AC Servo Motor Driver (Network card type ）

) . 18-84 18.5.4.11 Jog mode (jg) . 18-89 18.5.4.12 Indexer mode (idx) . 18-96 18.5.5 Touch probe . 18-103 18.5.6 Quick stop . 18-107 18.5.7 Halt . 18-108 18.5.8 Software position limit . 18-109 18.5.9 Torque limit . 18-109 18.5.10 Polarity . 18-110 18.5.11 Degree function . 18-112 18.5.12 Torque offset . 18-114 18.6 MANUFACTURER FUNCTIONS . 18-115 18.6.1 Object for status monitor . 18-115

Smooth Cylinder/Low Speed Cylinder

) MQ Bore size (mm) AL B B1 C D E F G H1 J K KA LD LH LS LT LX LY A RHC 40 50 63 80 100 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 9.0 40 138 3.2 42 70 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 9.0 45 144 3.2 50 80 RZQ 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 11.5 50 166 3.2 59 93 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 13.5 65 204 4.5 76 116 40 37 116 41 92 30 52 14 21 16

Air Cylinder

155 180 205 230 Bore size Stroke range B E F FX FD FT H 20 Up to 125 40 12 2 28 5.5 6 35 25 Up to 200 44 14 2 32 5.5 7 40 32 Up to 200 53 18 2 38 6.6 7 40 40 Up to 200 61 25 2 46 6.6 8 50 * End boss is machined on the flange for E.

NCQ2/CQ2

D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 C Mounting bolt part no.

Air Cylinder Series CM2

1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size 36 18 68 81 93 106 131 156 181 30 20 25 112 60 40 40 10 9 62 122 36 18 72 85 97 110 135 160 185 32 25 32 114 60 40 40 10 9 64 124 36 18 72 85 97 110 135 160 185 32 32 40 77 53 53 11 10 88 154 143.5 46 20 77 90 102 115 140 165 190 41 40 With Rod Boot (mm) l Symbol ZZ Z JH JW Stroke 1 to 50 1 to 50 1 to 50 51

5 Port Solenoid Valve Series SY3000/5000/7000/9000

connector (L): 10-SY5 40(R)-L-02 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 83.4 75.9 MAX.10 157.8 50.6[57.6] 64.6 35.2 49.5 55.1 M8 x 1 37.6 (Lead wire length) Approx. 300 61.7[68.7] Pg7 83.2 39.8 38.3[40.5] 76.7 33.3 18 18 18 18 18 18 18 18 139.6[144] 120[124.4] 57.2 17.3 60.7 137.8 58.1 159.6 28 28 28 28 9.5 22 9.5 22 48.1[50.3] 47.2 9.5 9.5 22 22 Note) Refer

Table of Contents

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

C UA YB-03 32, 40 9 80 50 18 6.5 10 Material: Chromium molybdenum steel (Nickel plated) Applicable bore size (mm) Part no.

ZP

5 3 x 4 4 x 8 3 x 6.5 4 x 9.5 18 34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB

5

64 20 40 10 101 11.5 15 86 105 59 130 17 58 11 80 40 37 102 32 78 25 52 14 119 13.5 18 102 130 76 160 21 71 13 100 40 37 116 41 92 30 52 14 133 13.5 18 116 150 92 180 21 72 16 Bore size (mm) J K KA MM N P S ZZ 40 M8 x 1.25 6 14 M14 x 1.5 27 1/4 84 147 50 M8 x 1.25 7 18 M18 x 1.5 30 3/8 90 160 63 M10 x 1.25 7 18 M18 x 1.5 31 3/8 98 171 80 M12 x 1.75 10 22 M22 x 1.5 37 1/2 116 205 100 M12

NCG/CG1

Bore size (mm) Standard stroke range (mm) Long stroke range (mm) AL H1 H GA F E B1 D J C I KA A K 15.5 19.5 19.5 27 32 32 37 37 35 40 40 50 58 58 71 71 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 5 6 6 8 11 11 13 16 M4 x 0.7 depth

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type

Made to Order

16 10 26 M26 x 1.5 14 192 41 50 47 36 90 18 16 31 M30 x 1.5 15 208 46 CA2 series Width across flats KA Width across flats B1 Bore size (mm) W A AL B1 D H H1 K KA MM W ZZ D 40 50 63 80 100 35 32 20 58 11 7 18 M18 x 1.5 9 153 27 H1 MM 40 37 25 71 13 11 22 M22 x 1.5 9 172 32 AL 40 37 25 71 13 11 22 M22 x 1.5 9 183 32 K A 40 37 30 72 16 11 26 M26 x 1.5 0 205 41 H ZZ + Stroke 50 47 36 85 18 15

Air Cylinder Series CA2

M8 x 1.25 7 18 M18 x 1.5 30 3/8 63 0.032 0.059 18 98 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 M18 x 1.5 31 3/8 80 0.040 0.073 25 116 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 M22 x 1.5 37 1/2 100 0.040 0.073 25 126 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 M26 x 1.5 40 1/2 Bore size (mm) TT TX TY TZ H Z ZZ 22 85 62 117 51 93 140 40 50 22 95 74 127 58 103 154 63 28 110 90

CA2

up to 750 up to 750 B B1 C A AL D E F G H H1 K KA J LD LH LT LX LY MM N P X 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 9 9 11.5 13.5 13.5 40 45 50 65 75 3.2 3.2 3.2 4.5 6 42 50 59 76 92 70 80 93 116 133 M14 x 1.5 27 30 31 37 40 1/4

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Standard stroke range (mm) Long stroke range (mm) A H H1 I J K KA MM NA P TA ZZ AL B1 C D E S TB F GA GB 24 20 25 32 40 50 63 80 100 15.5 19.5 19.5 27 32 32 37 37 8 10 12 16 20 20 25 30 26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 14 16.5 20 26 32 38 50 60 5 6 6 8 11 11 13 16 5 5.5 5.5 6 7 7 10 10 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 10(12) 35 40 40 50 58 58 71

Electric Actuators

T-slot 1 dimensions (Switch groove) 11.5 27 40 80 Stroke + 145 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

Table of Contents

32, 40, 50, 63, 80 and 100.) 8-21-18 18 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !

JIS Standard Hydraulic Cylinder

M18 x 1.5 25 to 1800 135 102 19 42 22 18 44 44 3/4 75 192 20 3 156 40 53 145 40 225 19 15 100 80 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) TDe9 TX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 207 0 0.3 0.040 0.092 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 212 18 M16 x 1.5 25 22 7 14 55 207 0.025

ZP

5 3 x 4 4 x 8 3 x 6.5 4 x 9.5 18 34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB