VFA3000

double 0.33 1 8 Body ported 1 4 3 8 12.5 (0.7) 14.5 (0.8) 02 03 VFA3340-X1 3 position closed center 0.48 1 8 JIS Symbol 1 4 3 8 16 (0.9) 18 (1) 02 03 VFA3440-X1 3 position exhaust center 0.48 1 8 2 position double 2 position single 1 4 3 8 12.7 (0.7) 8.2 (0.45) 13.3 (0.75) 8.7 (0.5) 02 03 VFA3540-X1 3 position pressure center 0.48 1 8 ( ) for normal position.

EXxx-OMU0020CN

LED LED SI LED 2 SI LINK (X1) Port1(X1) ACT (X1) Port1(X1) LINK (X2) Port2(X2) ACT (X2) Port2(X2) FO1(X1) Port1(X1) FO2(X2) Port2(X2) SF BF US1 / US2 / US3 US4 . 6-3 SI LED 6.4.1. LINK LED . 6-2 LINK LED LINK 1/2(XF1/2)Ethernet 1/2(XF1/2)Ethernet 6.4.2. ACT LED . 6-3 ACT LED ACT / 1/2(XF1/2)Ethernet 1/2(XF1/2)Ethernet 47 No.EX-OMU0020CN 6.4.3.

Precision Regulator

Except air operated type and IR3000 series) Made to Order Note 8) Symbol Specifications X1 X170 X465 Non-grease specifications Compatible with modular connection brackets (With modular adapter) With digital pressure switch (ISE30A) Accessory (Option)/Part No. Part no.

JXCx-OMT0061CN

(OUT05)OFF 11INPOFF ... 12BUSY ON 0mm 50mm 60mm 100mm 5 13DRIVEOFF 14No.2 ON (OUT1ON) 15INPON 16BUSYOFF 10mm 57 - 13.2 100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% 5mm (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1

VHS

1 e 3(R) Effective area (mm2) Model Component Parts VHS 2500, 3500 5 VM/VR Description Material ADC12 ZDC2 ADC12 Zinc alloy Zinc alloy C3604B A2017B C3604B Description No. q w e r t y u i No. !0 !1 !2 !3 !4 !5 !6 !7 !

Stations: 5 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 9 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: D Side, Thread: F (G)

Stations: 8 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: 0 (w/o SI Unit), P, R Port Size: 10 (1), P, R Port Location: D Side, Thread: F (G)

Stations: 3 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 7 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: D Side, Thread: T (NPTF)

VFA3000

Port size (A, B port) Nil Rc G NPT NPTF Note) Indicate suffix symbol -X1 at the end of the part number for 3 position.

5 Port Air Operated Valve Series VFA3000 1

5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

SI Unit for Vacuum Manifold

Valve-coil(s) short circuit 1 1 0...15 Valve coil of the applicable ejector has a short circuit. Pressure sensor(s) short circuit 0 1 0 At least one pressure sensor has a short circuit. Pressure sensor(s) failure or disconnection 1 1 0...15 Pressure sensor of the applicable ejector has a failure or a disconnection.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

code: 0x05 (fixed) (S+2) 0x0005 BIN16 bit Device number *1 Start address of the device being read 165535 BIN16 bit (S+3) Read data size.

Precision Regulator Series IR1000/2000/3000

1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

EXxx-OMW0014CN

(EX245-EA2-1) No. 1 SI ON/OFF 2 IO-Link IO-Link 3 4 5 SI 6 . 1-1 12 No.EX-OMW0014CN-A 2. . 2-1 EX245 DC24 V 1 msec IP65(,) (IEC 60529 ) CE/UKCA UL(CSA) RoHS EN505812012 AC500 V1 FE 10 M -FE DC500 V -1050 -2060 35%85%RH 1057 Hz0.75 mm p-p 57150 Hz49 m/s 2 XYZ 2 (IEC60068-2-6) 147 m/s 2 XYZ 3 () (IEC60068-2-27) 13 No.EX-OMW0014CN-A 3. 3.1. 6 2M5( = 1.5 Nm

Fieldbus system PROFINET compatible SI Unit

Diagnostics type 2 Table. 5-6 Overview of Diagnostics type 2 Byte Description 0 General diagnostics 1 1 Valve diagnostics 1 2 General diagnostics 2 3 Valve diagnostics 2 General diagnostics 1 Table. 5-7 General Diagnostics 1 Bit Description Explanation 0 Maximum number of valves 0: 16 Valves 1: 32 Valves or no "Valves" module 1 Valve coil(s) short circuit 0: No valve coil(s) have a short

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

IDX-OM-U022

[IDFA150F] R R GFCI PE TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 FM3 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1 4 P X4 5 () PRR COM1 X0 6 THR X1 THS3 THS2 THS1 X2 L N CM PRS2 PRS3 X3 EDV OLR PE P P MC1,2 24V THR THS1,2,3 V V TB1,2 T FM1,2,3 SWL PRR PRS1 PRS2 PRS3 PLC GFCI EDV IDFA100F150F 6 7 6.4 IDX-OM-U022 6. 6.5 ,, IDFA100F150F 6 8 6.5 IDX-OM-U022 6. 6.6