Sine Cylinder Series REC

0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

12 2 x 2 x M6 x 1.0 effective depth 10 2 x 5.4 through 52 12 1 28 40 Flat washer 10 10 7 7 28 42.5 + Stroke 5 40 47.5 + Stroke Note 1) Standard strokes available in 5 mm increments.

51

Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35

smcmaintenancepartslist

Caution 1-2.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

P 2 B P 1 2 B 2 B 2 B 2 B Applicable tubing O.D.: 12, 3/8" [1(P), 3/5(R) port] One-touch fitting 1 P 2 B P 1 2 B 2 B 2 B 2 B -+ -+ : 12 : 10, 3/8" Applicable tubing O.D.: 8, 5/16" [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] 1/4,3/8 -+ -+ One-touch fitting Applicable tubing O.D.: 6, 1/4" (X: External pilot port) Applicable tubing O.D.: 6, 1/4" (PE: Pilot EXH port) One-touch fitting

ZP

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

ZP

2 !0 !1 Component Parts o No.

•

-::-t-D~ F50W 25+55 1 n 2) 12S + 5S ln ;,l) 135+55(n;:4) W~tl, pes (Dlflerenl surfaces. 90 95 '5 Same surface). Wiin 1 pc DM90AVL 15+30(n.=.1}2 9O + 30 ~2 95 + 30 (n 2 4 4) With n pes. 2 ~-u~~rr~_~~ ( " 2~. 4 6~~~__~__~_ 4 ,--8 ' 2 .c..; 1~ "'~__ ("~_ 8 .~~2~' .. .) _ _ ~~=-= ~.~.S.. -) ( " =~ ~.~~ 6_ ) +-_~ = 4 ~.~ 1 . ~6 ,--,L g:~~~A6U With 2 pes. (DrHerent surface-so 25 125 135 gj.

Hydraulic Cylinders

(built-in magnet) Nil S n 2 pcs. 1 pc.

CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

CG1

1 !2 !3 !4 !5 !6 !7 !8 !

VQZ1000/2000/3000

) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

2/3 Port Valve

320 210 320 210 220 130 140 90 90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

Shock Absorbers and Rate Controls

*s*rfu'*rs Non-Adjustable Hydraulic Series @$rc^ PM Series Sizing Gurves lmperial ro gf; N : " , d \ E o 9 N Fl E i ' o < n ToTAL ENEFGY (inbs) r 2 0 PA a t o g . o N 7 t O S o o t { q E ! o o o . I 3 o = t o Io | o 5 o o r t 9 = i * o g ! . 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(same side) D-A9, A9V 50 8 9.5 8 D-A9/A9V Reed switch 1 or 2 pcs. (different sides) D-M9N/M9P/M9B 15 3 3 3.5 2 pcs. (same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs.

70astamb1

0 i o @1 @2 @3 @0 !6 !3 r !5 u q ye t !9 !8 !4 w !7 CA2 1 CS1 1 MBK32 only A C76 C85 C95 Rod sectional view A-A' A' CP95 NCM !2 !1 Component Parts NCA No. q w e r t y u i o !0 !1 !2 Description Material Note Description Piston nut Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Material Note No.

mb1

2!8!4w !7 !6 i o A CJ1 CJP CJ2 CM2 A Cylinder tube sectional view A-A CG1 !1!0 MB Component Parts No. q w e r t y u i o !0 !1 !2 !3 No.