Thermo-con

50 or less Sulfuric acid ion (SO42) [mg/L] 50 or less p p p p p Acid consumption amount (at pH4.8) [mg/L] 50 or less Total hardness [mg/L] 70 or less [mg/L] 50 or less Calcium hardness (CaCO3) Ionic state silica (SiO2) [mg/L] 30 or less p p p p p p [mg/L] 0.3 or less Iron (Fe) Copper (Cu) [mg/L] 0.1 or less Should not be detected.

Air Cylinder

f CX A K U N h + L N F CZ ZZ + L + Stroke B C H S + Stroke L Z + Stroke RR ZZ + Stroke A pin and retaining rings are shipped together with double clevis and/or double knuckle joint.

Air Pilot Operated

+-<-{ l r l tF)-)-+++--(lr{ I , _ ' I{ANIFOLD BLOCK PART NO. NO. PRESSURE CYLII{OEF " A & 8 " EXHAUST "EA & E8" SIDE aoTTor !OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

4 83 73 5 4 x 30 l Polished round 20 CDP-7A 100 250.065 0.117 4 88 78 5 4 x 36 l Polished round 24 Dd9 m l L * Split pins and flat washers are included.

0.55

Note VP344 VP544 VP744 VP 3 1 202 00 8 Gasket HNBR VP300-217-1 VP500-217-1 VP700-217-1 VP300-202-l VP500-202-l VP700-202-l 9 Sub-plate Aluminum die-casted Hexagon socket head bolt (1 pc.)

XL

A cm Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1D3/L l/sec, at an air temperature of 20C. ON OFF Short pipe conductance From the Clausings factor K and the hole conductance C in the drawing below (Clausings factor drawing), the short pipe conductance CK is easily found as CK=KC.

High Vacuum Angle Valve, XL Series

A cm Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1D3/L l/sec, at an air temperature of 20C. ON OFF Short pipe conductance From the Clausings factor K and the hole conductance C in the drawing below (Clausings factor drawing), the short pipe conductance CK is easily found as CK=KC.

REA/REB

Model REAH25 REAHT25 REATH32 REAH15 REAH20 REAH10 Screw size M5 x 0.8 l-8 M8 x 1.25 M6 x 1.0 l-9 M4 x 0.7 l-7 Bolt dimensions l-12 Dimension t Max.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Refer to section 11.5 for the wire used for the extension cable. 10m or less 2m 50m or less MR-BKS1CBL2M-A1-L MR-BKS1CBL2M-A2-L MR-BKS1CBL2M-A1-H MR-BKS1CBL2M-A2-H 50m LE-CSBExtension cable (To be fabricated) () Servo motor MR-BKS2CBL03M-A1-L MR-BKS2CBL03M-A2-L (5) LE-CSB24VDC power Electoromagnetic (Note4) Trouble (4) Supply for lock Brake(MBR) DC24V (Note3) (MBR) (3) (ALM) (MBR) AWG20

SZ3000

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

Compact manifold regulator ARM5 Series

L 1.25 P=12.5 5.25 7.5 25 35 5.5 1.5 L Dimension L=12.5 x n+10.5 No. L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 /LEKFS25(L,R)T6 /LEKFS32(L,R)T7 /LEKFS40(L,R)T8 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.

LEC-OM071xx

D i s p l a y a n d SigmaWin+TM 2.

LEC-OM069xx

D i s p l a y a n d SigmaWin+TM 2.

Vacuum Unit Ejector / Vacuum Pump System

Note 9) Select L, L#, or W for (6) Wiring Combinations for the single unit model.

HRX-OM-M090

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

HRX-OM-R016

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

IDX-OM-W014

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

CRQ2

L (Example) F9BL 5m .