5 Port Solenoid Valve How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !
Internal Circuit (Brown) +24 V TD+ TD0 V q w e r DA DB DG SLD FG q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT FG DC-DC converter (insulated) +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D +24 V 0 V Power supply for the input and for the control unit of the Gateway +24 V RD+ RD0 V q w q w e r INPUT Flexible I/O Setting Examples The occupying
MM C D E e Width across flats G l 10 f Air release SS + Q + l + Stroke W W CX U +0.4 +0.1 NA T NB ZZ + Q + l + Stroke L K F S + Stroke MA B RR SS + Stroke A ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) l e CX J B C F GA GB NA NB P R S T CD RR SS L U W f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 52 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 38 22 12.5 21.5 15 25 to
Equipment name Quantity set(s) Required date Follow procedures q through e. 1 Manifold Type Enter the symbols for required specifications in the boxes below.
e q q VXF2 A<e e q q Component Parts Component Parts No.
Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.
Temperature distribution of 120C specifications Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 140 e, r, t Comparison with KF25 flange 120 e Body 1 100 Temperature (C) 80 r Body 2 q, w t Body 3 60 40 20 w Bellows Valve q 0 0 30 60 90 Heater Time (minutes) High Vacuum Angle Valves
Body material: Aluminum q w e r t y u i IN IN o !0 OUT (Blow) !1 !2 Component Parts No.
Contents No. q w e r t y u i o !0 !1 !2 !3 !
) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts
3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation
M12 connector pin number Wiring specification w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]
JH JW f h ZZ + Stroke Width across flats B3 Width across flats B3 With rod boot (Both sides) e e JH 8 8 f f l + Stroke 8 8 JW l ZZ + 2 x Stroke h + Stroke h 45 WA WA 45 Cushion needle (Width across flats 1.5) Cushion needle (Width across flats 1.5) With air cushion N1 N1 G G Built-in One-touch fittings One-touch fitting port size P Q (mm) E ZZ MM H1 AL H F A FL G K KA N NA NN P S I D B2 B1
7 No. q w e r t y u i o !
M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]
20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !
: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2