CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

SZ3000

, 3(R) port] Applicable tubing O.D.: 8 13.3 (Pitch) P = 10.5 24 13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of

SZ3000

, 3(R) port] Applicable tubing O.D.: 8 13.3 (Pitch) P = 10.5 24 13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Applicable

SYA3000/5000/7000

) Manual override (Non-locking) 1.3 (Ventilation hole) M5 x 0.8 (P , EA, EB port) 2 x 1.5 die-cast hole (For manifold gasket positioning) SYA3120-M5 M5 x 0.8 (A, B port) 1732 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported 2 position double SYA3220(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/

Slide Unit Series CX2/CXWM/CXWL

ZZ 2 x 2 x 4.3 through 2 x 2 x 8 counterbore depth 4.5 P (5H7 hole pitch) 5H7 depth 3 +0.012 0 2 x M8 x 1.0 Adjusting bolt 5H7 depth 6 +0.012 0 4 positions for set screws for fixing shock absorbers (M4) 4 x M5 x 0.8 thread depth 10 2 x 2 x M5 x 0.8 (Hexagon socket head plug) 2 x M5 x 0.8 Cylinder port 2 x 2 x M5 x 0.8 Thread depth 10 Max. 6 4 x 4.3 through 4 x 8 counterbore depth 4.5 2 x

Slide Unit Series CX2/CXWM/CXWL

ZZ 2 x 2 x 4.3 through 2 x 2 x 8 counterbore depth 4.5 P (5H7 hole pitch) 5H7 depth 3 +0.012 0 2 x M8 x 1.0 Adjusting bolt 5H7 depth 6 +0.012 0 4 positions for set screws for fixing shock absorbers (M4) 4 x M5 x 0.8 thread depth 10 2 x 2 x M5 x 0.8 (Hexagon socket head plug) 2 x M5 x 0.8 Cylinder port 2 x 2 x M5 x 0.8 Thread depth 10 Max. 6 4 x 4.3 through 4 x 8 counterbore depth 4.5 2 x

KJ

KQ2Y KQ2E P . 28 KQ2L P . 26 P . 29 Use to connect male thead and tube through a panel. Use to connect tubes at the right angles. Gasket/Seal for M5 thread Plug-in elbow Plug-in reducer Part no. M-5G2 Material Stainless steel 304, NBR Use to change by 90 in a tube fetching direction from Onetouch fitting. KQ2L KQ2R P . 27 P . 28 Use to size down Onetouch fittings.

LX

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

Series M Miniature Fittings M3, R(PT) 1/8, M5

P.90 M-5ALHU-4 4/2.5 1 8 Rc(PT) -M5 female Gasket 6/4 M-5ALHU-6 P. 91 To seal M3 thread.

ZP

13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to 90 P. 13-11-93 to 94 Buffer stroke Pad dia. 40 50 63 80 100 125 Buffer stroke (mm) 25 50 75 100 Pad Material and Characteristics : Little or no influence : Can be used depending on conditions.

VK3000

Applicable blanking plate assembly VK3000-7-1A 01 1 station Solenoid on opposite side of A and B port P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Nil R port: Rc 1/8 Thread type Type S41 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 P port: Rc 1/8 R port: Rc 1/8 S Nil Rc Port size Q CE-compliant Nil CE-compliant F N T G M5 M5 x 0.8 C4 4 cassette NPT B port

3 Port Air Operated Valve

Base mounted Body ported 2(A) 1/4 3/8 P. 1558 8.9 (P)1 3(R) VPA700 For vacuum N.C.

Battery-less

/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67 Guide Rod Type

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

AC Servo Motor Driver

PG1 Model loop gain P PB08 PG2 Position loop gain P PB09 VG2 Speed loop gain P S PA08 ATU Auto tuning mode P S PB10 VIC Speed integral compensation P S PA09 RSP Auto tuning response P S PB11 VDC Speed differential compensation P S PA10 INP Control mode, regenerative option selection P PB12 OVA Overshoot amount compensation P S PB13 NH1 Machine resonance suppression filter 1 P S PA11 TLP

VS 8-2/VS 8-4

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

Compact 5-Port Solenoid Valve

Box p. 105 Terminal Block Box p. 106 Lead Wire p. 107 EX600 p. 108 EX245 p. 110 EX250 p. 112 EX260 p. 113 EX120 p. 114 Manifold Exploded View [Common Parts] p. 115 Type 10: How to Increase Connector Type Manifolds p. 115 For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10/ Manifold Parts Nos.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(A) 4 (B) 2 2 M5: M5 x 0.5 5 (EA) 1 (P) 3 (EB) 3 position closed center (A) 4 (B) 2 A 4 3 2 B 5 (EA) 1 (P) 3 (EB) D: Slotted locking type Screw driver operated J: With switch 3 position exhaust center Elbow fitting assembly (upward) L4: 4 elbow fitting assembly L6: 6 elbow fitting assembly (A) 4 (B) 2 4 5 (EA) 1 (P) 3 (EB) A 4 ON 3 position pressure center OFF B 2 SMC (A) 4 (B) 2 5 Refer

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.