4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

assembly DXT031-38-1A Applicable individual EXH spacer assembly DXT155-17-1A Stations VV5F3 05 40 2 02 R port 02 2 stations P port 20 20 stations A, B port 3-4-25 26 Series VF3000 B Mount (Integrated type) Applicable solenoid valve Bottom ported/Individual EXH type Type 50 VV5F3 05 50 4 02 VF350Applicable blanking plate assembly DXT031-38-1A EXH (R) port (Valve body) Stations 02 2 stations

VQC

Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000

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denotes the bottom ported type. 3-6-12 13 Explosion Proof Solenoid Valve Series 50-VFE/50-VPE Specifications: 50-VFE3000/5000 Explosion proof solenoid valve 5 port/50-VFE3000, 5000 3 port/50-VPE500, 700 VK 50-VFE3000 50-VFE5000 Series VZ Fluid Air Quality of explosion proof spec.

2

, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) 380, 400, 415 VAC (50 Hz) 380 to 400, 400 to 415, 415 to 440 VAC (60 Hz) 440, 460 VAC (50 Hz) 440 to 460, 460 to 500 VAC (60 Hz) Outlet voltage Symbol 500 1 500 VA 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 1000 2 1 kVA Singlephase 2000 2 kVA 3 4 9 200 VAC (50 Hz

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/2000/3000/4000 Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 Product is CE compliant with standard part number.

Blocking Disk (for SV1000 Series), Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Type: Block and Plate for Connection, Type: Blanking Plate Assembly (SV1000), Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Type: Cable, Type: Blocking Disk display sticker, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Model: 1000 (SV1000)

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

VFS

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Body Option Pilot type 0 1 Standard Direct manual override R Internal pilot External pilot Nil Option How to Order Pilot Valve Assembly Option SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 18 or less, Coil rated voltage: 12, 24VDC, Ambient and fluid temperature: -10 to 50 C, Enclosure: IP67 (based on IEC529), EXHAUST RELOCATION SPACER, VALVE, SS5V1 MANIFOLD SV1000, U1, SS5V1 BUILT IN FITTING 1/4), .02750

Vacuum System Peripherals:

block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

VFR

100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-94 95 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR6000 Cylinder Speed Chart Use as a guide for selection.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note Description No. 02 C8 C10 SY760-1 Valve Includes 3pcs. of bushing assembly (SY7000-70-1A) U side Ports P, R: With 12 One-touch fitting Includes 3pcs. of bushing assembly (SY7000-70-1A) SY7000-75-1A 2 Supply/Exhaust block assembly Common for U & D sides (bushing assembly: SY7000-70-1A not included) SY7000-56-1A 3 End block assembly SY7000-70-1A 4 Bushing assembly Refer to page 7.

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Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.

SZ3000

Supply/exhaust block assembly (6): SZ3000-50-1A-C6 External pilot block assembly (6): SZ3000-54-1A-C6 External pilot block assembly (4): SZ3000-54-1A-C4 [Note] SUP blocking disk: SZ3000-114-4A EXH blocking disk: SZ3000-114-4A (2pcs.

LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),