Aluminum High Vacuum Angle Valve 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.
6.5 80 72 18 36 20 25 27 45 5 11 95 18 10 100 89 18 41 20 25 30 55 11 115 18 10 5 6-13-11 11 Series CP95 Dimensions: Cylinder Mounting Accessory DS and ES [First angle projection] Mounting style (DS) Bore size (mm) E B1 B2 B3 TG1 T I2 FL d2 d3 CN R H SR (max) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5
11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66
69 (77) 69 (77) 71 (79) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 8 10 12 16 20 20 25 30 13 17 17 19 27 27 32 41 24 29 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4 X 0.7 Depth 7 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 201 to 350 10 (12) 19.5 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 301 to 400 10 (12) 19.5 27 32 32 37 37 M5 X 0.8 Depth 8 35.5
output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (4 to 20 mA) Symbol 3000 6000 12000 10 14 20 1 11/2 2 PF2A703H PF2A706H PF2A712H Switching of switch output and accumulated pulse output is possible with NPN or PNP open collector outputs.
8 83 45.5 10 35 10 40 to 800 30 22 8 52 104 38 16 13 14 16.5 19.5 63 12 4 96.5 27 1/8 91 52.5 14 40 12.5 50 to 1000 35 27 11 65 120.5 46.5 20 14 15.5 19 22.4 75 15 5 111.2 32 1/4 104.5 58.5 18 45 17.5 63 to 1000 35 27 11 75 134.5 56.5 20 14 16.5 23 20.7 90 12 9 123.5 32 1/4 119.5 68 18 45 22 80 to 1000 40 32 13 95 169 72 25 20 19 33 26 102 18 11.5 157 37 1/4 150 81 22 55 25 100 to 1000 40
1 o i w q $7 $8 @4 @3 @5 @1 t 40 Description Component Parts No. 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Qty 1 1 1 1 1 1 1 1 1 1 1 2 1 4 1 1 1 1 1 2 2 4(5) 1 2 Note Zinc chromated Zinc chromated Zinc chromated Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Copper alloy
11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70
Rc 1 1/2 Rc 2 Auto drain Rc 1/4 INA-20-41-04 Note 5) 100 to 200VAC 220 to 240VAC 50 47 50 53 60 60 72 72 114 125 126 135 Weight (kg) Coating color Applicable compressor (screw type) kW Munsell 10Y8/0.5 (White) 11 15 22 37 75 55 Note 1) Select an air dryer according to the selection method and not the rated conditions.
(Pitch) VT L1 4 L2 VT VP VG Manual override (Non-locking) VP 48.5 [55] 36.1 29.5 VQ 20 VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 12 12 8.5 8.5 17.5 1 1.5 17.5 11.5 P R 53.2 [54.5] P R 36 36 49.2 62.8 (Lead wire length) 4-Rc(PT)1/8 4-Rc(PT)1/8 48.5 [55] 300 (P/R port) (P/R port) 300 59.6 [66.1] (Lead wire length) 36.1 48.5 [55] [ ] for AC Other dimensions are the same
65.5 36.5 31.2 17 X 62 5 1 P 3 R1 R2 R1 R2 5 1 P 3 26 (33) 15.2 13.8 8 PE port 4-Rc 1/4 3(R2), 5(R1) port 2-M5 x 0.8 External pilot port 37.4 66.5 11 20 16 20 2-Rc 1/4 1(P) port 20 20 The broken lines indicate the DIN rail mounting style [-D]. (38) 67 11 External pilot specifications L plug connector (L) DIN terminal (Y) 149.5 (3 position) 300 136.5 (Double) 155.5 (3 position) Max. 10
4" 1/8" 3/8" 3/8" 1/4" 1/4" 1/4" 1/2" 1/2" 3/8" 1/4" 3/8" 1/4" 3/8" 3/4" 3/4" 3/4" 1/2" 3/8" 1/2" 1/2" 3/8" 1/4" 1/4" 1" 1" 1" 1" 3/4" 1/2" 3/4" 3/4" 1/2" 3/8" 1/4" 1/4" 16 9 17 10 33.5 29.5 9 16 16 9 19.5 16 19.5 19.5 16 34.5 30.5 29.5 33.5 37 32.5 44.5 37 44.5 45.5 38 10 17 17 10 22.5 17 22.5 22.5 17 30.5 34.5 38 33.5 47.5 38 47.5 48.5 39 16 11 11 16 16 11 21 16 21 21 16 20 14 14 20 20
M6 x 1 M8 x 1.25 M8 x 1.25 11 12 22 25 25 25 25 17 17 22 30 35 35 38 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 M8 x 1.25 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M20 x 2.5 M22 x 2.5 19 26 21 34 37 44 50 56 66 M5 x 0.8 1/8 1/8 1/4 1/4 1/4 3/8 86 107 120 138 150 171 198 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 25 30 36 45 55 68 87 21 24 30 36 46 53 65 16 26 28.5 34.5
12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82
Applicable Connection Model H (Width D L1 L2 M Effective Tube OD mm Thread Across Flats) Orifice (mm 2) Uni Thread Nylon 4 1/8 KQF04-01 14 10 27 11 16 5.6 4 1/4 KQF04-02 17 10 31 14 16 5.6 6 1/8 KQF06-01 14 12 27.5 11 17 13.1 6 1/4 KQF06-02 17 12 31 13 17 13.1 6 3/8 KQF06-03 19 12 33.5 15 17 13.1 8 1/8 KQF08-01 14 14 29 11 18.5 26.1 8 1/4 KQF08-02 17 14 32.5 13 18.5 26.1 8 3/8 KQF08-03 19
8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC Dimensions
8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC Dimensions
8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC Dimensions
800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.