Vacuum

Series sY100A o M3 o.22 (O.O12l sYJ300 o a M3 0.9 (0.05 NVZ300 a a M5 3.6 (0.2 NVZ500 o o 1/8 9.0 (0.s) NV2200 o M5 3.24 (0.18) NVZ400 o 1ta 9.0 (0.5) NVS3115 a a 1t8,'v4 '19.8 (1 .1 NVS3135 o o U4,3lA,112 46.5 (2.58) NVS3145 a o 1t2,3/4 81 (4.s) vx2 a o 1t8-1t2 3-31 (0.171.7) vx3 o o 1t8,3/4, 1t4 1.4-9 (0.08-0.s) vxz2 a 1 t 4 1 34-215 (1 .9-12) sg-z s4 118" 5132', s'lo aE qg 1t4'5t16',31A

HRX-OM-S004

Circulating fluid temperature: 31 This product Users equipment Serial communication Fluid discharge temperature: 31 Circulating fluid display temperature Heat 31 dissipation 1 Circulating fluid set temperature 30 Offset temperature 30 1 HRS Series 5.9Offset function 5-23 HRX-OM-S004 Chapter 5 Display and setting of various functions When only the "displayed circulating fluid temperature

MXH

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30 4 30 40 45 72 6 20

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

[Option] Type 20 Applicable solenoid valve 10-SYJ312M--M3(-Q) 10-SYJ322M--M3(-Q) How to Order SS3YJ3 05 20 10 A port M3 x 0.5 Clean series Applicable blanking plate assembly Refer to page 610.

240

4.8 5 19 5 17 15 38 39 18 5.5 19 5 18 5.5 16 9 5.5 10 10.5 8.5 4 NS 31 + Stroke 39.5 + Stroke 10 5 + Stroke 4 x M3 x 0.5 Depth 4.8 10 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

MXW

For details, refer to page 8-30-31. 8-7-22

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

LEC-OM02904

PB06 PB07 PB08 PB09 PB10 5 8 5 (2) (No.PA09) , , [Hz] [Hz] 1 10.0 17 67.1 2 11.3 18 75.6 3 12.7 19 85.2 4 14.3 20 95.9 5 16.1 21 108.0 6 18.1 22 121.7 7 20.4 23 137.1 8 23.0 24 154.4 9 25.9 25 173.9 10 29.2 26 195.9 11 32.9 27 220.6 12 37.0 28 248.5 13 41.7 29 279.9 14 47.0 30 315.3 15 52.9 31 355.1 16 59.6 32 400.0 5.1.8 No.

Compact Guide Cylinder

x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2 23 M4 x 0.7 6 4.2 16 (12 x 2) 3.4 6.5 2 M3 x 0.5 6.5 16 18.5 8 28 14 53 42 57 10.2 24 M4 x 0.7 6 4.3 6 JMGP Series Bore Size 20 (16 x 2) to 40 (32 x 2) Standard: JMGPM WA + Stroke

SFOD-OMT0009CN

5.1 . 31 (1) C PWR . 31 (2) M PWR . 31 (3) CI . 32 5.2 . 33 (1) . 33 (2) . 34 6.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Rc 1/8 Vent hole tap 25ALEC 18 LEC S [mm] LEC SS-T Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T U Y V LEC Y LEC Y 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 1 26.5 40 105 to 400 155.5 141 Motorless 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 118 1 34 60 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 M16

PSxx-OMT0001CN

3 () 2 E210-U01 ZS-31-C ZS-31-B Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-41No.PS-OMT0001CN-E 4 80 kPa220 kPa (ON/OFF) OFF ON (43 ) 1 5 2 OUT1 OUT2 / (62 ) (48 ) (45 ) ,[F10](56 ) -42No.PS-OMT0001CN-E 4 () (ON/OFF) () (45 )OUT1

PF2A/PF2W

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without unit switching function.) Refer to the specifications of display unit for the flow rate value per pulse.

3

CLKG CKQ CLKQ Auto switch mounting screw CK CLK CKQ Hexagon socket head cap screw (Included with auto switch) (M2.5 x 12L) t Tighten the auto switch mounting screw (M3) to fix the auto switch. The tightening torque of the M3 screw must be 0.35 to 0.45 Nm. t The detection position can be changed under the conditions in step e.

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

VQC

pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19 581 667 18 556 642 17 531 617 16 506 592 15 481 567 14 456 542 13 431 517 12 406 492 11 381 467 10 356 442 9 331 417 8 306 392 7 281 367 6 256 342 5 231 317 4 206 292 3 181 267 2 156

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

ZX

Air supply pressure port (M3, PS port) (Mounting hole) ZY Interface plate M5 (V port) Vacuum pad connection port ZQ Adsorption nozzle piping port M5 x 0.8 (or M6 x 1) 4 18 15.5 ZF Pitch = 10 Phillips screw M2.5 x 51 Bracket A (Standard accessory) (PE port) (PV port) Vacuum supply pressure port ZP 2-3.3 mounting hole ZCU AMJ Misc.