Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry
(ZSM1-115) to 100 VDC to 100 VAC 24 to 125 VDC 100 to 250 VAC 24 to 220 VDC 100 to 550 VAC Voltage 100 VAC/DC or less (ZSM1-121) Repeatability 0.05 MPa 0.05 MPa 3% F .S. 3% F.S. 3% F.S. 3% F.S. 10% F.S. 15 kPa or less (ZSM1-115) 0.02 to 0.35 MPa (Without pointer scale) 0.03 to 0.4 MPa (Without pointer scale) Hysteresis (Calibration range of ISG) 0.08 MPa or less 0.01 to 0.2 MPa 7 to 53 kPa
M5 M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46
Note 4) When the suction flow rate is 0 L/min, the particle concentration is measured during operation without suction. 510 A Particle Generation Characteristics 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) 11-LEFS16 Speed 500 mm/s 11-LEFS25 Speed 500 mm/s 10 10 LEF
D-A93 D-M9B D-M9N Load voltage 24 VDC 28 VDC or less 24 VDC (10 to 28 VDC) Load current range Indicator light 5 to 40mA (24 VDC) 40mA or less 5 to 40mA Relay, PLC IC circuit, Relay, PLC 24 VDC Relay, PLC PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list.
Application Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC Style Reed switch Auto switch part no.
258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Connector type Grommet type Heat-resistant vinyl electric wire 1.55 0.31 mm2 4-wire Oil-resistant vinyl cabtire code -21, -23: 3.5 0.14 mm2 4 cores -22, -24: 3.5 0.15 mm2 5 cores Lead wire Data Weight 40 g (including 0.6 m-long lead wire) R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted
T-interface (T): M5 x 0.8, 1/8, 1/4, 3/8, 1/2 E Using a T-interface facilitates the redirection of air flow.
) Servo motor (24 VDC) Step motor (Servo/24 VDC) Max. number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 560 Page 560 Page 600 Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500 50
Input and control unit power supply: 24 VDC 10% Solenoid valve power supply: 24 VDC + 10%/5% (with power drop warning at approx. 20 V) Power supply voltage range Communication power supply for DeviceNet 11 to 25 VDC 200 mA or less (single GW unit) Current consumption Communication power supply for DeviceNet 50 mA or less Input Unit Manifold Number of inputs/outputs Maximum 64 inputs/64
NVJA3l+M5 1G32 Nom. (M5) [10-32Nom. (M5) I IB3T ] 0.086(39) /without subplate\ \0.04(18) t NVJA324.M5 Bas mounted typo with subdato N.C. N.O. 0.1 t0.081 Note) B3T : One touch fitting for %' tube.
NVJA3l+M5 1G32 Nom. (M5) [10-32Nom. (M5) I IB3T ] 0.086(39) /without subplate\ \0.04(18) t NVJA324.M5 Bas mounted typo with subdato N.C. N.O. 0.1 t0.081 Note) B3T : One touch fitting for %' tube.
NVJA3l+M5 1G32 Nom. (M5) [10-32Nom. (M5) I IB3T ] 0.086(39) /without subplate\ \0.04(18) t NVJA324.M5 Bas mounted typo with subdato N.C. N.O. 0.1 t0.081 Note) B3T : One touch fitting for %' tube.
8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class
Symbol Specifications Grade Symbol Unit: MPa Nil M With M5 (Female thread) 0.2 0.4 0.7 1.0 2 4 7 10 Symbol Component parts polishing, Assembly environment Note) Use M5 female thread when panel-mounting for piping.
Switch range error 1 12 VDC 4 to 20mA 2 12 VDC 0 to 10 VDC Pressure exceeding upper limit of set pressure is applied. Pressurization error 3 24 VDC 4 to 20mA 4 24 VDC 0 to 10 VDC 14-8-38 5 Series IC Controller for Electro-pneumatic Regulator Descriptions Description OUT display Displays output specification to electro-pneumatic regulator. RUN display Displays control status.
: 5 Pilot valve assembly VQZ111P: Coil rated voltage Example) 24 VDC: 5
ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G 120 60 58 3 AF 16 P Lead Wire 120 Volt Line A.C. 60 Hertz 3-Way Normally Closed .6MM Inlet Manifold Mount with Manulal Overide 10-32 Sleeve Adapter Series 58 Valve .8MM Exhaust Orifice NOTE: L Marked Prior to numbers denots Low Watt * For 3 way valves, this digit will consist of two suffix letters.
D-M9B D-M9N, D-M9P D-A93 Load voltage Load current range Indicator light Application 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905 Rotary Actuator 11-CRA1-Z Rotation
D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away