Mechanically Jointed Rodless Cylinder Series MY1

MY1C MY1HT (High rigidity/Linear guide type) MY1M (Slide bearing guide type) (mm) MY1H Auto switch model Bore size (mm) 16 20 25 32 40 50 63 Auto switch model Bore size 50 MY1HT D-A9/A9V 63 11 7.5 D-Z7/Z80 D-M9/M9V D-M9W/M9WV 11 11 MY1W 7.5 7.5 8.5 7 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Z7/Z80 12 12 12 11.5 11.5 5 5 MY2C D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 5 5 5 5.5 5.5 MY2H D-M9type cannot

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VS VFN C6: One-touch fitting for 6 VVQZ200-10A-5 4-14-35 Base Mounted 36 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ15Stations Port size C Grommet (G) (35) 27.5 (11) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3, C4, C6, M5 (5.5) 2-4.5 mounting hole 20 (7.5) (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Manual override 5.5 A 2 A 2 5

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Caution Fitting assembly part numbers Metric size One-touch fitting for4 VVQ1000-50A-C4 SY3000 One-touch fitting for6 VVQ1000-50A-C6 Caution One-touch fitting for4 VVQ1000-51A-C4 Note 1) When there are 10 or fewer manifold block assemblies, and more are added to make a total of 11 or more, a supply/ exhaust block assembly must also be added.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

Manifold Specifications

One-touch fitting type) VFN n: Stations L Stations 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215 12 223 232 13 240 249 14 257 266 15 274 283 16 291 300 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

123 162.5 139 17 187.5 171 237.5 219 12.5 13.5 11.5 14.5 12.5 Stations L1 L2 L3 L4 13 14 15 16 11 298 12 323 348 373 310.5 300 283 360.5 350 331 287.5 267 312.5 299 12 337.5 315 362.5 347 13 15.5 13.5 16.5 14.5 49 5 Port Solenoid Valve Series SY3000/5000 Stations SS5Y5-45GDUC4 C6 C8 C4 C6 C8 C4 C6 C8 Note) L1 to L4 dimensions of SS5Y5-45GDStations Dare the same as SS5Y5-45GDStations U.

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Digital Flow Switch (Integrated display type)

PF2M701 (1 L/min) PF2M702 (2 L/min) PF2M705 (5 L/min) PF2M710 (10 L/min) -97No.PF-OMW0007-E PF2M725 (25 L/min) PF2M750 (50 L/min) PF2M711 (100 L/min) PF2M721 (200 L/min) -98No.PF-OMW0007-E Dimensions PF2M7#-C4/C6/C8/N7(-L) (mm) Model A P PF2M701/702/705/710-C4(-L) 59.1 2.8 depth 8.4 PF2M701/702/705/710/725/750-C6(-L) 59.9 2.8 depth 8.4 PF2M725/750-N7(-L) 67.5 2.8 depth 8.4 PF2M711/721-C8(

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

4 Port Solenoid Valve Series VQD1000

U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215

Part Number Description: ADAPTOR 1/8NPT TO 10-32   Product Line: V   Product Line Description: VALVE   Family Code: 364   Family Description: SS5YJ3 MFLD SYJ3000   Class Code: 11   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Part Number Description: ELBOW 1/8NPT TO 10-32   Product Line: V   Product Line Description: VALVE   Family Code: 364   Family Description: SS5YJ3 MFLD SYJ3000   Class Code: 11   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Part Number Description: FITTING 10-32 BARB   Product Line: V   Product Line Description: VALVE   Family Code: 364   Family Description: SS5YJ3 MFLD SYJ3000   Class Code: 11   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Large Size Vacuum Module: Series ZR

Vacuum release ON OFF OFF OFF ON OFF Combination Symbol : C4 Feature: Adsorption of workpieces and release of vacuum are switched by double solenoid valve.

EtherNet/IP TM Compatible Fieldbus System

No.EX-OMS0014-A PRODUCT NAME EtherNet/IPTM Compatible Fieldbus System MODEL / Series / Product Number EX500-GEN2 EX500-S103 EX500-DXP# Table of Contents Safety Instructions 3 Product Overview 9 System construction 9 EX500 GW unit Model Indication and How to Order 10 Summary of Product parts 10 Mounting and Installation 11 Installation 11 Wiring 12 LED Display 17 Setting of EtherNet/IPTM using