Integrated Controller

0 0 10 20 30 40 50 60 70 0 0 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work

Electric Grippers

Compact Basic LEHZJ10L, LEHZJ16L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force/Trigger level [%] Pushing force/Trigger level [%] Pushing force and trigger level range Pushing force and trigger level range Pushing speed [mm/sec] Pushing speed [mm/sec] LEHZJ20L, LEHZJ25L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force

Rotary Clamp Cylinders

MK-40-PS 50 MK-50-PS 63 MK-63-PS Bore size (mm) Kit no.

C76

Bore size Stroke NCA Standard stroke (mm) Bore size (mm) 32 40 Max. stroke (mm) 200 250 32 40 10, 25, 40, 50, 80, 100, 125, 160, 200, 250 Flange, Foot (1 pc.) C76F32A C76F40A DFlange, Foot (2 pcs. with mounting nut 1 pc.)

C76

Bore size Stroke NCA Standard stroke (mm) Bore size (mm) 32 40 Max. stroke (mm) 200 250 32 40 10, 25, 40, 50, 80, 100, 125, 160, 200, 250 C76F40A C76F32A Flange, Foot (1 pc.) DFlange, Foot (2 pcs. with mounting nut 1 pc.)

Aluminum High Vacuum Angle Valve

38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for models XLA, XLC, XLD, XLF, XLG and XLH.

Compact Cylinder Series CQS

Grease pack part no.: GR-S-010 (10 g) 578 Series CQSK Compact Cylinder: Non-rotating Rod Type Double Acting, Single Rod Mounting Bolt for CQSK C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting method: Mounting bolt for through-hole

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A 50 bore size is selected. 50 100 40 32 25 20 50 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) 8-25-6 6 Model Selection Series MGZ/MGZR 2.

Modular F.R.L. Unit

53 70 70 90 90 C 26 36 38 40 38 41 45 K 8.4 8 10.5 10.5 13 13 A B 77 115 142 176 176 250 268 D 25 40 53 70 70 90 95 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 E 47 47 P 28 57 73 73 G 27 40 54 54 66 66 F 30 41 50 50 70 70 R 50 80 95 120 120 120 120 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 25 40 53 70 75 90 95 Optional specifications

17

mm/s (16) L = 100 mm, V = 400 mm/s 110 (50) 110 (50) 100 100 100 100 80 80 80 80 63 63 50,63 50,63 50 50 22 (10) 22 (10) 40 40 40 40 11 (5) 11 (5) 32 32 Load mass m lbs (kg) Load mass m lbs (kg) 32 32 25 25 25 25 20 20 20 20 2.2 (1) 2.2 (1) 16 16 16 16 12 12 12 12 0.22 (0.1) 10 20 30 40 50 51 100 300 200 0.22 (0.1) 10 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) 12 Series MGP L L m

MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFS Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm VS4 Series MB, CA1 Note) Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series VQ7 EVS 800 700 600 500 400 300 200 100 0 749 749 Perpendicular, upward actuation Horizontal actuation 610

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

mm 300 100 200 MGJ 100 100 MGP 80 Load mass m (kg) Load mass m (kg) Load mass m (kg) 80 80 MGQ 10 10 10 63 63 63 MGG 50 50 50 MGC 40 1 1 1 25 20 25 20 40 32 40 32 MGF 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 MGZ Stroke (mm) Stroke (mm) Stroke (mm) MGT 2.

CQS

45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Special long bolt for through-hole mounting is available as an option.

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

Square Tube Type Air Cylinder Series MB1

Switch spacers Applicable bore size (mm) 32, 40 50, 63 80, 100 Weight table (kg) BMP1-032 Switch spacer Bore size (mm) 32 80 63 50 40 100 Mounting brackets/Part nos.

MXS Series Air Slide Table

30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16

AC Servo Motor Driver (Pulse input type/Positioning type ）

However, setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the 50 [%] time of 50% or more oscillation level.

Free Mount Cylinder Series CU

CUJ (g) Heat resistant (10 to 150C) -XB6 Stroke (mm) Cold resistant ( 40 to 700C) -XB7 Bore size (mm) CU 5 10 15 20 25 30 40 50 -XB9 Low speed (10 to 50 mm/s) -XB13 Low speed (5 to 50 mm/s) 28 (33) 31 (41) 34 (44) 37 (47) 40 (50) 43 (53) C(D)UK6-D CQS -XC19 Intermediate stroke (5 mm spacer) -XC22 Fluororubber seals 43 (48) 47 (57) 51 (61) 55 (65) 59 (69) 63 (73) C(D)UK10-D CQ2 Non-rotating

AC Servo Motor Driver (Network card type ）

Note that setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the time of 50% or more oscillation level.