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IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

MB

23 27.5 23 40 27.5 27.5 38.5 36.5 29.5 81.5 42 34 71.5 30 26 27.5 33 26 27.5 26 CS1 50 34.5 34 43.5 41 33.5 87 46.5 38 77 34.5 31 39 31 31 63 39.5 39 48.5 46 39 93.5 51.5 43 83.5 40 36 44 36 36 C76 80 46.5 46.5 55 52.5 47.5 103 58 52 92.5 48.5 45 51.5 45 45 100 55 55 62 59.5 55.5 113.5 65.5 60 103 56.5 53.5 60.5 53.5 53.5 C85 125 66.5 66.5 71.5 70.5 67.5 125 76.5 72 115 68.5 65

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Give the operation command from the PC or PLCetc after the lock is released. 3 31 3.

Modular F.R.L. Units

-A AFD40-A AC AFARAL AWAL AFAR AFAFMAR AWAFM AF AFM / AFD AR AL AW Attachment Model Port size Fluid Ambient and fluid temperature Proof pressure Maximum operating pressure Minimum operating pressure 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 AFM20-A to AFM40-06-A AFD20-A to AFD40-06-A AFM20-A to AFM40-06-A AFD20-A to AFD40-06-A AFM20-A to AFM40-06-A AFD20-A to AFD40-06-A Nominal filtration rating Outlet

Power Valve Precision Regulator

Without thread: Internal pilot VVEXB-1 With M5 thread: Common external pilot VVEXB-2 (79) 61.5 P1 A A R 31 26 19 P 10 9 8 P=31 35 Port 1(P): 1 8 25.5 n x port 2(A): 1 8 For 6 manifold stations or more, exhaust from the both sides. 37 29 L Dimension L1 = 31n + 25, L2 = 31n + 12 n: Station 2 87 74 L1 L2 3 118 105 4 149 136 5 180 167 6 211 198 7 242 229 8 273 260 9 304 291 10 335 322 Symbol

7.5

Nil R Internal pilot External pilot M3: M3 x 0.5 (SJ2000 only) M5: M5 x 0.8 (SJ3000 only) Back pressure check valve External pilot spec. is not applicable for 4 position dual 3 port valves. None Built-in Nil K Back pressure check valve is not applicable for 3 position valve.

KK/KK13

Tightening of M3, M5, and M6 screws 1) M3 After tightening by hand, tighten an additional 1/4 rotation with a tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with a tool. Over tightening can cause damage to the threads and/or air leakage due to deformation of the gasket. Under tightening can cause loose threads and air leakage, etc. 1.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 1) SI unit Symbol Protocol type W10S10 W10S1QW W10S1NW W10S1VW W10S1TAW W10S1TBW W10S1TCW Note) Without SI unit DeviceNet PROFIBUS DP CC-Link Note 2) AS-Interface (8 in/8 out, 31 slave modes, 2 power supply systems) AS-Interface (4 in/4 out, 31 slave modes, 2 power supply systems) P, E port location AS-Interface (8 in/8 out, 31 slave modes, 1 power supply system) U D B U side (2 to 10

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

T

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

KG

Note) D1: Max. diameter 18.5 26.5 31 28.5 31.5 36.5 35.5 36.5 38.5 41.5 9.8 13.4 23.5 24 12 15 14.5 22.5 18.5 25 8 1 8 12.8 15.3 23.5 17 6 Applicable tubing 7.5 5.9 1 4 10 M3 x 0.5 1 8 1 4 3 8 1 4 3 8 3 8 1 2 15.5 18.5 24.5 25.5 20.5 30 11.2 16 12 15.2 17.6 28.5 8 18.5 20.5 14.3 14 20.6 27.5 19.5 20.5 29.5 30 10 27 20.3 14 18.5 20.6 31 21 22 25 32 33.5 12 20.9 25.2 34 22 17 30.8 39 Applicable

Clamp Cylinder with Lock

Round head Phillips screw (M3 tightening torque: 0.5 to 0.7 Nm) Spring washer Mounting bracket part no.

Air Cylinder Series MB

25.5 34 25.5 31.5 28.5 25.5 38.5 27.5 36.5 27.5 71.5 27.5 81.5 27.5 29.5 26 30 26 42 33 31 38.5 31 36 33.5 31 43.5 34.5 41 34 77 87 33.5 31 34.5 31 46.5 39 36 43 36 40.5 38.5 36 48.5 39.5 46 39 83.5 93.5 39 36 40 36 51.5 44 45 52 45 49 46.5 45 55 46.5 52.5 46.5 92.5 103 47.5 45 48.5 45 58 51.5 53.5 59.5 53.5 57 54 53.5 62 55 59.5 55 103 113.5 55.5 53.5 56.5 53.5 65.5 60.5 64.5 71

HRX-OM-T004

52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS090 Series 5-14 HRX-OM-T004 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-R028

52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-R028 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-Q033

52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-Q033 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-S010

52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS100/150 Series 5-14 HRX-OM-S010 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

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hn slencer iype d@s nol sal st rhe 1 Io t2124) N4ult'Connector kit wilh 1 5m cable Mulh-conneclor klt wlh 3 0m cable l4ulliconnector kitwiih 5 0m catr]e Botlom ported elbow Wilh03 2 One-touch fttng SeialkitwilhoulSl unit 1n212 (24) Boitom ported elbow Wilh 06 One-touch ntl ng AS. fterla@ 8 n8oul 31 s al/e mode 2 isolatd common ASrledace 4 rll4oLii 31 s ave mode 2 isolaled comfion As-lnledace

IZx-OMV0005

Dimensions 06 07 Energy saving nozzleIZN10E-01 06 07 High flow rate nozzleIZN10E-02 Note M3 x 0.5 depth 4 Ground terminal 2 x M3 x 0.5 depth 10 Note Note) Dimensions of the area ( shaded) on page 5 Mounting 3).