Prevents Micro-Bubbles

16 54.5 18 47.5 33.5 47.5 M8 x 1.25 95.5 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 Rc 1/2, 3/4 NPT 1/2, 3/4 LVA5 58 75 19 61.5 27.5 60 43 55.5 M8 x 1.25 122.5 Rc 1 NPT 1 LVA6 58 85 24 69 27.5 43 63 60 M8 x 1.25 130 17-5-20 18 Series LVA Threaded Type Dimensions Body material: PPS Basic type VC A D L VDW VQ 4-M K VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

CG5-S

, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

High Purity Chemical Valve

95.5 16 54.5 18 47.5 33.5 47.5 M8 x 1.25 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 Rc 1/2, 3/4 NPT 1/2, 3/4 LVA5m 58 75 122.5 19 61.5 27.5 60 43 55.5 M8 x 1.25 Rc 1 NPT 1 LVA6m 58 85 130 24 69 27.5 60 43 63 M8 x 1.25 474 Series LVA Air Operated Type Threaded Type Dimensions Body material: PPS Basic type LVC A D L LVA LVH 4 x M K LVD LVQ 2 x Q LQ1 Sensor (Breathing port) R LVN PB E G H TL/TIL PA C LQ3

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0.9 to 75 0.8 to 90 0.7 32 D400 K 8cos + 2 (5.1 + Lo) sin Angle coefficient (k): k = [to 45 (= )] = 1, [to 60] = 0.9, [to 75] = 0.8, [to 90] = 0.7 Lo: Distance from mounting surface to load center of gravity (cm) 40 20 36 10 5.25 6 2.55 15 17.5 Bore size (mm) -X Allowable load weight (WA) (kg) 1.9 + Lo 2.2 + Lo 2.7 + Lo 2.9 + Lo 205.

MXF

0.12 0.04 0.04 MXF16-50 CX MXF16-50 0.03 0.03 0.08 MXF16-30 D0.02 0.02 MXF16-30 0.04 0.01 0.01 -X 20 40 60 80 100 0 0 20 40 60 80 100 120 60 0 40 80 100 20 20Load (N) Load (N) Load (N) Data MXF20 Lr = 50 mm 0.10 0.10 0.28 MXF20-100 MXF20-100 Table displacement amount (mm) Table displacement amount (mm) 0.24 Table displacement amount (mm) 0.08 0.08 MXF20-75 0.20 0.06 0.06 0.16 MXF20-50 MXF20

CV/MVGQ

60 4 7 34 5 13 15.5 28 8 18 57.5 13 26 30 5 8 45 75 60 4 7 40 5.5 13 19.5 33.5 10 22 63.5 17 32 37 6 8 45 75 60 4 7 40 5.5 13 19.5 37.5 12 22 68 17 32 37 6 8 50 82 36 66 5 7 52 7 16 21 46.5 14 24 76 22 41 47.3 8 10 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Bore size (mm) Z NN NA N MM Symbol Q QY Bore (mm

ZP

30 122.5 72.5 50 167.5 92.5 75 Vacuum inlet: One-touch fitting Applicable tubing O.D.

/

PE 12 E Bracket Main port R J D 1 2 3 I O M C N H B P: For mounting 4 locations G A Air Operated Type A B C D E F G H I J K L M N O Model SGHA130-10 SGHA230-3015 SGHA230-7015 SGHA330-3020 SGHA330-7020 SGHA430-3025 SGHA430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150

Electric Actuators

Lead 10 (LEPS10LJ) 2.2 Selection example) Based on the graph shown on the right side, 0 P Set value of pushing force: 75 [%] 60% 70% 75% 80% 90% 100% P Pushing force: 6.7 lbf (30 N) Therefore, the LEPS10LK is temporarily selected.

CJ5-S

, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CJ5-S

, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

Low Profile Slide Table Series MXF

F A A MXH Lr MXF16 MXU Lr = 40 mm 0.07 0.07 0.20 MXS Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 0.06 MXF16-75 MXQ 0.16 MXF16-75 MXF16-75 MXF16-50 MXF16-30 0.05 0.05 MXF 0.12 0.04 0.04 MXF16-50 MXW MXF16-50 0.03 0.03 0.08 MXF16-30 0.02 0.02 MXJ MXF16-30 0.04 0.01 0.01 MXP 0 0 20 40 60 80 100 20 40 60 80 100 120 60 0 40 80 100 20 MXY Load

Table of Contents

30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 60 10 40 MHC 60 MHT 16 40 MHY 60 MHW 20 40 MRHQ 60 25 Misc. 40 30 D32 20 2030 40 P . 12-4-7 20 Note) The open and close time spans represent the value when the exterior of the workpiece is being held.

air-filter-e

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Air Preparation Equipment

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Air cylinder

side) 60 75 80 85 2 switches (Same side) 90 100 105 110 D-A3 D-G39 D-K39 65+30(n2) n=2, 4, 6, 8 Other qty.

Base Mounted Metal Seal/Rubber Seal Series VQ

Coil rated voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Wiring Specifications The lead wires are connected to the valve as shown below. Connect each to the power supply side.

Clamp Cylinder with Lock

25 45 60 A Part no.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.