A

(E X C E S S I V E F O R C E I N T H E D I R E C T I O N O F R O TAT I O N A P P L I E D T O T H E P I S T O N R O D M AY D A M A G E T H E I N T E R N A L M E C H A N I S M.) R E F E R T O T H E F O L L O W I N G TA B L E F O R D I M E N S I O N S W I T H A R M 32/40/50/63S E R I E S MK2 T I G H T E N I N G T O R Q U E F O R M O U N T I N G.

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

ZP

E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

ZP

(Without buffer/Female thread) ZPT F-B (Without buffer/Female thread) Hexagon width across flats P N M5 x 0.8 Hexagon width across flats 8 NL 5 Y Hexagon width across flats 12 Hexagon width across flats 10 F Hexagon width across flats 3 F ZX Hexagon width across flats 2 D 3 D C C ZR ZM 2 2 A A ZH B B ZU ZL Dimensions Dimensions (mm) (mm) ZY A B C D F Y A B C D F N NL P Model Model ZPT10F-B5

Table of Contents

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

ZP

K Hexagon width across flats 12 Hexagon width across flats 12 ZU ZL ZY ZQ ZF ZP ZCU AMJ Bellows Bellows A D E F N P A E F N P B B Y Y C C D Misc.

4/5 Port Solenoid Valve

G H C4,N3 C6,N7 4 3.5 19.5 3.5 B A P R1 16 15 10.6 R2 One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" 32.3 (3.2) 21 M5 x 0.8 (P, R1, R2 port) (2.3) L plug connector (L): 10-SYJ5123-L-M5(-F) M plug connector (M): 10-SYJ5123-M-M5(-F) DIN Terminal (D): 10-SYJ5123-D-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D.

5-Port Solenoid Valve

41 p. 141 p. 133 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 113 p. 103 p. 125 p. 124-1 p. 156-1 SY7 0 Type 11 SY5 0 Manifold Top ported Bottom ported Top ported From p. 41 p. 141 p. 133 p. 124-1 p. 156-1 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 103 p. 113 p. 125 SY7 0 SY3 3 Type 12 SY5 3 From p. 53 p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53

&snac

i O N : S , P S ) f i t t i n s i n g u s e p u r s i n s o f t u b e a T u b e s i z e w i t h o n e t o u c h ( o p t i o n P , P 5 ) f o r p u r g p l e a s e r e f e r t o P . ?

ZP

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

0.4

Note 2) L kit: Nil F P PC J Nil S F kit P kit (26P) P kit (20P) J kit (20P) L kit S kit q w Note) L kit: Nil F e r kit SE SSQ1000 No.

Metal Seal/Rubber Seal Series VQ Body Ported

F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P F 25P T2 T1 Type Note) Note) Note) Max. points 14 8 8 16 16 16 16 16 14 Note) Due to the limitation of internal wiring.

Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Table of Contents

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

AC Servo Motor Driver (Pulse input type/Positioning type ）

SIGNALS AND WIRING (Note 2) I/O signals in control modes Related parameter P P/S S S/T T T/P Pin No.

Table of Contents

unit (F) E P F Model ZX100 K6 Circuit diagram (Circuits other than those with vacuum switch are shown as below.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O N P A R T S A S S

Air Cylinder Series CM2

Refer to page 135. 202 Series CM2P Air Cylinder: Centralized Piping Type Double Acting, Single Rod Rod Side Flange Style (F) 20 25 20 CM2F P Bore size Stroke P P (Head side pressure port) (Head side pressure port) Z NN Width across flats B1 MM P P CJ1 F H2 H1 20 to 32 Width across flats B2 (Head side pressure port) (Rod side pressure port) (Rod side pressure port) P C2 CJP I CJ2 G G FB FY

Stability of suction position,

16 35 32 23.3 16 54 50 37 16 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-32BMl 6.2 5.7 9.9 ZP3E-32BMl-P 9.9 9.4 13.6 ZP3E-40BMl 10.2 9.4 16.2 ZP3E-40BMl-P 13.9 13.0 19.9 ZP3E-50BMl 17.9 16.4 28.4 ZP3E-50BMl-P 25.5 24.0 36.0 ZP3E-63BMlZP3E-80BMl43 49.5 56 34 39 45 16.3 (Plate) 16.3 (Plate) 18 8 3 12.5 8

Electric Actuators

Mount Specification X60 Stroke 2 H 1 F P K 2 LJ1H10 Vertical Mount Specification Refer to Table below.