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O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8

O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8

A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Flow Direction Symbols on Body How to Order Meter-out type Meter-in type Indication symbol 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Symbol Applicable tubing O.D.

A al B D Il f J t( l(l wt wt (I$odel) D!npirg (on!l!nl Pfir20f{f t, -2, -3 t40.2 t45-3 illA (L{t}frt33rl.5 9.5 29.8 30.5 8/.0 5.3 fl/A x/ato.g P | 25iltI l, -2, -3 t40.2145.3 N/A (MR M36 , r.5 9.5 29.0 30.5 87.0 ).J r.r/A N/A 33.0t6.0 Pfl2Zonr t, -2, -3 207.0 2l?.0 t/A (|'lr) n33,1.5 9.5 ?

please see pg. 15 o.,noaas ~(2 ""\Of~) W ~ l00V, 200V ~ 24V 5V,12V 3---e{NPNJ tC circuit ~ , FIP 3-Yr11re(PNP) J51 1'" l 00V,2QOV 2-wire l ~ 12V 3liWe (NPN) I F&8W 5V,12V IC I' FS. 3'1'111"(1 (PNP) Circuit Relay * Lead Wlre lenglh C.5m ...

34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Reading offset 2 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D Answer -1.52 deg.C 36 Offset setting (without writing FRAM) 2 01 32 02 36 30 31 35 30 03 33 30 0D 06 32 0D Set at +1.50 deg.C 37 Temperature setting (with writing FRAM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at

exhaust center 3 position pressure center VFA3122-01-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

Rc NPTF, NPT G Nil T F 3 position closed center 3 position exhaust center Caution Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-5 6 Series VZA4000 Dimensions: Body Ported 2 position single: VZA4121-01 2 position double: VZA4221-01 2-3.4 Mounting hole 2-3.4 mounting hole Pilot port (A side) Pilot port (A side) Pilot port (B side) Manual override

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

ON ON ON OFF OFF OFF OFF OUT2 OUT2 OUT1 OUT1 [F 2] OUT2 1 2 2 -36No.PS-OMU0005CN-C [F 3] <> [F 3] [F 3] 190% 2(273336) -37No.PS-OMU0005CN-C [F 4] <> [F 4] [F 4] (39) -38No.PS-OMU0005CN-C () OUT1 [AP1 REdY] (OUT1[AP1 REdY] 1 AP2 REdY) OUT1 OUT1 OUT1 [AP1 RUn] ([AP1 RUn] 1 [AP2 REdY]) OUT2 P_1 H_1(n_1 H_1),[AP2 REdY] (OUT2[AP2 REdY] 1) OUT2 OUT2OUT1OUT2 [AP2

Time Repeatability 0.2% F .S. 1 digit or less IP65 compatible Dusttight/Splash proof type 16-2-16 3 Series ZSE40/ISE40 High Precision, Digital Pressure Switch How to Order 0.100 to 1.000 MPa For positive pressure Set pressure range Nil ISE40 01 22 For positive pressure ZSE ISE ZSE40 01 22 For vacuum/compound pressure PSE Z I SE3 PS Option Set pressure range Nil F Nil For vacuum pressure

3 !2 y r @4 !4 !5 @9 #2 !8 @8 t u !0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.

(The SI unit type is provided for use in Japan.) 14-4-35 18 Series ARM11A/B Common Supply Block ARM11A 1 S 01 3 Z A 1 2 3 4 5 6 1. IN piping position 4. Option 2.

(The SI unit type is provided for use in Japan.) 14-4-35 18 Series ARM11A/B Common Supply Block ARM11A 1 S 01 3 Z A 1 2 3 4 5 6 1. IN piping position 4. Option 2.

DIN terminal 4-15-12 13 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ400 Dimensions: Body Ported Grommet: VZ4 2-G H (S)-01 With foot bracket: VZ4 2--01-F 1 2 1 2 2-3.4 mounting hole 2-4.5 mounting hole M5 x 0.8 Pilot EXH V100 Manual override (Non-locking) SY Manual override (Locking type (Tool required)) Manual override (Locking type (Manual)) SYJ 2-3.4 mounting hole

0.01 psi 0.02 0.01 0.1 InHg 0.1 0.1 mmHg 1 1 -28No.PS-OMS0006CN-G [F 1] OUT1 OUT1 ONON ONOFF 31 <> [F 1] OFF [OFF]OFF 22 [Err] [P_1] [P1L][P1H] [P_1][n_1] Pn (50 ) -29No.PS-OMS0006CN-G 22 [H_1] [WH1] (50 ) 24 ON ON OFF OFF [F 1] OUT1 1 2 2 -30No.PS-OMS0006CN-G H_1 WH1 WH1 H_1 WH1 WH1 OFF OFF 1Er689 -31No.PS-OMS0006CN-G [F 3] <> [F 3] [F 3] 190% 2(2430) -32No.PS-OMS0006CN-G

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.