Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R Port Rc (PT)1/8 40/41 Type How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714-l SYJ714M-l SYJ724-l SYJ724M-l R Port Rc (PT)1/8 R Port Rc (PT)1/4 Valve model P Port Rc (PT)1/8 01 Rc (PT)1/8 A port side P Port Rc (PT)1/4 Stations 40 Type 40 Applicable blank plate ass'y SYJ700-10-2A 2 stations 02 41 Type 41 .. ..

HEC-OM-S008

) . 4-1 4.2 Reading setting temperature . 4-1 4.3 Reading internal sensor . 4-2 4.4 Reading external sensor . 4-3 4.5 Reading alarm status . 4-3 4.6 Offset setting (without writing FRAM) . 4-5 4.7 Reading offset . 4-5 4.8 Temperature setting (with writing FRAM) . 4-6 4.9 Offset setting (with writing FRAM) . 4-7 4.10 Communication Format and Examples of Answers from Thermo-con . 4-8 5 MODBUS

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

7.5

Flat ribbon cable (10 pins) Symbol Stations 02 09 Symbol Stations 02 04 2 stations 9 stations 2 stations 4 stations Non-polar type, with plug (24 VDC) SJ3A6-5CU-DP (4 sets) SUP/EXH block (D side mounting) J: Flat ribbon cable (PC wiring) S6B: EX510 serial transmission Symbol Stations 02 08 Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat

5 Port Solenoid Valve SY Series

5 G H 02 03 SY9 20Grommet (G), (H): SY9 20C8, N9 C10, N11 C12 G H 3 4 5 G: Approx. 300 H: Approx. 600 (Lead wire length) 73.9 [76.1] [4(A), 2(B) port) 3/8, 1/4 164.3 [168.7] 51.7 68.2 6.5 Manual override 4A 2B 18.4 (For manifold mounting) 33.2 Applicable tubing O.D. : 8, 5/16" : 10, 3/8" : 12 One-touch fitting [4 (A), 2 (B) port] 33.6 61 (5.5) 64.2 33.6 40.9 [47.9] + 36.6 25.5 10 (For mounting

VZ5000

length) G: 300 mm H: 600 mm VZ5440 VK VZ Manual override (Non-locking) (Mounting hole) VF VFR VZ5540 VP4 VZS VFS VS4 VQ7 (PE port) EVS 2-Rc 1/4 (3(R1), 5(R2) port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFN L plug connector (L) VZ5 40-LM plug connector (M) VZ5 40-M01 02 3 4 5 01 02 3 4 5 (Lead wire length) 300 (Lead wire length) 300 DIN terminal (D) VZ5 40-D01 02 3 4 5 : With light/surge

Modular Type Regulator Series AR

4) Square embedded type Note 2) GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G27-10-R1 Note 3) Round 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

4/5 Port Air Operated Valve Series SYJA3000

40 2 Base mounted VHS Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1

VZ100/300/500

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

E-P HYREG ® Series VY1 1

10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

[Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

SZ3000

A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

SZ3000

A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Applicable connector: D-sub equivalent JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch for locking a connector 8 3.1 8 36.3 5.5 5.3 FREE LOCK 35 18 28.8 47.6 Terminal no.

IR1000/2000/3000

4 !