Table of Contents

0 IS1000 No. q w e r t y u i o !

Electric Actuator

w e r t y u i o !

Guide Cylinder Series MGG

M N HR Bracket (Refer to the table below.) 4 x O 2 x P (Rc, NPT, G) Q T B E S W U K L R I AA X AB AP AL A Y + Stroke J V Z + Stroke Non-lock type Lock type 8 x AF AC AD AE Rod end lock Q R Y + Stroke Head end lock Dimensions not marked with an are the same as standard.

Thermo-chiller/Rack Mount Type

Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

CRBU

(mm) Y Lmax (mm) X Q X-1.5 X-1.5 X-1.5 X-2.5 (mm) Y Q Y-1.5 Y-1.5 Y-1.5 Y-2.5 Size 10 15 20 30 Size 10 15 20 30 Size 10 15 20 30 Lmax Lmax Y-1.5 Y-1.5 Y-1.5 Y-2.5 M3 M3, M4 M3, M4, M5 M3, M4, M5, M6 M3 M3, M4 M3, M4, M5 M3, M4, M5, M6 2 to 8 3 to 9 3 to 10 3 to 13 15.5 to 14 17.5 to 18 15.5 to 8 17.5 to59 19 to 20 11 to 22 19.5 to 10 11.5to 13 1.2-20 Series CRBU Mode to Order Specifications

Basic type / Direct mount type Series CY3B/CY3R

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

LVQ

LQ1 Construction LVN 90 Degree turn type t TL/TIL LQ3 q e A B r w t y Multi-turn type (with indicator) A B A B Description No.

Air Cylinder Series MB

5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

1.1

This operation display panel is common to all models. t w e r y u i o q !0 !1 !2 !3 !4 !5 No. Description Function Displays the circulating fluid temperature. Displays the alarm code when an alarm is active. PV q Digital display PV/SV Displays the set temperature of the circulating fluid.

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series y Pilot valve option !

&snac

R e m o v e a n Y b t o c k o n b e n d o n t n e p u r q i n s a l r P i P i n s ' b . P l p i n s f o r p u r g i n g a i r i s r e d u c e o r t o n q e r t h a n s P e c i f i e d l e n q t n ' r e f e r t o P . 2 , 7 f o r c o r r e c t i o n ' c .

Step Motor Controller

Y ellow Light green Light green Gray Gray White White Light brown Light brown Y ellow 31 Series LEC Controller Setting Kit/LEC-W1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions How to Order LEC W1 q Controller setting software Controller setting kit (Japanese and English are available.) e USB cable (A-mini B type) w Communication cable Contents HRS q Controller setting

Modular Type Air Filters Series AF

Warning 330 Air Filter Series AF10 to AF60 Working Principle: Float Type Auto Drain N.C. type: AD37, AD47 N.O. type: AD38, AD48 Compact auto drain N.C. type: AD17, AD27 q r e w t i y u o !0 !1 Drain q r e w t i u y o !0 !

ZP

dia. 1 02 to 08 2 10 to 16 Lock ring 3 20 to 32 4 40, 50 Pad N6 A8 4 ZP Y Pad [q Type Y adaptor] With buffer ZP 50 K20 Y A14 U6 UGN [Pad model no.]

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body material: Aluminum q w e r t y u i IN IN o !0 OUT (Blow) !1 !2 Component Parts No.

Metal Seal/Rubber Seal Series VQ Body Ported

Description Note q Material Note q Material Body Aluminum die-casted Body Aluminum die-casted w w Spool/Sleeve Stainless steel Spool valve Aluminum/HNBR e e Piston Piston Resin Resin r Pilot valve assembly r Pilot valve assembly Note) Note) VQ111 -F (H) (Y) Voltage 1 to 6 Voltage 1 to 6 VQ111 -F (H) (Y) Single/3 position Single/3 position VQ110L-F VQ110L-F Double (Latching) Double (Latching

1

Dimensions 32 to 50 63 to 100 Front mounting flange Front mounting flange X Q Y + Stroke X Q Y + Stroke 2-Rc 1/8 (Both sides) 2-Rc 1/8 (Both sides) CL CL Q X Y CL Bore size (mm) 32 40 50 63 80 100 ( ): Denotes the dimensions for long stroke. Specifications other than above are the same as standard type.

Digital Flow Switches

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.