AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Ambient temperature of servo motor Check environment so that ambient temperature is 0 to 40 . is over 40 . 2. Servo motor is overloaded. 1. Reduce load. 2. Check operation pattern. 3. Use servo motor that provides larger output. 3. Thermal sensor in encoder is faulty.

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

REA_EN

Type Type Elbow type straight type In-line type REA25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REA32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REA40 AS2201F-02-06-X214 AS2301F-02-06-X214 AS2001F-06-X214 REA50 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 REA63 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Table.

Table of Contents

-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12 7 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Grommet type: ISE2-15 01 T1 01 T1 Connector type: ISE2-15C Pressure setting trimmer Pressure setting trimmer L H SET

One-touch Fittings

S 1 4, 6 (Oval type release button) Oval type release button KQ2 8 to 16 H 08 01 G S (Round type release button) Male thread seal method Symbol Seal method Nil Without sealant S With sealant Model Thread material: Stainless steel 303 One-touch fittings Port size/Applicable tubing O.D.

Table of Contents

50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-

5 Port Solenoid Valve Series SV

, 50, 63 Applicable related components Total stroke time s Tubing Speed controller Solenoid valve Silencer 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 400 MB 32 10% 30% 50% 300 70% Stroke mm AS2201F -01-08 AS2200-01 200 100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke

Table of Contents

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-G59F 5 5 5.5 6 7 7.5 8 7.5 D-B5/B6 BA -04 BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

Compact Manifold Regulator

Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 200 150 250 300 0.00 0 50 100 150 200 Flow rate L/min (ANR

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

, 50 40 to 100 40 to 100 40 to 100 12 to 100 20 to 80 32 to 63 25 to 40 32 to 63 32 to 63 20 to 40 20 to 40 20 to 40 20 to 40 40 to 63 40 to 63 16, 20 40, 50 12, 20 12, 20 10, 16 10, 16 Bore size 12 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F79F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F59F

VZM500

-01-06 VZM550-01-06S Toggle lever VZM550-01-08 PAT.

VZM400

-01-06 VZM450-01-06S Toggle lever VZM450-01-08 VZM450-01-30R VM-30CR Red VM-30CB Black VZM450-01-30B Push button (Mushroom) VM-30CG Green VZM450-01-30G VM-30CY Yellow VZM450-01-30Y VZM450-01-32R VM-32CR Red VM-32CB Black VZM450-01-32B Push button (Extended) VM-32CG Green VZM450-01-32G VM-32CY Yellow VZM450-01-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VZM450-01

IZx-OMP0064

For IZS40 For IZS41, IZS42 Symbol Cable full length 40 For IZS40 41 For IZS41, IZS42 01 02 Full length 1m Full length 2m 19 20 Total length 19m Total length 20m Model with Made-to-order power supply cable Available in 1 m increments from 1 m to 20 m.

Fieldbus System

1 A, B port size q Series 3 SY3000 5 SY5000 7 SY7000 Nil Standard (0.7 MPa) B Quick response type (0.7 MPa) K* High pressure type (1.0 MPa) Thread piping Symbol Port size Applicable series M5 M5 x 0.8 SY3000 01 1/8 SY5000 02 1/4 SY7000 * Only metal seal type is available for high pressure type.

VZ3000

pitch) (Lead wire length) G: 300 mm H: 600 mm 2-M5 x 0.8 (PE port) 4-Rc 1/8 (Piping port) L plug connector (L) VZ3 40-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3 4 5 3 4 5 Applicable cable O.D. 3.5 to 7 MAX. 10 3-3-36 Series VZ3000/Base

SMC Electronic Switch Series Variations

ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

ZX

Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output