C95Series

,4QO , 80 25, 50, 7~ 100, 1 25, 150. 1 7~20~ 250,300, 350, 400,450.500, 600, 700, 800 100 1500 25, 50.75, 100, 125, 150,175,200, 250,300, 350,400,450,500,600,700,800 Intermediate strokes are available.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SS5YJ3-31 -S31 -32 -S32 Blank plate ass'y SYJ3000-21-4A Blank plate ass'y SYJ3000-21-3A Phillips head screw SY100-33 -2 (M1.7 X 7, matted nickel plated) Phillips head screw SY100-33 -2 (M1.7 X 7, matted nickel plated) Blank plate SYJ3000-21-1 A Mark A Mark Blank plate SYJ3000-21-1 Manifold gasket Manifold gasket VJ3000-14-3 VJ3000-14-2 Dust cap SYJ3000-42-1 Applicable manifold base SS5YJ3

VM

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 5-8-23

CJ2

1 !2 !3 !4 !5 !6 !7 !8 !

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

rep-modular-e

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

Bag Filter

Legs (with bolt, nut, flat washer) Element 4 Polyester FGF-OP01 (Set) FGF5-60 5 FGF1 6 Carbon steel 1 5 Hinge bolt Carbon steel Eyenut 6 Carbon steel FGFS1 NBR FGF-KT01 1 O-ring 7 Washer 7 Carbon steel FGFL1 FKM FGF-KT02 1 8 Parallel pin Carbon steel FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 9 Lifter Carbon steel Holder (with O-ring) 8 Handle 10 Carbon steel FGF-KT04 (Set) Polypropylene

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LVN TI/ TIL Class Size combination Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8" No. 1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

39

7 Metal cover Top cover !8 t Rubber cover !0 q e !1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

MXW Series Long Stroke Slide Table

E F G F E J HH H GG Model NN Z N L K 105 270 120 195 60 MXW25-175 490 6 63 34 142 275 155 225 60 MXW25-200 540 6 88 59 165 305 175 245 55 55 MXW25-225 1 590 7 113 84 187 335 200 275 60 67 MXW25-250 1 640 7 138 109 210 360 225 300 65 80 MXW25-275 1 690 7 163 134 232 395 245 320 60 60 52 MXW25-300 2 740 8 188 159 153 MXW Series Long Stroke Slide Table Auto Switch / Suitable Mounting

OMR0032

) (1)(4) SETUP (4) Turn the "SETUP" input ON. (1) CLR Input The Card Motor starts the Return to Origin operation in retracted direction (connector side). (1) PP+ PLC (1) PP(5) The "BUSY" output turns ON. (1) NP+ (1) (6) The "BUSY" output turns OFF. NP(2) ALARM (7) The "OUT0" (INP) output turns ON. OUT0 (7) (8) The RESET signal for the Multi-counter is turned on.

REC

M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up to 700 1/8 146 20 8 25 219 32 M26 x 1.5 Up to 1000 1/8 159 20 8 25 232 40 M32 x 2 Up to 1000 1/4 181 23 10

Digital Flow Switches Series PF2A

Terminal block numbers 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.