Made to Order

66 44 20 64 10.5 7 75, 100 157.5 40.5 63 50 or less 155 36 165 46 14 8 20 30 16.5 19.5 12.5 66 44 20 77 10.5 7 75, 100 165 46 Bore size K L M O P Q R RR RR1 U1 W Z A1 A2 B1 C1 H1 L1 MM X 32 14 46 34 M6 x 1.0 1/8 10 10 10 12 14 49.5 14 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 40 14 46 40 M6 x 1.0 1/8 12.5 10 10 12 14 57 15 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 50 17 59 50 M8 x 1.25 1/4 10.5 14 14

Hydraulic

38 58 109 25 to 800 29 14 57 136 39 3/8 11 13 88 14 37 104 40 0.15 0.18 M10 x 1.25 37.5 11 21 10 45 65 118 25 to 800 29 14 57 136 42 3/8 11 13 95 14 36 104 50 M10 x 1.25 45 14 27 10 52 76 145 25 to 800 35 18 60 150 46 1/2 11 18 115 17 43 116 63 M12 x 1.5 50 18 27 10 63 90 165 25 to 800 41 19 71 156 52 1/2 14 20 132 19 43 114 0.20 80 M16 x 1.5 60 18 22 11 80 110 190 25 to 1000 45 20 74 166

Air Cylinder

[mm] Bore size A B C D F FB FC FT FX FY FZ GB H MM NA NB NC NN S 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 6 15 12 14 3 8 11 4.5 1.6 24 14 32 5 28 M3 x 0.5 3 9.5 7 M6 x 1.0 37 (42) 46 (51) 50 (55) 64 (69) 10 15 12 14 4 8 13 4.5 1.6 24 14 32 5 28 M4 x 0.7 4.8 9.5 M8 x 1.0 45.5 53 65 77 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 5 28 M5

Table of Contents

N N Z + Stroke REAS15 (mm) A B C D d EA EB FA FB G GP H HA HG Model REAS15 7.5 9.5 5 16.6 12 6 13 3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 REAS25 10 11 6.5 26.4 16 8 14 4 7 8.5 70 54 40 20 REAS32 12.5 14 8 33.6 20 8 16 5 7 9.5 86 66 46 24 REAS40 12.5 14 8 41.6 25 10 20 5 10 10.5 104 76 57 25 HP HS HT J x K L LD M MM N NN Model REAS15 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5

Table of Contents

L06-03 L08-01 43 55 46 12 10 14 9 21.8 35.8 37.5 36 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 17 12 38 39.7 40.7 19 35.9 37.9 36.9 23.3 16 14 17 14 Connection thread 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R thread installation.

CQ2

58.5 68.5 66.5 76.5 74 84 40 7 36 78.5 39.5 68.5 10 6 14 22 18 28.5 CT 4-N Cap bolt CD hole H10 50 8 44 90.5 40.5 76.5 14 7 20 28 22 33.5 axis d9 63 98 46 84 8 44 14 8 20 30 22 33.5 Bore (mm) Refer to p.2.3-18 for details of rod end nut and optional brackets.

Fluoropolymer Piping Equipment

25 LQ1R6A-F 1" 3/4" 35.5 6 24 9 18 21 43 28 7 29 14 28 26 54 39 15 29.5 LQ1R52-F 12 9.4 LQ1R53-F 19 3/4" 37 15 36 LQ1R54-F 12 9.4 LQ1R59-F 19 3/8" 30.5 14 25 LQ1R61-F 25 3/4" 35.5 21.2 36 LQ1R6B-F 3/4" 15 LQ1R6C-F 1" 1" 46 21.2 44.5 LQ1R6D-F 3/4" 15 42.5 7 29 14 28 26 54 39 8 39.5 18 36 36 69.5 49 21.2 36 LQ1R62-F 19 15 LQ1R63-F 25 1" 46 21.2 44.5 LQ1R64-F 19 15 LQ1R66-F 25 1/2" 41 17.8

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

40 78.5 39.5 68.5 10 6 14 22 18 28.5 36 7 Double clevis style: CQ2KD/CDQ2KD CT 4-N 50 Cap bolt 90.5 40.5 76.5 14 7 20 28 22 44 8 33.5 CD hole H10 63 98 46 84 14 8 20 30 22 44 8 33.5 Shaft d9 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

1

108 49 14 30.7 14 108 54 14 33.2 14 110 64 14 36.5 15 121 77 14 41 16 136 92 17 46.2 16 139 100 17 53.2 23 165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.

AC Servo Motor Driver (Pulse input type/Positioning type ）

. 14-9 14.3.4 Checksum . 14-9 14.3.5 Time-out processing . 14-9 14.3.6 Retry processing . 14-10 14.3.7 Initialization . 14-10 14.3.8 Communication procedure example . 14-11 14.4 Command and data No. list . 14-12 14.4.1 Reading command . 14-12 14.4.2 Writing commands . 14-18 14.5 Detailed explanations of commands . 14-20 14.5.1 Data processing . 14-20 14.5.2 Status display mode . 14-21 14.5.3

JIS Standard Hydraulic Cylinder

21 11 35 14 37 104 88 M10 x 1.25 13 11 3/8 39 136 57 14 29 40 0.15 0.18 25 to 800 118 65 45 10 11 21 37.5 14 36 104 M10 x 1.25 95 13 11 3/8 42 136 57 29 14 50 25 to 800 145 76 52 10 27 14 45 17 43 116 115 M10 x 1.25 18 11 1/2 46 150 60 18 35 63 25 to 800 165 90 63 10 27 18 50 19 132 43 114 M12 x 1.5 20 14 1/2 52 156 71 19 41 0.20 80 25 to 1000 190 110 80 11 22 18 60 24 44 124 155 M16 x 1.5

Smooth Cylinder/Low Speed Cylinder

I-020B I-032B I-040B +0.058 0 +0.058 0 0.1 0.2 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 +0.058 0 +0.058 0 0.1 0.2 0.1 0.2 9 M10 x 1.25 M10 x 1.25 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 +0.070 0 +0.070 0 0.1 0.3 0.1 0.3 12 M14 x 1.5 M14 x 1.5 15.5 16 12 16 24 50 20 14 13 92 69 22 24 55 20 Double Knuckle Joint Y (Max.)

Table of Contents

43 61 49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111 The figures in parentheses are the normally open type. 22 23 Series VX21/22/23 For Water, Oil, Steam/Manifold Dimensions: Manifold/Base Material: Brass, Stainless Steel Normally closed (N.C.): VVX21/VVX22/VVX23 Normally open (N.O.)

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) NB NA MM LY LZ LX LT LH LC LB KA H GA F CB CA BB Y BA X A NN Bore size (mm) 10 16 5.5 12.5 25 33 2.3 14 5.5 21.5 4.2 28 8 8 14 17 12 9 15 6 15 M10 x 1.0 M4 x 0.7 42 5.5 12.5 25 33 2.3 14 5.5 23 5.2 28 8 8 20 20 18.3 9 18.3 6 15 M12 x 1.0 M5 x 0.8 42 Dimensions by Stroke Symbol S Z Bore size (mm) Stroke 61 to 75 87 61 to 75 115 46 to 60 80 81 46 to 60

CJ2

(mm) GB 5 5 GA 14.5 8 8 FZ 32 32 42 FY 14 14 20 FX 24 24 33 FT 1.6 1.6 2.3 FC 4.5 4.5 5.5 FB 13 13 19 F 8 8 8 D 3 4 5 T 3 NN M6 X 1.0 M8 X 1.0 C 14 14 20 S 49 46 47 MM M3 X 0.5 M4 X 0.7 M5 X 0.8 B 12 12 18 NB 7 9.5 9.5 H 28 28 28 A 15 15 15 NA 16 12.5 12.5 Z 77 74 75 Bore 6 10 16 M10 X 1.0 With air cushion/Dimensions not mentioned in the below table are the same as the above table.

ZP

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

40 68.5 78.5 39.5 10 6 14 22 18 28.5 36 7 Double clevis style: CQ2KD/CDQ2KD CT 4-N 50 Cap bolt 76.5 40.5 90.5 14 7 20 28 22 33.5 44 8 CD hole H10 63 46 84 98 14 8 20 30 22 33.5 44 8 Shaft d9 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

Air Cylinder Series MB

+0.30 +0.10 +0.30 +0.10 0.10 0.30 +0.30 +0.10 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 40 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14

Air Slide Table

) depth 3 19.3 10.7 6 A 9.5 10 5.1 29 29 +0.030 0 2 x 5H9 ( ) depth 3 A 6 +0.030 0 2 x 5H9 ( ) depth 3 HA GA NN x M6 x 1 thread depth 9 Cross-sectional view A-A 48 36 16 Bottom view of MXQ20-50Z Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ20-10Z 45 18 14 8 46 50 70 24.5 34 113.5 4 2 85 104 MXQ20-20Z 40 18 14 8 46 50 70 24.5 34 123.5 4 2 85 104 MXQ20-30Z 48 28 24 18 46 50 70

5

Applicable bore size A A1 E1 LB MM NDH10 NX R1 U1 I-020B 20 46 16 20 36 M8 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 Bore size A H MM NDH10 NX1 U1 R2 Y Z 20 18 41 M8 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 11 66 Low Speed 25, 32 22 45 M10 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 14 69 I-032B 25, 32 48 18 20 38 M10 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 MQ 40 24 50 M14 x 1.5 12 +0.070 0 16 0.1 0.3 20 14 13 92 I-040B