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(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

Common exhaust: VV3P3-41Stations 1-02 (G) (E) (T) (D, Y) N.C. N.O.

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect

/min 0.46 m3/min 0.80 m3/min (Max.) 0.66 m3/min 0.46 m3/min 0.80 m3/min (Max.)

Example) AM30-N03BD-6RZ-D q e r t y w Symbol Description w Body size 20 30 40 50 60 AFF Nominal filtration rating: 1 m V V V V V Water droplet removal ratio: 99% AM Nominal filtration rating: 0.1 m V V V V V Oil mist concentration on the outlet side: 1 mg/m3 q Filter type AMD Nominal filtration rating: 0.01 m V V V V V Oil mist concentration on the outlet side: 0.1 mg/m3 + e Thread type

(Tightening torque of M3 screw: 0.5 to 0.7 Nm) 8.

22 M L For positive pressure ZSE50 02 M F 22 L For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Dimensions Grommet VQ1l0l-lGlM5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 Mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking style manual override 30.7 28 11 A P (4.1) (5.9) (5.9) 7 5 5 5 4.9 9.7 4.9 3-M5 (M3) (18.1) ( ): M3 Broken line: locking style manual override 2.9-8 Series VQ100 Dimensions L plug connector VQ1l0l-lLlM5 (M3) (37.8) 31.4 Manual override 6.1 4.9 12.4

(VJA314) ZX1-VJ114K1, J1 q Misc. 1 2 M3 M5 M3 x 0.5 Pilot port/ External release port M5 x 0.8 ZX1-VJ3 4w K3, J2 1 2 e ZX1-VJA3 4 K8 Table (4) How to Order Ejector Assembly Air operated N.C. (ZX1A) ZX1AK6 r 05 ZX1 1 D W Table (2) How to Order Solenoid Valves Assembly no.

The tightening torque of the M3 screw must be 0.35 to 0.45 Nm. yConfirm where the mounting position is, and tighten the auto switch fixing screw (M2.5) to fix the auto switch mounting nut.

M3 0.610.63Nm 1) 12mm 10mm -10- 2)L L 4 -11- L (M3X6)L :0.610.63Nm M3 -12- L L M3 (M3X6) :0.610.63Nm 3) :0.610.63Nm 90 -13- 4)DIN L :0.610.63Nm (M3X6)L :0.610.63Nm DIN :0.610.63Nm -14- 5) :0.610.63Nm 3 M3 L DIN -15- 4 4 4 4-3. 3. 3. 3. 1 +24V 2 GND 3 OFF 4 ONOFF OFF 5 0N 6 OFF 7 ON 8 1 ON 9 2 ON ()D ON NPN:GND ONOFF PNP:24V ONOFF NPN:(GND )ONOFF

T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the known unit. Also, the flow characteristics line shown in the Graph (2).