Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

Stainless Steel 316 Fittings

KQG2W16-03S KQG2W16-04S 31.2 31.3 35.1 31.6 31.7 35.5 32.7 32.8 36.6 38 37 40.2 41.6 46.6 45.9 50.1 47.7 49 53.2 57.6 61.4 13.1 32.4 32.3 34.5 33.2 33.1 35.3 13 14.7 33.1 13.6 15.6 33.9 15.5 17.2 35.5 57.4 28 37.7 60.9 40.7 61.9 117.3 44.6 56.3 112.9 86.6 111.8 M5 x 0.8 1/8 1/4 M 3.2 12 8.3 2.8 13.6 D 13.7 3 4 M5 x 0.8 1/8 1/4 4 12.6 9.1 14.4 A L2 14.7 3 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1

KG

(mm) <M5> Note) L P D Nylon Urethane 2-applicable tubing KGU04-01 KGU04-M5 4 11 20 12 11 21 34 M5 x 0.8 10.4 36 38 40 39.5 42 46 42.5 45.5 49 51 52.5 55.5 56.5 2.2 2.2 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 58.5 59 60.5 M5 x 0.8 13 1 8 1 4 3 8 1 8 17 12.8 12.8 6 13.4 10.6 14 17 25.6 17.7 15 23 35

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

Auto Switch Guide

CP95 Auto switch mounting screw M5 x 0.8 x 16 l 1.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

mm) Female rod end A1 8 8 12 13 18 18 MM M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 X ZZ 24 26 27 31 33 35 H 13 14 14 15 16 16 Bore size 90 93 99 111 126 132 20 25 32 40 50 63 735

Table of Contents

16 14 255 241 350 347 210 196 IDG50LM 1/4, 3/8 149 145 56 86 196 13 9 14-19-49 46 Series IDG Made to Order Specifications: Please contact SMC for further details about dimensions, specifications, and delivery.

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

Clamp Cylinder with Lock

1 o i w q $7 $8 @4 @3 @5 @1 t 40 Description Component Parts No. 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Qty 1 1 1 1 1 1 1 1 1 1 1 2 1 4 1 1 1 1 1 2 2 4(5) 1 2 Note Zinc chromated Zinc chromated Zinc chromated Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Copper alloy

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

LEC-OM02904

13.3 . 5 13.4 . 5 13.5 . 6 13 1 13. 13 13.1 13.11

51

14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1

AC Servo Motor Driver (CC-Link Type ）

5 13.

Auto Switch Guide

Auto switch CEP1 CE1 Auto switch mounting screw M5 x 0.8 x 16 l 1.

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

EX120/121/122

CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR 13 PWR e 15 e t y y t Shown with cover removed.

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5