F

Applicable Model D L A Fitting Size d Inch 3.2(1/8) KQP-01 5 31.5 16 Applicable Model D L A Fitting Size d mm 3.2 KQP-23 3.2 31.5 16 4(5/32) KQP-03 6 32 16 4 KQP-04 6 32 16 4.8(3/16) KQP-05 6.8 34 17.5 6 KQP-06 8 35 18 6.3(1/4) KQP-07 8.5 35 18 8 KQP-08 10 39 20.5 8(5/16) KQP-09 10 39 20.5 10 KQP-10 12 43 22 9.5(3/8) KQP-11 11.5 43 22 12 KQP-12 14 46 24 12.7(1/2) KQP-13 15 46 24 16 KQP-14

MY1

Refer to page 46.

CY1

N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5 103 TW 65 70 75 S 161 169 209 PP 21

Basic type / Direct mount type Series CY3B/CY3R

54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB

CV/MVGQ

M10 x 1.25 18 18 18 8 11 11 10 10 10 32 40 40 84 90 98 38 43.5 49 The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

M10 x 1.25 18 18 18 8 11 11 10 10 10 32 40 40 84 90 98 38 43.5 49 With rod boot Without rod boot The minimum stroke of the one with rod boot is 20 mm or more.

HRX-OM-T002

. 9-3 9.1.4 HRS090-W-20. 9-4 9.1.5 HRS090-W-40. 9-5 9.1.6 HRS090-W-46. 9-6 9.1.7 Refrigerant with GWP reference . 9-7 9.1.8 Communication specification . 9-7 9.2 Outline dimensions . 9-8 9.2.1 HRS090-A-20/40/46-. 9-8 9.2.2 HRS090-W-20/40/46-. 9-9 9.3 Flow diagram . 9-10 9.3.1 HRS090-A-20/40/46-. 9-10 9.3.2 HRS090-W-20/40/46 . 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRS090-A-20/40/46-. 9-11

24

A0.2 Bore size [mm] A [mm] B [mm] C [mm] D [mm] Hexagon socket head cap screw MGPM MGPL/A 12* 50 18 41 10 8 M4 x 0.7 16 56 22 46 12 10 M5 x 0.8 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M6 x 1.0 32 98 34 78 22 18 M8 x 1.25 40 106 40 86 22 18 M8 x 1.25 50 130 46 110 27 22 M10 x 1.5 63 142 58 124 27 22 M10 x 1.5 80 180 54 156 33 28 M12 x 1.75 100 210 62 188 39 33 M14 x 2.0 4.

•

~""" iRR02 , U 10 12 12 21 29.9 46 57 80 91 1.7 3 (ExcePt fOr) U /2,14 13 12 21 29.9 ZPR13 46 57 80 91 3 1.8 1 ,5. C 54 56 ZPR10C I 56 ~PRllII ZPR10 ZPR16U 16 18 12.5 21.5 30.4 46.5 57.5 80.5 91.5 3.5 1.2 C Deep type 54 ZPR13 54 54 mml 54 'y o ' O A ~B Ij G 75 ~ 1 2 10 60 83 94 6 76 2; '" ZPR16D 16 18 15 6 5l 61 84 Z ~6 ~O 75 75 ZPR?S 76 76 76 Apphcable tube mm ZPI!

Air Slide Table

29 6 A B NN x M6 x 1 Tapped through hole 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) ZZ 108 108 108 118 136 169 226 254 282 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 K 31 41 51 61 71 96 121 146 171 J 46 46 46 56 72 100 155 190 215 I 16 16 16 16 18 23 25 18 21 NN 2 2 2 2 3 3 4 4 4 H 46 46 46 56 56 56 59 62 G 22 22 22 22 17 18 37 56

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

MG

82 30 64 18 15 M6 x 1.0 1/8 1/4 3/8 7 to 9 0.5 mm or less 32 98 34 78 22 18 M8 x 1.25 12 to 14 1 mm or less 40 M8 x 1.25 106 40 86 22 18 22 to 24 1 mm or less 50 M10 x 1.5 130 46 110 27 22 a Plug M10 x 1.5 63 142 58 124 27 22 M12 x 1.75 80 180 54 156 33 28 M14 x 2.0 100 210 62 188 39 33 8-19-6 Series MGP/ In the Case of With End Lock Specific Product Precautions Be sure to read before handling

ZP

A B 6 18 A B 4 4 11 11 1.8 6 4.5 4 1.8 1.2 0.8 6.5 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) Non-rotating (J) Rotating (K) A B D A B D Model Model Rotating (K) Non-rotating (J) ZP3-Y04UM:3-B5 ZP3-Y04UM:6-B5 ZP3-Y04UM:10-B5 ZP3-Y06UM:3-B5 ZP3-Y06UM:6-B5 ZP3-Y06UM:10-B5 12.2 13.4 15.4 12.2 13.4 15.4 22.5 25 29 40 46 56 11 14.5 20.5 12.8 14.2 16.6 22.5 25 29 40 46

ZP

Model A E F Flat B C D Model ZPR10D-0-A10 Flat with ribs 10 12 15 24 32.9 49 6 U C ZPR13 -0A10 U C ZPR16 -0A10 U C 7 ZPR16D-0-A10 ZPR10 -0A10 16 18 16 25 33.9 50 15 12 21 1.7 10 12 29.9 46 1.8 3 13 Dimensions by Stroke 16 18 12.5 21.5 1.2 3.5 30.4 46.5 10 16 J Model Dimensions by Stroke G H G H 10, 13 16 ZPRD10-0-A10 60 23 83 61 84 J Model G H G H ZPRD20-0-A10 70 132 71 133 51 U C ZPR 20-

Air Cylinder

Applicable bore size A A1 E1 LA LB MM ND NX NZ R1 U1 Included pin part number Retaining ring size Split pin Y-020B 20 46 16 20 25 36 M8 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-032B 25, 32 48 18 20 25 38 M10 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-040B 40 68 22 24 49.7 55 M14 x 1.5 12 16 +0.3 +0.1 38 13 25 CDP-3 3 x 18 L A knuckle pin and retaining rings (split

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

VM

(mm) Model Effective area (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 18 2(A) 4 1(P) 4 1(P) R 2(A) 2(A) R 3(R) VHK R-04F-04F 47.6 23.8 23.8 16.5 51.6 15.8 15.8 3.4 1.2 41 3.5 11 VHK R-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHK R-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHK R-10F-10F 22 10 10 46 61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHK

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

25 19 42.5 36 3/4" LVA M 25 1 49 8 69.5 39.5 18 36 36 44.5 46 1" LVH Class 6 LVD Inch sizes (E) shows the approximate dimension of the inserted tubing from the end of the nut.

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

Electric Actuator

10.5 9 10 to 100 25 14 20 18 36 14.5 10 101 to 200 10 to 100 32 14 22 18 36 18.5 10 101 to 200 CU RR CW L CL + Stroke A + Stroke +0.4 +0.2 CX Material: Cast iron (Painted) The A and CL measurements are when the unit is in the original position.