Booster Regulator/Air Tank

Tank IN port Rc 1/2 Booster regulator IN port SRF Booster regulator IN port C C ITV EXH: C EXH: C IC (A) (B) Tank OUT port Rc 3/4 (A) D (B) OUT OUT 355 ITVH 256 256 205 4 x 13 4 x 13 ITVX 50 50 150 150 500 PVQ 250 250 824 (mm) VY1 Drain port Rc 1/4 A 531 570 494 527 576 B 444 479.8 444 479.8 479.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 1/2 D Note) 519 543 Booster regulator model VBA20A VBA40A

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Servo motor Graph of overload protection characteristics LE-T5 T6 Characteristics a T7 T8 T9 Characteristics b The following graphs show overload protection characteristics. 1000 1000 Operating Operating Operating 100 100 Operation time [s] Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 100 200 300 350 0 50 150 250 350 100 200 300 400 0 50 150 250 350 (Note 1, 2) Load ratio [%

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

4/5 Port Solenoid Valve

/60 Hz 25 2500 mm 2 200 VAC 50/60 Hz 30 3000 mm 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 50 5000 mm 3 M plug connector 220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 M8 connector For type W, DC voltage is only available.

Step Motor Controller

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

17

-100 MGPA80-150 0.15 MGPA20-100 0.2 0.1 MGPA20-50 MGPA80-50 0.1 0.05 0 0 0 20 40 60 0 50 100 150 200 Load from lateral direction (N) Load from lateral direction (N) MGPA25 MGPA100 0.6 Plate displacement amount (mm) Plate displacement amount (mm) 0.7 MGPA100-400 0.6 0.5 MGPA25-400 MGPA100-300 MGPA100-250 0.5 MGPA25-300 0.4 0.4 MGPA100-200 MGPA100-150 0.3 MGPA25-200 0.3 0.2 MGPA25-150 MGPA25

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

NCQ8

400 NCQ8B150-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B300-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B400-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC-1 1/8 1 1/4

CJ2X/CUX/CQSX/CQ2X/CM2X

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

AC Servo Motor Driver (CC-Link Type ）

When you carry out adhesion mounting of the driver, make circumference temperature into 0 to 45 (32 to 113 ), or use it at 75% or smaller effective load ratio. 1000 1000 During operation During operation 100 100 Operation time[s] Operation time[s] During servo lock During servo lock 10 10 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 (Note) Load ratio [%] (Note) Load ratio

5 Port Solenoid Valve

L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15 1401804 1401805 1401806 Socket connector pin arrangement A code Terminal no.

Clamp Cylinder with Lock

Note 2) Pin (for clevis), cotter pin, flat washer are equipped as a standard. 32 40, 50, 63 50, 63 12 mm 16.5 mm 19.5 mm Standard Stroke Clevis width Bore size (mm) 32, 40, 50, 63 Standard stroke (mm) 50, 75, 100, 125, 150 Weight (Basic weight is for a 0 mm stroke.)

MVGQ

In the case of MVGQM50-40 st, an interface of 10 mm wide is installed inside of the MVGQ50-50 st, and thus the full length dimension of the body is the same as 50 st. 20, 30, 40, 50, 75, 100 125, 150, 175, 200 25 M L MVGQ M L 32, 40 25, 50, 75, 100, 125, 150, 175, 200 MVGQ 50, 63 10-16-9 10 Series MVGQ Weight (kg) Standard stroke (mm) Bearing type Bore size (mm) Model The allowable lateral

REA/REB

16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 High Precision Guide Type REAH 150 60 40 182 10 19 REA 50, 63 14 2 -Rc 1/4 L 0 -0.2 NA 33 14 Max.

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

MXW Series Long Stroke Slide Table

Movable load W 200 MXW25 170 W 150 120 MXW20 100 Max.movable load (N) Movable load N MXW16 70 W Model 60 50 40 18 MXW 8 MXW12 30 40 MXW12 25 70 MXW16 20 MXW8 17 15 110 MXW20 W W 12 170 10 MXW25 50 100 200 300 500 Piston speed mm/s 1N = 0.2248 lbf (Graph1) 1N = 0.2248 lbf Mp Mep (Pitch moment) My Mey (Yaw moment) Mr (Roll moment) Moment MXW25 120 (Static moment / movable moment) Allowable

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

In the graph, find where the lines representing an operating pressure of 0.8 MPa and a load weight of 150 kg intersect. A 50 bore size is selected. 50 100 40 32 25 20 50 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) 8-25-6 6 Model Selection Series MGZ/MGZR 2.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

A 63 bore size is selected. 50 150 D40 100 32 25 20 -X 50 Individual -X 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) 427 Non-rotating Double Power Cylinder 20, 25, 32, 40, 50, 63, 80 Series MGZ How to Order 40 M9BW 100 Z MGZ Made to Order For details, refer to page 429.

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0