VCA

36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted

5 Port Solenoid Valve, Series VQC

Note 4) For external pilot option, "-R", indicate the external pilot specification "R" for the applicable valves as well. Note 5) The built-in silencer type does not satisfy the IP67 standard.

Size: 1/4, Cleaning Grade: A grade: Ultrasonic Cleaning+Precision Cleaning, Pressure Setting: 0.05 to 0.7MPa, Relief Function: Non-relieving, Thread: NPT, Port Size: Rc1/8, Direction of Gauge Port: -

Size: 1/4, Cleaning Grade: A grade: Ultrasonic Cleaning+Precision Cleaning, Pressure Setting: 0.05 to 0.7MPa, Relief Function: Non-relieving, Thread: NPT, Port Size: Rc 1/2, Direction of Gauge Port: -

Size: 1/4, Cleaning Grade: A grade: Ultrasonic Cleaning+Precision Cleaning, Pressure Setting: 0.05 to 0.7MPa, Relief Function: Non-relieving, Thread: NPT, Port Size: Rc1/4, Direction of Gauge Port: -

Size: 3 (1/4), Cleaning Grade: 0 (A grade: Ultrasonic Cleaning+Precision Cleaning), Pressure Setting: 1 (0.05 to 0.7MPa), Relief Function: 0 (Non-relieving), Thread: N (NPT), Port Size: 01 (Rc1/8)

Size: 3 (1/4), Cleaning Grade: 0 (A grade: Ultrasonic Cleaning+Precision Cleaning), Pressure Setting: 1 (0.05 to 0.7MPa), Relief Function: 0 (Non-relieving), Thread: N (NPT), Port Size: 04 (Rc 1/2)

Size: 3 (1/4), Cleaning Grade: 0 (A grade: Ultrasonic Cleaning+Precision Cleaning), Pressure Setting: 1 (0.05 to 0.7MPa), Relief Function: 0 (Non-relieving), Thread: N (NPT), Port Size: 02 (Rc1/4)

Size: 3 (1/4), Cleaning Grade: 0 (A grade: Ultrasonic Cleaning+Precision Cleaning), Pressure Setting: 1 (0.05 to 0.7MPa), Relief Function: 0 (Non-relieving), Thread: Rc(PT), Port Size: 01 (Rc1/8)

Size: 3 (1/4), Cleaning Grade: 0 (A grade: Ultrasonic Cleaning+Precision Cleaning), Pressure Setting: 1 (0.05 to 0.7MPa), Relief Function: 0 (Non-relieving), Thread: A (Metal Gasket Seal Fitting), Port Size: 02 (Rc1/4)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Available in Clean, Compatible Fluid: Air / Nitrogen / Water, Exhaust Mechanism (Air Bleed): [Not Provided] Non-relief, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Control Side Connection Type: Rc, Control Side, Connection Diameter: 1/8, Pressure Gauge

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Available in Clean, Compatible Fluid: Air / Nitrogen / Water, Exhaust Mechanism (Air Bleed): [Not Provided] Non-relief, Supply Side Connection Type: [Other] URJF (With Metal Gasket Seal Fittings), Supply Side, Connection Diameter: 1/4, Control Side Connection Type: [Other] URJF

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

HEC-OM-S008

31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38

SL5200

Vespel is a registered trademark of DuPont. 27 Single Stage Regulator for Ultra High Purity Intermediate flow Series SL5400 For UHP gas delivery Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Springless design (No poppet spring in the wetted area) How to Order Port Number q w e r SL54 S M FV4 FV4 02 2PW Delivery pressure Code Delivery pressure

HRS100/150

Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

LEC-OM02904

PB26) kpps pulse r/min (6) (No.PB28) (7) 7 14 7 7.6.4 (1) (CDP) (a) No.

Clean Gas Filter

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female