Size: 3 [ø20(ø14)], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: C (EPR Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: N (NPT), Port Size: 20A (3/4), Voltage: 5 (24VDC), Lead Wire: G (Grommet), Manual Override: B (Locking Style Slotted), Bracket: B (Bracket)

Size: 3 [ø20(ø14)], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: C (EPR Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: N (NPT), Port Size: 20A (3/4), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 3 [ø20(ø14)], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: EPR Seal, Body Material: Stainless Steel Body, Pilot System Option: Standard, Thread: NPT, Port Size: 3/4, Voltage: 24VDC, Lead Wire: Grommet, Manual Override: Locking Style Slotted, Bracket: Bracket, X200: -, CE Compliance: -

Size: 3 [ø20(ø14)], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: EPR Seal, Body Material: Stainless Steel Body, Pilot System Option: Standard, Thread: NPT, Port Size: 3/4, Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliance: -

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Body type Plug-in type Non plug-in type VVFS2000-20A-1 VVFS2000-20A-2 Part no. 1 8 Plug-in type Non plug-in type VVFS2000-P-01-1 VVFS2000-P-01-2 VVFS2000-P-02-1 VVFS2000-P-02-2 Rc Body type Plug-in type Non plug-in type VVFS2000-10A Part no. Part no.

Air Slide Table

For details, refer to page 126. 40 MXQA Series Dimensions: MXQ 20A [Standard] MXQ 20A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

VFR

Body type Plug-in type Non plug-in type 1 8 Plug-in type Non plug-in type Body type VVFS2000-20A-1 VVFS2000-20A-2 Part no. Body type Plug-in type Non plug-in type VVFS2000-10A Part no.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

VFS

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no.

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-20A SY5000 SY5000-39-1A SY7000 SY7000-39-1A SY3000 SY3000-38-20A SY5000 SY5000-38-1A SY7000 SY7000-38-1A Rc 1/4 SY9000 SY9000-39-1A Rc 1/4 SY9000 SY9000-38-1A Series Round head combination screw Gasket Note 1) The SUP port can be on the lead wire side or end plate side for SY3000/5000/7000.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 SY3000 SY3000-38-20A(-Q) SY5000 SY5000-38-1A(-Q) SY7000 SY7000-38-1A(-Q) E5 5 SY3000 SY3000-39-20A(-Q) SY5000 SY5000-39-1A(-Q) SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 SY9000 SY9000-38-1A(-Q) 1 4 P1 1 SUP port Note) In case of 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA port should

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

HRS100/150

HECR Circulating fluid return port Rc3/4 HEC Barrel nipple 20A 144 HEB Y-strainer (40 mesh) 20A HED Flow direction HEA Y-strainer (20A) (Accessory) IDH Barrel nipple (20A) (Accessory) 107 HRS100/150 Series Standard Type Recommended External Piping Flow External piping circuit is recommended as shown below. 7 Thermo-chiller 2 Facility water outlet (Water-cooled refrigeration) Facility water

Proposals for Energy Saving

Electrical option Nil None S With surge voltage suppressor L With indicator light Z With surge voltage suppressor/indicator light Body size 4 15A 5 20A 6 25A 7 32A 8 40A 9 50A Refer to Table 2 below for applicability.

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

VCL

VXA 2 1 VCHm Thread type 1 Rc NPT G Nil N F VDW Voltage VQ 1 2 3 4 7 8 J 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 48 VAC 230 VAC Port size LVM Class 3 v v v Class 2 v v Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 v v v v Symbol 01 02 03 04 06 VCA VCB Please consult with SMC regarding other voltages.

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.