LVQ

Construction Basic type N.C. type PB PB Double acting type N.O. type q q q PA PA A B A B A B A B B A e w e e With indicator With bypass With flow rate adjustment t r PA PA r A B A B A B A B Description No.

Stability of suction position,

w w t t w u t r r e r r r e e e q q q q q With set screw With male thread adapter (Vacuum inlet: Vertical) With female thread plate (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Lateral) Component Parts (Male thread) Component Parts (Female thread) No.

VFS

0, Terminal i, Metal joint q, w, Gasket e, r, O-ring y, u, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket e, r, O-ring y, u End plate (U) !1, Metal joint q, w, O-ring t, y End plate (U) !1, Metal joint q, w, O-ring t, y End plate (D) !2, Metal joint q, w, Gasket e End plate (D) !2, Metal joint q, w, Gasket e 02 03 VVFS3000-1A-1Plug-in type Manifold block assembly !

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

REA/REB

9 u o i @7 @9 @5 @6 @4 e y r !3 q #0 !1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

REA/REB

9 u o i @7 @9 @5 @6 @4 e y r !3 q #0 !1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

Step Motor Controller

Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F Note 4) Applicable to non-magnetizing lock. 24 Series LECP1 Controller Details e r Display Description Details No. t Power supply ON/Servo ON: Green turns on q q PWR Power supply LED Power supply ON/Servo OFF: Green flashes y w With alarm: Red turns on w ALM Alarm LED Parameter setting: Red flashes Change and protection of

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-54-2C(-Q) SY3000-54-1C(-Q) SY5000-54-1C(-Q) SY7000-54-1C(-Q) Assembly part no.

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

Basic type / Direct mount type Series CY3B/CY3R

9 #4 #8 E @4 r @7 @5 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-20(-Q) 10-SS5YJ5-20P(-Q) Applicable manifold base 10-SS5YJ5-40(-Q) 10-SS5YJ5-41(-Q) 10-SS5YJ5-42(-Q) 10-SS5YJ5-43(-Q) 10-SS5YJ5-41P(-Q) 10-SS5YJ5-43P(-Q) Applicable manifold base Type 10-SS5YJ5-41(-Q) Type 10-SS5YJ5-42(-Q) Type 10-SS5YJ5-43(-Q) Type 10-SS5YJ5-41P(-Q) Type 10-SS5YJ5-43P(-Q) Caution Mounting screw tightening torque M2.5: 0.45 Nm Use caution to the assembly orientation

V

R G E V O LTA G E S U P P R E S S O R With E W/O Light / With Surge Voltage Suppressor H O W T O O R D E R S U B P L A T E S E R I E S V Q 4 0 0 0 VQ4000 P Plug In Conduit Terminal E L E C T R I C A L E N T R Y E N C L O S U R E Dust Proof W Dust Tight Jet Proof P I P I N G Side Piping B Bottom Piping P O R T S I Z E 02 1/4 03 3/8 T H R E A D T Y P E Rc N NPT T NPTF F G Courtesy of Steven

Fieldbus System

w e q w e No.

MY1

Special resin Carbon steel Description No. q w e r t y u i o !

Stopper Cylinder

0 w q e r t u !

•

Q I>A F ' F Flat "" ,,"OD with rib G :M5 xO.8 G:M6Xl y " p Q I>A ~ . F Fiat A. ,,"OD withn b Modol M I>B e 0 E Modol M ',B . e 0 ' El ZPY4Ol! 40 43 1 8.5 :!as .as 6.5 3.3 itt,ion' ZPY1Ol! 10 12 12 22 38 3 1.7 H4{~1 14.5 5 1.8 ZPYSOl! 50 53 19.5 29.5 <7.5 6 8 7.5 3.8 N6 (~,1 16.5 7 2.5 ., 1~ 15 12 22 38 5 6 3 1.8 ZPY~ 16 18 12.\ 22.5 :!

Rotary Actuator

CDRB2BW40-=S/D CDRB2BW20/30-=S/D CDRB2BW10/15-=S/D A port B port q e t e !2 q o !2 !0 !0 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i Component Parts Description Material Description Material No. No.

MGP

6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

PE 20.3 29.4 P Exhaust part 8.4 17.7 0.8 107.5 Note 1) 10 (3.7) Circuit diagram 5 6 Q N 5 6 Q N Note 1) The above dimensions are for ZQ1 1U2 L-E G -00.