Model: 2000 (SV2000), Valve Manifold Stations: 7

Model: 2000 (SV2000), Valve Manifold Stations: 13

Model: 2000 (SV2000), Valve Manifold Stations: 12

Model: 2000 (SV2000), Valve Manifold Stations: 9

Model: 2000 (SV2000), Valve Manifold Stations: 17

Model: 2000 (SV2000), Valve Manifold Stations: 2

Model: 2000 (SV2000), Valve Manifold Stations: 11

Model: 2000 (SV2000), Valve Manifold Stations: 18

Model: 2000 (SV2000), Valve Manifold Stations: 10

Model: 2000 (SV2000), Valve Manifold Stations: 15

Model: 2000 (SV2000), Valve Manifold Stations: 3

Model: 2000 (SV2000), Valve Manifold Stations: 8

Model: 2000 (SV2000), Valve Manifold Stations: 5

Model: 2000 (SV2000), Valve Manifold Stations: 14

Model: 2000 (SV2000), Valve Manifold Stations: 4

IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L, IDG50L Port size Symbol Bore Size V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 3 5 10 20 30 50 60 75 100 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Element service indicator is also available. Refer to Made to Order Specifications on page 14-19-48.

Square Tube Type Air Cylinder Series MB1

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 3-8H10 depth 5 92 11.5 20 67 90 (T-slot pitch) 45 9.4 62 92 8-6.6 4.5 10 58

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25 11 198 9 6 Series CHN Dimensions Front flange type: CHNF Width across flats B2 Rc P Rc P GA2

Aluminum High Vacuum Angle Valve

12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.