Basic type / Direct mount type Series CY3B/CY3R

1 !9 #4 #8 E @4 r @7 @5 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

CS1

1 !2 !3 !4 !5 !6 !7 !8 !

4/5 Port Solenoid Valve

SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 3.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

CV/MVGQ

1 !2 !3 !4 !5 !6 !7 !8 !

C95

Ball retainer Brake shoe Brake spring Brake shoe holder Taper ring Air pressure Exhaust Air pressure supply Lock switch lever Brake piston Locked condition Unlocked condition 1.11-24 Series C95N Construction #3 $9 !3!4 @3 #5 t @7 $5 !5 @4!8@0!7!9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100 13 340 1/2 66 140 12 20 16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 109 Tie-rod Type Low Pressure Hydraulic Cylinder

Clamp Cylinder with Lock

9 @0 #8 #1 @8 @2 r $0 #6 #5 $2 @6 @7 $5 !5 !0 !6 !2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

MY1

(#1 + #3 + #7) MY1B20 SMY1B20, #3 (#1 + #3 + #9) For 25 to 40 MY1B Bore size SMY1B Bore size , #3 (#1 + #3 + #10) Low load shock absorber + Adjusting bolt MY1B20 SMY1B20, #4 (#1 + #4 + #9) For 25 to 40 MY1B Bore size SMY1B Bore size , #4 (#1 + #4 + #10) High load shock absorber + Adjusting bolt MY1B20 SMY1B20, #5 (#1 + #5 + #9) For 25 to 40 MY1B Bore size SMY1B Bore size , #5 (#1 +

CM2

66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A (mm) 20 25 32 40 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 2.5(0.5) 7.5 1.5(0) 3.5(1.5) 8.5 6.5 ( ): Denotes the values with air cushion.

10

) 94 (102) 100.5 R 34 (39.5) 45 (53) 49.5 (57.5) 53 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 Q 108 110.5 113 113 R 36 (41.5) 47 (55) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

Digital Flow Switches

g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

IDU/IDF

IDU3D to 75C Page 24 IDF1D to 75C How to Order Transformer separately installed Base integrated with transformer IDF TR 1500 5 IDF TB 2 Size order Supply voltage Volume Applicable dryer IDU3D, IDF4D IDU4D to 15C, IDF6D to 15C IDF22C1 IDF37C1 to 75C Symbol 1 2 3 4 Applicable dryer IDU3D-1 to11C-1, IDF1D-1 to11C-1 IDU15C-1, IDF15C-1 IDU22C1-3, 37C1-3, IDF22C1-3, 37C1-3 IDU55C-3, 75C-3, IDF55C

CQM

1 !2 !3 !4 !5 !6 !

Refrigerated Air Dryers

[MPa] Correction factor 0.2 0.62 0.3 0.72 0.4 0.81 0.5 0.88 0.6 0.95 0.7 1 0.8 1.06 0.9 1.11 1 to 1.6 1.16 Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15 1.3 Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15 1.3 Refrigerant R134a (HFC) IDU E IDU55E, 75E IDF100F to 150F Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

1 !2 !3 !