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ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

plug connector with cover (LL) 52-SY5120-LL-01 (-F2) Insulation: Red (+) Insulation: Black () 4.1 0.3 mm2 12 14.7 L 104 (Lead wire length) Cable type (TT) 52-SY5120-TT-01 (-F2) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 L 120.8 (Lead wire length) Max.10 5 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5220-L-01 (-F2) 22.6 16.7

Compact Manifold Regulator

AXT100-DR7 L dimension Select L dimension from the table below and enter an applicable symbol.

CRBU

R73C 3m: L Ex.) R73CL 5m: Z Ex.) R73CZ : N Ex.)

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Compact manifold regulator ARM5 Series

L 1.25 P=12.5 5.25 7.5 25 35 5.5 1.5 L Dimension L=12.5 x n+10.5 No. L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

SJ3A6

Caution Single solenoid SJ3000-46-SC-l Double solenoid, 3 position type, 4 position type SJ3000-46-DC-l Connector Assembly Part No.

Vacuum Regulator

L Straight Elbow Note 1) Two plug nuts are mounted on the gauge port.

VDW30/40-XF

Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Compact / Lightweight resin body (PPS) IP65 RoHS Weight: 120 g (VDW30-XF) n t r e y l d a i 30 mm c r e i r c e s l t e e c c t b t i Power consumption e e o n d l a n .

5 Port Solenoid Valve Series SQ1000/2000

L6 (for 6) C4 (for 4) C10 (for 10) L6 (for 6) Side SQ2000 C8 (for 8) 35 J kit: Flat cable 1 to 8 stations SQ230 SQ231 Option SS5Q23 580 Note 2) L4 (for 4) Built-in Silencer Direct exhaust C6 (for 6) Top C8 (for 8) Note 1) One-touch fittings for inch sizes are also available.

ZSE40/ISE40

Only for ZSE40(F)/ISE40--30/70(L)-M, displays the input mode and the compensation value alternately. If auto shift input is not complete, zero is displayed. 16-2-20 7 Series ZSE40/ISE40 High Precision, Digital Pressure Switch Unit Set Output Type It's only subject to ZSE40(F)/ISE40--(L).

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Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

CRB2/CRBU2/CRB1

h Model b (h9) h (h9) L !

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h Model b (h9) h (h9) l ***!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

h Model b (h9) h (h9) l ***!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

h Model b (h9) h (h9) l ***!

VQ7-6/7-8

Wiring specification L side R side L R O-ring NBR 4 AXT502-19 Side Bottom A B O-ring NBR 2 AXT502-20 Cylinder port size Plate SPCC 1 AXT502-22-2 Rc1/4 Rc3/8 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 02 03 C6 Note 1) Gasket NBR 1 AXT502-31 Oval countersunk head screw SWRH3 2 M4 X 8 C8 Note 1) C10 Note 1) Note 1) Side ported only 31 Series VQ7-8 Manifold Exploded View D side

Ejector Valve Unit Series ZYY/ZYX 1

min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Max. vacuum pressure: 84 kPa Y3 X3 ZY -10L Max. vacuum pressure: 53 kPa Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 100 100 100 100 Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR