Compact Cylinder with Lock Series CLQ

L x 105 L 105 115 130 150 -75D -75D -75D -50D x 140 L x 155 L x 175 L x 110 L 110 140 155 175 -100D -100D -100D CDLQB25-5D x 165 L x 180 L x 200 L M5 x 70 L 70 165 180 200 CDLQB40-10D CDLQB63-10D CDLQB100-10D -10D M5 x 85 L M8 x 100 L M10 x 125 L x 75 L 75 85 100 125 -15D -15D -15D -15D x 90 L x 105 L x 130 L x 80 L 80 90 105 130 -20D -20D -20D -20D x 95 L x 110 L x 135 L x 85 L 85 95 110

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.

Compact Manifold Regulator

Knob Position Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max.28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 51.5 6 51.5 80 13 OUT IN 3 28 13 13 OUT IN OUT IN 3 3 2. OUT Piping Position 3.

90

160.5 135 150 161.8 172.5 162.5 173 150 165 176.8 187.5 187.5 198 165 180 191.8 202.5 200 210.5 Inch size 1 Common pilot pressure supply port is only for vacuum pump system.

Compact 5-Port Solenoid Valve

ZK2 Combination Manifold n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 101 110 119 128 137 146 155 164 173 182 191 200 209 218 227 L2 61.4 70.4 79.4 88.4 97.4 106.4 115.4 124.4 133.4 142.4 151.4 160.4 169.4 178.4 187.4 L3 135.5 148 160.5 160.5 173 185.5 185.5 198 210.5 223 223 235.5 248 248 260.5 L4 125 137.5 150 150 162.5 175 175 187.5 200 212.5 212.5 225 237.5 237.5

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

Vacuum Unit

Exhaust Characteristics Flow Rate Characteristics 150 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 135 90 60 Air consumption 120 80 40 Vacuum pressure 70 105 Port exhaust 20 Vacuum pressure [kPa] Silencer exhaust/Complex exhaust 0 0 20 40 60 80 100 60 90 Suction flow [L/min (ANR)] 50 75 Flow Rate Characteristics 60 40 100 Suction flow (High-noise reduction silencer exhaust

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn X-axis Xn Z-axis Zn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

LEC-OM02904

A4 (2) LECSS150%55 (3) (SCCRShort Circuit Current Rating) UL100kA(500V) (4) [mm] LE-2502506 S5S6S7 25025012 S8 (5) 1530KW20 [min] LECSS2-S5 LECSS2-S7 1 LECSs2-S8 LECSS1-S5 LECSS1-S7 2 12 (6) 70% 04575 LECSS-(115% (full load current)) 1000 1000 100 100 10 10 [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 [] [] LECSS-S5 LECSS-S7LECSS2-S8 13 (7) UL/cULUL60/75 60[AWG

MXW Series Long Stroke Slide Table

Movable load W 200 MXW25 170 W 150 120 MXW20 100 Max.movable load (N) Movable load N MXW16 70 W Model 60 50 40 18 MXW 8 MXW12 30 40 MXW12 25 70 MXW16 20 MXW8 17 15 110 MXW20 W W 12 170 10 MXW25 50 100 200 300 500 Piston speed mm/s 1N = 0.2248 lbf (Graph1) 1N = 0.2248 lbf Mp Mep (Pitch moment) My Mey (Yaw moment) Mr (Roll moment) Moment MXW25 120 (Static moment / movable moment) Allowable

Air Catch Sensor Series ISA

Detection nozzle: 1.0 Detection side piping: 6 x 4 tubing Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing Detection nozzle: 2.0 Detection side piping: 6 x 4 tubing 70 70 70 60 60 60 Supply pressure Supply pressure Not detectable 50 50 50 0.1MPa Hysteresis (m) Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

Compact

LAT Speed [mm/s] Work load: Horizontal [kg] Equivalent lead [mm] Stroke [mm] Series Size Page LZ 6 (10) 25 1000 Page 170 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 LEMB Basic type LC3F2 48 11 (20) 1000 Page 170 32 LEMC Cam follower guide type 25 10 1000 Page 170 50, 100, 150, 200,

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 75 125 150 10 20 30 125 75 100 20 50 10 40 13-/22-MXQ6(L) 13-/22-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70

Series AK1000

0.48 30 0.21 60 25 0.17 0.41 20 0.14 50 0.34 15 0.10 10 0.07 40 0.28 0 5 0.00 0.03 30 0.21 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95