KNS (mm) Model Nozzle size D Connection size L1 L2 Width across flats H1 H2 L2 D 0.75

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Y): 10-SYJ5123-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) D Y Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] 63.2 [65.4] 82.1 83 72.1 3 3 58.2 64.7 3 3 42.2 19.5 19.5 19.5 11 11 11 19.5 11 2 x 2.6 (For mounting) 2 x 2.6 (For mounting) 2 x 2.6 (For mounting)

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Operating Range [mm] Auto switch model Bore size 32 40 50 63 80 100 125 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV 4 4.5 5 6 6 6 7 D-A9m/A9mV 7 7.5 8.5 9.5 9.5 10.5 12 D-F5m/F5mW D-J59/J59W D-F5BAL D-F59F/F5NTL 3.5 4 4 4.5 4.5 4.5 5 D-A5m/A6m 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-Y59m/Y69m D-Y7P(V)/Y7mW(V) D-Y7BAL 5.5 5.5 7 7.5 6.5 5.5 7 D-Z7m/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-G39/K39

F

17.5 14.5 17 15.5 3.5 3.1 6 M5x0.8 KJT06-M5 7 11 17.5 15 17.5 15.5 4.5 4.2 6 R(PT)1/8 KJL06-01S 10 11 19.5 16.5 18 15.5 9 6.1 6 R(PT)1/8 KJT06-01S 10 11 19 17.5 19 15.5 11 7.1 Applicable Thread Model H D L1 L2 A M Minimum Weight Tube O.D T (Hex) Hole (g) Applicable Thread Model H D L1 L2 A M Minimum Weight Tube O.D T (Hex) Hole (g) (inch) Diameter (inch) Diameter 1/8 10-32UNF KJT01-32 7