CL

140 6 7 7 11 11 44 52 64 78 92 14 18 18 22 26 30 35 35 40 40 16 20 20 25 30 71 80 99 117 131 32 40 40 52 52 27 32 32 37 37 10 10 10 14 14 15 17 17 21 21 85 95 102 113 124 60 70 86 102 116 26 27 26 30 31 54 59 67 72 76 10 13 18 23 25 10 12 15 17 19 M10 X 1.25 M12 X 1.75 M12 X 1.75 W/o out rod boot (Both sides) W/ rod boot (One side) Bore (mm) 40 50 63 80 100 MM N PH TDe8 TT TY TZ W PG PL TX

Combination Cylinder

19 20 21 23 54 62 62 67 3.5 4 4 4 12 14 18 8 M5 depth7.5 10 12 16 M5 depth8 25 10 14 M6 depth12 Without rod boot With rod boot Bore (mm) H1 NA P PG PH PL PW S TA TB TC H ZZ e f h l ZZ Stroke range 20 25 32 40 to 200 to 300 to 300 to 300 5 6 6 8 24 29 35.5 44 Rc(PT)1 / 8 Rc(PT)1 / 8 Rc(PT)1 / 8 Rc(PT)1 / 8 33 38 39 44 19.5 24 24 24 11 11 10 10 M5 M6 X 0.75 M8 M10 X 1.25 35 40 40 50 11 11

Modular/F.R.L. Units Series AC

14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30

CLQ

Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection

Stainless Steel 316

(mm) Connection thread R M Weight (g) A D L D Applicable tubing KQGH04-M5 KQGH04-01S KQGH06-M5 KQGH06-01S KQGH06-02S KQGH08-01S KQGH08-02S KQGH08-03S KQGH10-02S KQGH10-03S KQGH12-03S KQGH12-04S 22.3 19.3 4 7.4 M5 x 0.8 4 10 10 18 1/8 24 20 5.6 9.4 M A L 24.1 21.1 4 11 M5 x 0.8 H 12 6 12 24.3 1/8 20.3 18.8 11 10.4 Connection thread 25.8 1/4 19.8 18 14 1/8 30.5 26.5 18 (In case of R) 8 1/4

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.

0.4

D side U side Stations n 8 7 6 5 4 3 2 1 C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 25 40.7 B B B B B B B B X X P P 7.7 18.7 (12) A A A A A A A A 9.3 (7.5) P = 10.5 31.5 18 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread With ejector unit: Formula L1

Dual Rod Cylinder Series CXSJ/CXS

17 44 15 7.5 2 x M4 x 0.7 35 20 4 8 20 6 33.6 8.5 7 30 CX2 2 x M4 x 0.7 thread depth 6 2 x M5 x 0.8 thread depth 8 4 x M4 x 0.7 thread depth 5 CXS15 58 20 56 18 9 2 x M5 x 0.8 45 25 5 10 30 8 48 10 10 38.5 CXW Dimensions by Stroke CXT Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 80 25 20 15 100 10 30 35 40 45 50 60 70 75 80 90 40 35 30 25 20 15 100 10 45 50 60

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Table of Contents

40 50 50 55 55 65 85 , Misc.

0.55

Unit Series VPA700/Base Mounted/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-1l 03 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-1l 3/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24

Stainless Steel One-touch Fittings Series KG

Nylon Urethane KGW04-M5 KGW04-01 8 32 38.5 18 30 37.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 8 3.0 3.0 1 8 10 6 17 12.8 20 10 1 4 KGW06-02 46 46.5 10.9 10.9 17 14 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 18.5 20.5 14.2 15.2 14 12 23 3 8 KGW08-03 17 51.5 52.5 74

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DU1 R1 NZ NX NDH10 NL NL NO U1 NO NX R1 Applicable pin Part no. Part no.

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DR1 U1 NZ NX NDH10 NL NL NO U1 NO NX R1 Part no. Applicable pin Part no.

Stainless Steel 316 Fittings

10.7 17.2 13.5 14.1 16.5 16.6 17.5 15.9 21.6 18.2 18 22.5 22.8 18.9 17.6 25.9 19.8 18.5 28.1 23 12 3.8 3.7 7.6 7.4 8.7 14 12.3 12.8 22.8 17.7 19.1 20.9 37.2 24.8 19.3 33.6 41.6 38.4 M5 x 0.8 M5 x 0.8 1/8 4 12.6 D Applicable tube M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 12 6 13.6 20.6 M A 14 L 24.7 22.9 23.1 25.6 27.5 Connection thread 14 8 16.1 23.3 17 (R) H 17.2 17

Free Mount Cylinder for Vacuum Series ZCUK

13 17 28 19 12 5 to 50 14 18 22 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 21.5 22 22.5 M5 x 0.8 1/8 1/8 15.5 5 to 50 19.5 5 to 50 H HA J L MM P Q QA R S SA T Y Z Model ZC(D)UKQ16 ZC(D)UKQ20 ZC(D)UKQ25 ZC(D)UKQ32 ( ): In the case of a mounted auto switch.

17

A0.2 D (mm) MGPM MGPL/A Hexagon socket head cap screw 50 56 72 82 98 106 130 142 180 210 Bore size (mm) A (mm) B (mm) C (mm) M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 10 12 14 18 22 22 27 27 33 39 41 46 54 64 78 86 110 124 156 188 18 22 24 30 34 40 46 58 54 62 5.

Series KG Stainless Steel One-touch Fittings

Nylon Urethane KGW04-M5 KGW04-01 8 M5 0.8 32 38.5 18 30 37.5 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 3.0 3.0 8 1 8 10 6 17 20 12.8 10 1 4 KGW06-02 46 46.5 17 14 10.9 10.9 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 14 18.5 20.5 14.2 15.2 12 23 3 8 KGW08-03 17 51.5 52.5 74

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N