VCC

PA PA PA PA PA IN IN PA IN RETURN IN RETURN IN RETURN IN 646 Valve for Water and Chemical Base Fluids VCC Series How to Order Manifold 02 VV CC1 G M 06 C4 04 With gate valve Passage number Gate valve and cleaning valve mountable number 2 port valve, Cleaning valve 2/3 port valves mixed mounting 2 M 02 04 06 Cleaning valve (2 port valve): 1 pc. + Gate valve: 1 pc.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc(PT)1/8 Mounting/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 Pad diameter (mm) 20 to 32 Rc(PT)1/8 M8 x 1.25 40, 50 Rc(PT)1/8 Ball joint rotation 15 Pad Types Ball joint Pad

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

Stainless Steel One-touch Fittings Series KG

Nylon Urethane M5 Weight (g) D L1 L2 L3 A M P M5 0.8 KGLU04-M5 KGLU04-01 KGLU04-02 KGLU06-M5 KGLU06-01 KGLU06-02 KGLU06-03 KGLU08-01 KGLU08-02 KGLU08-03 KGLU10-02 KGLU10-03 KGLU10-04 KGLU12-02 KGLU12-03 29.5 32 36 11 10.4 18.5 24 25.5 4.3 4.3 10 12 21 4 1 8 1 4 26.5 27.5 16 10.4 30 6.0 6.0 30.5 14 M5 0.8 26.5 33 29.5 14 16 23 36 4.3 4.3 13 1 8 29.5 36 32 12.8 21 17 12.8 6 1 4 33 39.5 33.5

ARM10/11

58 68 69 70 75 76 77 82 83 84 06 07 08 18 19 20 25 26 27 32 33 34 3.

ARM10/11

58 68 69 70 75 76 77 82 83 84 06 07 08 18 19 20 25 26 27 32 33 34 3.

Series KG Stainless Steel One-touch Fittings

Nylon Urethane M5 Weight (g) D L1 L2 L3 A M P KGLU04-M5 KGLU04-01 KGLU04-02 KGLU06-M5 KGLU06-01 KGLU06-02 KGLU06-03 KGLU08-01 KGLU08-02 KGLU08-03 KGLU10-02 KGLU10-03 KGLU10-04 KGLU12-02 KGLU12-03 M5 0.8 29.5 32 36 11 10.4 18.5 24 25.5 4.3 4.3 10 12 21 4 1 8 1 4 27.5 16 10.4 30 26.5 6.0 6.0 30.5 14 M5 0.8 26.5 33 29.5 14 16 23 36 4.3 4.3 13 1 8 29.5 36 32 12.8 21 17 12.8 6 1 4 33 39.5 33.5

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

3.22 04 4 06 6 08 8 10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Stainless steel type (Stainless steel 303) Restrictor (Without check valve) The material can be visually identified by color of the release button.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

CL

41 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 8 11 11 13 16 96 108 115 129 140 27 32 32 37 37 44 52 64 78 92 15 17 17 21 21 60 70 86 102 116 16 20 20 25 30 26 27 26 30 31 32 40 40 52 52 54 59 67 72 76 10 10 10 14 14 10 13 18 23 25 85 95 102 113 124 10 12 15 17 19 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M8 X 1.25 M8 X 1.25 M10 X 1.25

Table of Contents

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

Title not found

-diameier r-t, L, | , u, E 3/16" 1t4" 07 09 1 1 3/8" 1/2" 6mm 8mm 10mm 12mm 06 08 1 0 H , T , U , X , N '10-32 UNF Thread 1/16" NPT 1/8" NPT 1/; NPT H, L, W, T, Y, U, E Double branch \" Male run tee Double branch universal elbow Branch unNersal elbow Branch universal female elbow Triple branch universal elbow M5 x 0.8 M6 x 1.0 PT1/8 PT1/4 PT3/8 Pr1/2 M6 0 t 02 03 o4 a a a a a a a a a a a

Auto Switch Guide

BJ2 -010 BJ2 -016 BA-06 BA-08 BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.

Modular Type Air Filter Series AF

Body size C With bowl guard AF20 Port size M5 1/8 1/4 3/8 1/2 3/4 1 AF10 to 60 Symbol 10 20 30 40 50 60 Note 5) Drain guide 1/4 AF30 to 60 N Note 1) Float type Note 4) auto drain (N.O.) M5 01 02 03 04 06 10 D AF30 to 60 Flow direction: Right to left AF10 to 60 F Note 2) Note 3) Bracket is not assembled and is supplied loose at the time of shipment.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

Auto Switch Guide

BJ2 -010 BJ2 -016 BA-06 BA-08 BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12