Industrial Filters

10 13 18 12 15 20 Internal capacity (L) 14 21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

MB

18 22 26 With Mounting Bracket Refer to basic mounting (B) for other dimensions and with rod boot.

2/3 Port Valve

Refer p.4.1-18, 4.1-19 for specifications and models.

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Table of Contents

Without brake 18 85 Mitsubishi Electric Corporation With brake 3.2 Yaskawa Electric Corporation Cable length 18 5m 05 Applicable cables LJ1 (non-standard motor), LXP/LXS (AC servomotor) 35 Model Manufacturer part no. 16 MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LJ1-1-G051 4.5 101 110 18 MFECA0050FAB (for motor) MFMCA0050AEB (for encoder) MFMCB0050CET (for brake) LJ1-1-G05B LJ1-7

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M 13 40.5 6 18.5 10 10 12.8 12.8 KB 8 A L 14 44.5 48.5 53.5 57 54 59.5 62.5 4.2 8 17 15.2 20.5 26 18 15.2 KR (R) Connection threads H 10 19 18.5 23 41 29 18.5 KA (R) 12 22 20.9 20.9 24 58 46 2 x Applicable tubing KQG2 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

MXS

MXU With end lock(16) MXS16-llR With buffer(16) MXS16-llF 2-M6 X 1 thread 10 deep MXS Operating port 2-M5 X 0.8 J 13 MXQ 12 18 48 MXF MXW 20 41 3 MXP 30 0.5 37.5 * Dimensions not indicated are the same as the basic sytle.

SV

Specified layout (Up to 18 solenoids possible.) 18 18 18 stations 18 stations Note 2) Specified layout: Indicate wiring specifications on a manifold specification sheet. Note 1) Double wiring specifications: Single, double and 3 position solenoid valves can be used on all manifold stations. Use of a single solenoid will result in an unused control signal.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-18 to 11-4-19 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-18 to 11-4-19 for details of made-to-order specifications.

LEY-OM007

LEY-OM00701 / // LEY Series LEY LEYG LEYG Series () LEY Series () LEC Series /LEC6 . 2 /. 3 .3 .4 .6 /LEY. 9 .9 .11 .12 /LEYG. 13 .13 .15 .16 . 17 .17 .17 .20 .32 . 35 . 36 .36 .37 .38 .39 .40 .40 . 41 .41 .41 .44 .45 .47 . 48 -1- LEY / (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

ZR

M2.5 x 0.45 x 17 M2.5 x 0.45 x 21 M2.5 x 0.45 x 66 M2.5 x 0.45 x 70 w Common and port exhaust style for nozzle size 18, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

C76

1 4 3 12 5 16 14 11 13 9 2A 2B 2C CJ1 CJP Front nose F Front nose in line port Y Basic: Double end E CJ2 10 17 8 6 15 7 18 CM2 CG1 MB Built-in magnet Component Parts MB1 No.

C76

5 Chromate Nickel plating White anodized Hard chrome plated (Switch type only) C7632 to 40 Air cushion 16 4 7 2 3 5 6 8 9 10 11 15 12 1 13 14 17 18 20 Standard 19 Built-in magnet Component Parts No. Description Material Note Qty. No. Description Material Qty.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Refer to pages 6-9-12 to 6-9-18.

CLQ

Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper

Basic Type/Direct Mount Type

18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 CY3B CY3R CY3B CY3R M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 CY1S M5 x 0.8 M26