JIS Standard Hydraulic Cylinder

95 2 105 115 100 35 + 30 (n 2) (n = 2, 3, 4) 80 + 30 (n 2) (n = 2, 3, 4) 115 + 30 (n 2) (n = 2, 3, 4) 115 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 3, 4) 95 + 30 (n 2) (n = 2, 3, 4) 105 + 30 (n 2) (n = 2, 3, 4) 105 + 100 (n 2) (n = 2, 3, 4) Different surfaces D-G39 D-K39 D-A3 Note 1) n 100 + 100 (n 2) (n = 2, 3, 4) same surface 1 95 115 105 80 10 35 55 Different surfaces

CNA

100 100 Load weight m(kg) Load weight m(kg) 63 63 63 50 50 50 50 40 30 50 40 30 MLGC 40 40 40 CNA 20 20 10 10 CB 5 4 3 5 4 3 CV/MVG 2 2 CXW 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CXS Max. speed V(mm/s) Max. speed V(mm/s) CXT Graph n Graph c 0.4MPa P < 0.5MPa 0.4MPa P < 0.5MPa 1000 1000 MX 100 100 100 500 400 300 500 400 300 80 80 80 MXU 100 100 100 63 63 63 200 200

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Dimension L 66 67 68 69 70 71 923 935.5 948 960.5 973 985.5 No.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 9kg Positioning time (sec) Positioning time (sec) 150 100 50 10 1 150 100 50 10 1 Positioning distance (mm) Positioning distance (mm) 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 50 50 3.1 2.1 1.1 0.3 0.1 3.1 2.1 1.1 0.3 0.1 100 100 1.6 1.1 0.6 0.2 0.1 1.6 1.1 0.6 0.2

Best Pneumatics Vol. 14

70 G 27 40 54 54 66 66 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 E 47 47 H 22 23 26 25 35 35 C 26 36 38 40 38 41 45 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176

100

(Representative value) ZL3H (04P) ZL3M (04P) Supply pressure: 0.5 MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series

JXCx-OMT0061CN

() 2 () * ) () 3 11.1 12 64 ()() No. 1 2 mm 2 2 mm/s mm mm/s mm/s % % mm mm mm/s % 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 47 - () TB No. No. 063 No.

Hygienic Design Cylinder Series HY

175L HY-M4 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M5 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L 65 70 75 80 85 90 95 100 105 110 65 70 75 80 85 90 95 100 105 110 75 80 85 90 95 100

Electric Actuator Miniature Rod Type Miniature Slide table Type

%] Duty ratio (%) Pushing time (minute) 70 or less 100 LEPY10 LEPS10 Compact 80 70 10 100 50 5 7.4 Precaution on maintenance Caution 1.

Table of Contents

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Environment

39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move.

Vacuum Ejector Series ZM

0.1 0 70 50 60 30 40 20 10 Flow rate l/min (ANR) Supply pressure MPa Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure: S 0.45 MPa ZMA13S Exhaust Characteristics Flow Characteristics 90 180 90 80 160 80 Vacuum pressure 70 140 70 Suction flow rate l/min (ANR) Air consumption l/min (ANR) Vacuum pressure kPa Vacuum pressure kPa 60 120 60 Air consumption 50 100

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

CG1

62 f 16 17 17 17 17 18 10 7 h 55 62 62 70 78 78 80 80 IJ 27 32 38 48 59 72 59 71 JH (14.5) (17.5) (19.5) (22.5) (25) (25) 11 11 11 12 13 13 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 20 25 32 40 50 63 80 100 Bore (mm) S ZZ 70 70 72 80 95 95 140 150 152 180 211 211 20 25 32 40 50 63 0.25 stroke The minimum stroke for rod boot equipped style is 20mm.

Compact Cylinder/Guide Rod Type Series CQM

25 30 35 40 45 50 75 -100 CQMB6310 15 20 25 30 35 40 45 50 75 -100 CQMB8010 15 20 25 30 35 40 45 50 75 -100 CQMB10010 15 20 25 30 35 40 45 50 75 -100 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 30 35 40 45 50 55 60 65 70 75 110 135 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 M8 x 50L x 55L x 60L x

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

Cylinder with Lock Series CLS

0.1 0.3 100 0.1 0.3 126 0.1 0.3 Y-12 Y-14 Y-16 Y-18 Y-20 Y-25 125 140 160 180 200 250 25 +0.084 0 28 +0.084 0 32 +0.1 0 40 +0.1 0 40 +0.1 0 50 +0.1 0 8 46 M30 x 1.5 100 27 42 CLM2 8 48 M30 x 1.5 105 30 47 U1 L1 8 55 M36 x 1.5 110 34 46 CLG1 8 70 M40 x 1.5 125 42.5 54 RR1 8 70 M45 x 1.5 125 42.5 54 CL1 9 86 M56 x 2 160 53 81 Knuckle pins and cotter pins are included.

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

CLA

MM I Bore 81ze (mm) 40 BQ DC eO eE F GA GB GC GO GL GR J K LV -500 20 500 27 30 70 60 96 Yo %, 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 76.5 ' 50 63 , 80 , 100 M14X1.5 M1 8 Xl .5 M18X 1.5 M22 X l.5 M26Xl .5 -'00 20-600 32 35 81 70 108 y.