This is a legacy product, and replaced byVFS4210-5DZ-Q

This is a legacy product, and replaced byVFS5110-5DZ-04F-Q

This is a legacy product, and replaced byVNH233B-15A-5DZ-B VNA/B/C/D 2-WAY MEDIA VALVE. COOLANT VALVE. VALVE. VNA/B/C/D. 7.65067 lb. 1A.

This is a legacy product, and replaced byAV4000-N04-5DZ

This is a legacy product, and replaced byVZ5140-5DZ VZ5000 SOL VALVE 4/5 PORT. VALVE SOL/PILOT 24VDC *LQA. VALVE. VZ5000. .26400 lb. 2D.

This is a legacy product, and replaced byVK332Y-5DZ-01T VK300 SOL VALVE 3-PORT. VALVE, SOL, BODY PORTED. VALVE. VK300 BODY PORT 1/8NPT. .22046 lb. CA.

This is a legacy product, and replaced byVFR2310-5DZ-02T VFR2000 SOL VALVE 4/5 PORT. VALVE, SOL *LQA. VALVE. VFR2000 BASE MT 1/4. 1.02896 lb. PF.

This is a legacy product, and replaced byVFR3140-5DZ-03T VFR3000 SOL VALVE 4/5 PORT. VALVE, SOL. VALVE. VFR3000. 1.64928 lb. 2D.

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

reduces flow setting time

1 e !3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

(Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42 15.8 3.5 19 20.95 110 52.45 42 15.8 3.5 19 20.95 124.6 60.95 47.7 15.8 3.5 24 26.75 124.6 60.95 47.7 15.8 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 Rc 12 12 16 16 15.8 35.5 50 17 10 15.8

Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

E 4 A 3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Flow Control Equipment

AS43l1F-04 R(PT)1/2 Note 1) Only elbow style.

Smooth Cylinder/Low Speed Cylinder

-X 1233 Series CS2Y Dimensions Rod flange: CS2YF Port With rod boot V W G G 4 x J Cushion valve Width across flats KA 2 x P (Rc, NPT, G) 4 x FD MM FY D E E e B H K A AL ZZ1 + l + Stroke h + l l f FT B C N N F FZ FX ZZ + Stroke M S + Stroke (mm) Bore size (mm) Stroke range (mm) B C A AL B D E F FD FT FX FY FZ G J V 125 140 160 50 47 143 145 115 32 71 43 19 14 190 100 230 15 M14 x 1.5 15 Up

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

) 3EB 1P 5EA 96.5 27 25 1/8" (Pilot EXH. port) 76.5 194.2 L (Lead wire length) 5.9 1.55 0.3 mm2 80.5 (For E type) 34 17.5 29.5 29.5 5 x 3/8", 1/2" (Piping ports) 44.5 L plug connector with cover (LL) 52-SY9240 (R) -LL03 04 L 184 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 51.2 48.5 (92) Cable type (TT) 52-SY9240 (R) -TT03 04 Max.10 L 217.6

LEC-OM02704CN

DEL (3) 03132ASCII 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 ASCII 0 1 2 3 4 5 6 7 8 9 A B C D E F 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 ASCII G H I J K L M N O P Q R S T U V 0"(1)1630H (4) a b c d e f ASCII a b c d e f * a1661H 14 6 14 14.3.3 1 [A] [a] [B] [b] [C] [c] [D] [d] [E] [e] [F] [f] 14.3.4 ETX(STXSOH)ASCII 162ASCII16 S T X E T X [0] [A] [1] [F] [5] [2] [5]

air-filter-e

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

Air Preparation Equipment

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

HRX-OM-R016

Plug (Prepared by customer) L N E [Accessory] Power supply connector N Earth leakage breaker (Secondary side) E L Cable Crimped terminal (Prepared by customer) N E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-R016 Chapter 3 Transport and Setting Up Wiring 1.