1.5 M10 x 1.25 0 0.039 32 10 8 16 50 154 16 7 88 M32 x 2 14 24 41 Up to 300 22 21 84.5 46.5 29.8 42.5 21.5 M14 x 1.5 With Rod Boot (mm) l JW JH h B3 e f Bore size (mm) 1 to 50 1 to 50 51 to 100 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 (Reference) (Reference) 20 25 32 40 30 36 81 93 106 131 156 25 37.5 50 75 100
1 q y e t !7 !3 w !9 i u 125 80 to 125 (No flat washer for 125) 80 to 125 !5 !4 i o Replacement Parts/Seal Kit (Single rod) Component Parts Bore size (mm) Kit no. Contents No.
RS Q G Lead wire Oil resistant vinyl heavy-duty cord, 4, 0.3 mm2, 3 cores (Brown, Black, Blue), 2 cores (Brown, Blue), 0.5 m Note 1) Regarding the common specifications of the solid state switches, refer to page 10-20-7. Note 2) Regarding the lead wire length, refer to page 10-20-7.
: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.
(mm) PA PB PG Q PP QW QQ RR SS TT UU WW Model VV XX Z YH PC PD PE PF ZZ 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 16 28 220 37.5 14.5 32 13 5.5 Rc 1/16 80 60 8 264 17 51 16 23 4 16 16 16 MY1H32 19 32 280 47 15 42 13 6.5 Rc 1/16 100 80 9 322 18.5 59 24 27 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 Y 2 x d S R WX D Bottom ported (ZZ) (Applicable O-ring) DHole Size for Centralized
(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min) max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.
(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.
3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !
191 216 241 266 291 316 341 125 82 75 40 10 20 30 40 60 80 100 120 140 160 180 200 130 140 150 160 180 200 220 240 260 280 300 320 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 165 A ISO Standard (15552
Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type
M3: L = 6mm (mm) (mm) Size 15 20 30 Size 15 20 30 Q Q M3 M3, M4 M3, M4, M5 X 1.5 to 18 1.5 to 20 2 to 22 Y 1.5 to 19 1.5 to 10 2 to 13 M3 M3, M4 M3, M4, M5 Symbol: A3 Symbol: A4 Symbol: A5 The shaft can be further shortened by machining male threads on the long end of the shaft. (If the shaft is not to be shortened, leave the Y dimension blank.)
(mm) Model Note) L1 P L2 Q D 4.2 Nylon Urethane KGU06-00 KGU04-00 4 7 9 11 16 KGU08-00 KGU10-00 34 37 42.5 48 10.4 12.8 15.2 18.5 20.9 9.7 11.7 13.7 16.1 10.4 18 16 12.8 20 17 15.2 24.5 18.5 18.5 27.5 21 4.2 13.4 25.6 40 6 8 10 10.6 17.7 28.4 12 20.9 30 22 57.4 45.4 23 KGU12-00 18.1 51 Note) D: Max. diameter K 3-applicable tubing M H Different Diameter Union Y: KGU Applicable tubing O.D.
A Weight (g) L1 L2 M D Q Part No.
A Weight (g) L1 L2 M D Q Part No.
Explosion Proof Equipment 5 Intrinsically Safe Explosion-proof System 5 Port Solenoid Valve Series 51-SY Explosion Proof Solenoid Valve Series 50-VFE/VPE Series 51-SY Series 50-VFE/VPE Consult SMC about Material restriction.
49 46 52 1/4" (A,A): Reference dimension after installation (E,E): Reference dimension for the inserted tubing from the end surface of the nut (A),L,E: Nut material PVDF dimensions W: Width across flats dimension 22.5 21 18 25 19.5 48.5 45.5 3/8" 8 62 54 58 57.5 56 59.8 69.5 68 66.5 80 78.5 77.5 51 56 55.5 54 57.6 67 65.5 64 76 74.5 73.5 59 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/
Without air cushion With air cushion Angle adjustable type 50 P694020-49 P694020-50 P694020-51 63 P694030-49 P694030-50 P694030-51 80 P694040-49 P694040-50 P694040-51 100 P694050-49 P694050-50 P694050-51 Du, o, !0, !4, @5, @6, #3, $6 are included as a set. u, o, !0, !4, @5, @6, #3, #6 are included as a set. u, o, !0, !4, @5, @6, #3 are included as a set.
Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS3000-4-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O-ring e, r, Seal A q Non plug-in base type: Type 51 VVZS3000-1A-2-Port size (1) Manifold block u, Junction box i, Lead
They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !