Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2WB18010DC C (D) Q2WB20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2WB18020DC C (D) Q2WB20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2WB18030DC C (D) Q2WB20030DC M18 x 155 l M18 x 165 l 155 165 36 39 C (D) Q2WB18040DC C (D) Q2WB20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2WB18050DC

Table of Contents

VQ0 VQ0 0.59 0.50 10.5 Up to 40 VQ1000 1.0 0.84 11 Up to 50 VQ4 VQ2000 2.7 2.3 16 Up to 80 Flip type demonstrates space-saving effect. Cassette type enables flexible, speedy station increasing/decreasing.

5 Port Solenoid Valve Series SQ1000/2000

Metal seal 15 or less Maximum operating pressure 0.7MPa (High pressure type: 1.0MPa) Single 2 position 3 position 4 position 4.5 (0.25) SQ1131 15 or less 80 Rubber seal 20 or less 0.1MPa 0.15MPa Single 3.2 (0.18) SQ1230 15 or less 80 Metal seal 0.18MPa 0.18MPa Double (latching) Double (latching) Minimum operating pressure 4.5 (0.25) SQ1231 20 or less 80 Rubber seal 0.1MPa 0.1MPa Double

Series CE1

Cylinder stroke (mm) Bore size (mm) 25 50 100 75 125 150 175 300 200 500 250 400 0.29 0.33 0.4 0.36 0.43 0.47 12 0.51 0.58 0.72 0.65 0.79 0.86 0.93 1.0 20 0.94 1.15 1.05 1.26 1.36 1.47 1.58 1.79 32 2.0 1.7 1.83 1.95 2.08 2.2 3.7 2.45 3.2 40 2.7 3.4 5.5 50 4.1 4.2 6.6 63 5.0 Rod End Nut Dimensions (1 piece is included as standard.)

CE

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

VZ5000

VFS Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm VS4 Series MB, CA1 Note) Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series VQ7 EVS 800 700 600 500 400 300 200 100 0 749 749 Perpendicular, upward actuation Horizontal actuation 610

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Cross sectional area 0.23mm2 3.5 to 7 85.5 78 60 M type plug connctor (M) R 3 1 P (Lead wire length) 82.5 94.5 61.5 300 Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light R 3 1 P Equation L1=19n+11 L2=19n+23 n: Stations (Max. 20 stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200

IZx-OMP0064

Distance from the ionizer to the neutralized workpiece (mm) IZS40/41 IZS42 With air purge With air purge Ion generation frequency (Hz) Without air purge Without air purge High speed static neutralization cartridge 0.1 100 to 175 50 to 1300 50 to 2000 50 to 2000 0.5 100 to 175 50 to 1300 50 to 2000 50 to 2000 1 300 to 500 300 to 1500 400 to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000

CE

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

CE

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Applicable cable O.D. 3.5 to 7 Station n L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 43 Series SYJ700 Type 40 Manifold: Bottom Ported/SS3YJ7-40Stations -01 [ ] for AC Grommet (G) 53.5 5 L2 L1 10.5 1.5 19.5 3.4 48.4 (

Air Slide Table

70 36 141.5 152 175 2000 Standard type 10 MXQ25A-10-10Zm-X2192 5 30 MXQ25A-5-25Zm-X2192 55 71 55 84 80 72 54 151.5 172 195 2200 10 MXQ25A-10-20Zm-X2192 15 MXQ25A-15-15Zm-X2192 5 MXQ25A-5-35Zm-X2192 65 61 65 74 90 62 64 161.5 172 195 2100 10 MXQ25A-10-30Zm-X2192 15 MXQ25A-15-25Zm-X2192 20 MXQ25A-20-20Zm-X2192 5 135 (120)*1 80 40 MXQ25A-5-45Zm-X2192 75 61 80 69 110 75 66 184.5 187 210 2500

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Rotary Actuator

Size Current model [kg] Reduction rate [%] CRA1 [kg] Angle adjustable type 30 50 63 80 100 0.3 10 0.27 Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 1.5 13 1.3 D50 to 100 50 to 100 Rotating angle 2.5 12 2.2 90, 180, 100, 190 90, 180, 100, 190 4.3 10 3.9 8.5 14 7.3 With solenoid valve Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 Mounting interchangeable with the current model 50 to 100 50 to

CG1

62 f 16 17 17 17 17 18 10 7 h 55 62 62 70 78 78 80 80 IJ 27 32 38 48 59 72 59 71 JH (14.5) (17.5) (19.5) (22.5) (25) (25) 11 11 11 12 13 13 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 20 25 32 40 50 63 80 100 Bore (mm) S ZZ 70 70 72 80 95 95 140 150 152 180 211 211 20 25 32 40 50 63 0.25 stroke The minimum stroke for rod boot equipped style is 20mm.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Battery-less

External Gripping State Internal Gripping State H : Overhang L : Gripping point H : Overhang L : Gripping point L L Gripping position H Gripping position H LEHF32 LEHF40 120 100 100 80 Overhang H [mm] Overhang H [mm] 80 40% 60 40% 60 40 Pushing force 100% Pushing force 100% 70% 70% 40 20 20 0 0 20 40 60 80 100 0 0 20 40 60 80 100 120 Gripping point L [mm] Gripping point L [mm] * Pushing force

Proposals for Energy Saving

, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion Rubber bumper Air cushion CBM2: Rubber bumper

Cylinder with Lock Series MNB

2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.