New

30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 27 29.5 29.5 29.5 32 32 32 44 54 52.5 53.5 58 56.5 57.5 30 32.5 32.5 32.5 35 35 35 30.5 40 38.5 39.5 44.5 43 44 2 11 9 9 3 11 Conduit terminal DIN terminal Size Port size P Q

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

82.4 87 Stroke + 169 Upper: Incremental encoder Lower: Absolute encoder 40 10 Dog fitting for switch 30 5 Work piece mounting reference plane 17.5 15 30 33 2 Pitch = 100 (n1 1) x pitch 60 21.5 47.5 Body mounting reference plane Section AA The body mounting reference plane and work piece mounting reference n1 Stroke Model plane should be used as standards when mounting onto equipment.

Shock Absorbers and Rate Controls

,890 1.6 lRott l Ysxl 30 25.0 0.08-0.8 680 226,000 34,500 l l 5 r55 17J90 t 0 Otil | 7rx2 30 50.0 0.3.3_5 r.360 271,000 34,500 t6 6.660 4.5 LROtilllr/sx? 30 50.0 0.08.0.8 1.360 ?71,000 34.500 t6 r55 11,760 4.' | | 7rx4 30 100,0 0.3-3.5 2.710 362,000 34,500 10 r60 6.660 3 Otlll Vax6 30 150.0 0.3-3.5 4,070 42t.000 34,500 90 285 6.660 6.6 Al d mensions in m llimeters.

Support Guide/11-LEFG Series

The load factor for each direction can be obtained as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 LC3F2 2000 1000 2000 800 1500 1500 Lz 600 L1 [mm] L3 [mm] L2 [mm] 1000 1000 400 Ly 500 500 200 Lx 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 61 Support Guide 11-LEFG Series 11-LEFG16, 25

Adsorption Plate

processing precision (adsorption surface) Large, evenly distributed adsorption force Parallelism (m, or less) Weight (kg) 30 30 30 40 40 40 Rectangular Square Size Sintered body particle diameter Aperture ratio Material Finishing Material 0.5 1.2 2.1 3.2 5.8 8 0.4 1.0 1.8 2.9 5.3 7.4 mm 50 x 50 100 x 100 150 x 150 200 x 200 250 x 250 300 x 300 mm 0.3 (sphere) Adsorption surface 15% or more

CV/MVGQ

14 9 18 13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 19 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 CV 12 19 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 30 15 50 39 18 10 24 16 7 11 21 22 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 MVGQ Dimensions by Stroke Single Acting/Spring Extend

SFOD-OMT0010

Mount on a flat surface. 30 No.SFOD-OMT0010-B 5.

48

to 200 30 to 300 30 to 300 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType

High Power Cylinder Series RHC

up to 700 25 1500 250 up to 700 Made to Order (Refer to page 1882 for details.) 32 1500 250 up to 1000 40 1500 250 up to 1000 Symbol Specification Made of stainless steel XC6 50 1500 250 up to 1200 63 1500 250 up to 1200 80 1500 250 up to 1400 100 1500 250 up to 1500 Note 1) Strokes shorter than the recommended minimum stroke (1 to 249 st) can be manufactured, but cushion capability may

IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

550 10 to 300 Parallel Stroke 701 to 800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 750 20 to 550 10 to 300 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 750 20 to 550 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 750 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 Max acceleration/deceleration

JXCx-OMU0026

(mm) 1200 1000 1100 1200 1000 1100 1200 Max. speed [mm/s] 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 30 20 10 Min. speed [mm/s] (Speed tuning control) 49 33 17 -112No.

VQC

Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

Series AP500

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

Digital Gap Checker ( compatible)

Relationship between boundary value and display value of the level bar/switch point value bar and process data Distance type Level 1 Level 2 Level 3 Level 4 Level 4 60 or less (60 to 36) X+30 X+25 X+20 ISA-F (35 to 31) (30 to 26) (25 to 21) ISA3-G 300 or less X+150 X+125 X+100 Display (300 to 176) (175 to 151) (150 to 126) (125 to 101) value ISA3-H 500 or less X+300 X+250 X+200 Constantly

Air Cylinder

30 31 30 34 30 30 30 30 30 38 30 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 34 34 35 34 38 34 34 34 34 34 42 34 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 41 41 41.5 41 44 41 41 41 41 41 49 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 49.5 49 50 49 52.5 49 49.5 49 49.5 49 56 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 58.5 56 61 56 56.5

ITV

signal (monitor output) JIS Symbol NPN open collector output: Max. 30 V, 30 mA PNP open collector output: Max. 30 mA Switch output Within 1% (full span) Within 0.5% (full span) Within 0.5% (full span) Within 0.2% (full span) Within 0.12% (full span)/C 3% (full span) MPa: 0.01, kgf/cm2: 0.01, bar: 0.01, PSI: 0.1 , kPa: 1 Linearity Hysteresis Repeatability Sensitivity Temperature characteristics

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 2) Min. operating frequency is once in 30 days.

IIIIIIIIII

VP-700-5 VP-700-10 VP-700-30 1 1 2 5 10 30 30 30 30 0.5 0.6 1.0 1.0 1.2 2.0 VPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (In. Hg) PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD FM = FLUSH MOUNT B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.