Integrated Controller

W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000

TABLE OF CONTENTS

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

Table of Contents

PF2W504--1 PF2W520--1 PF2W540--1 PF2W511--1 PF2W504--2 PF2W520--2 PF2W540--2 PF2W511--2 4 0.5 4 0.5 16 2 16 2 40 5 40 5 100 10 100 10 16-11-24 21 Series PF2W Digital Flow Switch For Water Dimensions: Remote Type Display Unit for Water PF2W3-A Panel mounting type Internal circuit and wiring example to are terminal numbers.

Basic type / Direct mount type Series CY3B/CY3R

CY3B15 CY3B50 1000 500 50 40 30 20 300 200 10 5 100 Usable range Usable range 20 30 40 50 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B63 CY3B20 200 1000 100 500 400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder

Hygienic Design Cylinder Series HY

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Intermediate strokes of 1 mm each can be produced.

AC Servo Motor Driver (Network card type ）

Regenerative power [W] LEC-MRLEC-MRBuilt-in Driver RB-032 RB-12 [40 ] regenerative [40 ] resistor LECSN-T5 30 LECSN-T7 10 30 100 LECSN-T8 10 30 100 LECSN2-T9 20 30 100 11.2.2 Parameter setting Set [Pr. PA02] according to the option to be used. [Pr. PA02] 0 0 Regenerative option selection 00: Regenerative option is not used.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Regenerative power [W] LEC-MRLEC-MRBuilt-in Driver RB-032 RB-12 [40 ] regenerative [40 ] resistor LECSB2-T5 30 LECSB2-T7 10 30 100 LECSB2-T8 10 30 100 LECSB2-T9 20 30 100 11.2.2 Parameter setting Set [Pr. PA02] according to the option to be used. [Pr. PA02] 0 0 Regenerative option selection 00: Regenerative option is not used.

Table of Contents

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

CXS

50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 1000mm/s 5 3 CXSM CXSL 32 2 Weight m (kg) 25 1 20 0.6 5 10 20 30 40 50 100 Overhang L (mm) 62 Model

4/5 Port Solenoid Valve

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

MNB

2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

C76

: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting

C76

40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32,

mb1

L1 E1 E1 L1 MM NDH10 NX U1 NDH10 NZ A A1 R1 U1 R1 NX MM CA2 32 40 50, 63 80 100 32 40 50, 63 80 100 20 22 28 40 40 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M Y-03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are attached

70astamb1

L1 E1 E1 L1 MM NDH10 NX U1 NDH10 NZ R1 U1 R1 NX A A1 MM CA2 32 40 50, 63 80 100 32 40 50, 63 80 100 20 22 28 40 40 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M Y-03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are attached

17

50,63 22 (10) 22 (10) 40 40 40 50,63 40 40 40 32 32 32 32 32 32 11 (5) 10 20 30 50 40 51 100 101 300 200 11 (5) 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 110 (50) 110 (50) 100 100 100 80 80 80 Load mass m lbs (kg) Load mass m lbs (kg) 100 100 80 80 100 22 (10) 22 (10) 80 11 (5) 10 100 20 29 30 5051 300 200 11 (5) 10 100 20 29

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M18 x 1.5 M22 x 1.5 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 Torque Related 63 63 Equipment Vacuum entry 80 80 100 100 B01 N01 T01 1 8 NPT 1 8 NPTF 1 8 Rc 125 125 Pad type H Heavy duty Buffer stroke (Rotating) Stroke 40 50 63 80 100 125 50 25 Material N S NBR 75 Silicon rubber Urethane rubber Fluororubber 100 U F E EPR 1193 Series ZPT ZPT HJ-01-A18 (With buffer) 40 50

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

0 80, 100 80, 100 !1 !0 u Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CS95-32 No. Description Material Note 1 Rod cover Aluminum die-cast 40 CS95-40 50 CS95-50 63 CS95-63 80 CS95-80 100 CS96-100 2 Head cover Aluminum die-cast 3 Cylinder tube Aluminum alloy Kits include items !5, !