High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

Parallel Style Air Gripper Series MHZ

MHZL2-25 K 25f8 96.2 24 15 25 D1 Applicable Tubing Max. 5 B 5 A E2 F Note 2) Nylon tubing coil tubing Soft nylon tubing Polyurethane Polyurethane Description/ Model Specifications Auto switch mounting groove (Both sides) tubing T0425 TS0425 TU0425 TCU0425B1 Outside diameter (mm) 4 0.5 20 to 60 4 1.0 13 20 to 60 Nylon 12 4 0.8 12 20 to 60 Nylon 12 4 0.5 10 20 to 60 Refer to the dimension

42

Note Option mounting diagram Single valve AXT632-25-4 (M4 x 50) 4 Valve 0 Blanking plate (VVQ5000-10A1 5) AXT632-25-8 (M4 x 17) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ5000-P1 5 -03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34) 2 Valve + Individual EXH spacer (VVQ5000-R1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34)

Integrated Controller

10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 600 600 Z 400 400 400 400 Mep m 200 200 200 200 0 0 0 5 10 15 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting

ZP

ZPR10D 10 16 12 18 15 16 24 25 32.9 33.9 49 50 5 6 6 7 ZPR16D Applicable Tubing Applicable tubing O.D.

Mechanically Jointed Rodless Cylinders

Load Weight Allowable Moment MY3A, MY3B/m1 MY3A, MY3B/M1 MY3A, MY3B/M2 MY3A, MY3B/M3 40 30 80 200 200 50 100 40 30 20 100 10 50 40 30 50 40 30 20 5 4 3 10 20 20 Load weight (kg) 63 q Moment (Nm) Moment (Nm) Moment (Nm) 5 4 3 63 50 40 63 63 10 10 2 50 50 50 t w e r 5 4 3 2 5 4 3 1 32 40 40 40 0.5 0.4 0.3 1 25 2 2 32 32 32 20 0.5 0.4 0.3 1 0.2 1 25 16 25 25 20 0.5 0.4 0.3 0.1 0.5 0.4 0.3 0.2

Electric Grippers

to 80 16 6 3 to 8 LEHZ 20 10 LEHZ Page 1 11 to 28 16 to 40 5 to 100 25 14 32 22 52 to 130 Series LECP6 5 to 120 40 30 84 to 210 10 4 3 to 6 Series LECP1 5 to 80 6 to 14 16 6 4 to 8 LEHZJ Page 15 LEHZJ With dust cover 20 10 Series LECPA 5 to 100 16 to 40 11 to 28 25 14 10 16 (32) Note) 3 to 7 5 to 80 20 24 (48) Note) 11 to 28 LEHF Page 27 32 32 (64) Note) 48 to 120 5 to 100 40 LEHF 40 (80

CXS

M3 x 0.5 through 25 0.2 4 ST 5 + ST 9 + ST 32 + ST 42 + ST Part no.

High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15

MHZ

5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions

MHZ

5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions

Aluminum High Vacuum Angle Valve

type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

) 29.6 14.3 115.8 35 x 1 x 10 25 80 A A A A A STATION NO. 5 83.8 116 B A B A 42 36.6 LRUN PW B RATE LERR.

Air Fittings & Tubing

(inch) Fitting size d (inch) (1) Weight (g) D1 D2 L1 L2 A M 9.6 10.4 11.4 13.2 15.2 17.9 21.7 7 8 10 10 12 13.6 17 17 18 19.5 20 22.5 25 28 24.5 25 34 27.5 31.5 35 44.5 14 14.5 23.5 17.5 21 23 34 15 16 16.5 17 18.5 21 22 2.2 2.5 3.5 4.6 6 7 9.6 3 3 7 8 6 19 27 KQ2L01-99 KQ2L03-99 KQ2L05-99 KQ2L07-99 KQ2L09-99 KQ2L11-99 KQ2L13-99 1 8 1 8 5 32 3 16 1 4 5 32 3 16 1 4 5 16 5 16 3 8 1 2 3 8 1

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

to 40, 63 to 100 50 16, 20 25 to 63 16, 20 6, 10, 12, 16 8 to 40 6, 10 12 to 20 25 32 to 100 25 to 63 10 to 20 25 to 40 50, 63 16, 20 25 to 63 16, 25, 40 16 to 63 6 to 20 25 to 63 6 to 40 10 to 32 10, 15, 25 15, 32 6 to 20 6 to 16 6 to 25 6 to 25 8 to 20 8 to 25 4, 6, 8 6 to 16 32 to 63 32 to 63 25 to 32 10 to 20 Bore size D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W

CL

5 !6 !7 !8 !

LEC-OM071xx

1 5 Adjustments 5.

AS

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" 2 6, 10, 16, 20 (1) AS1001F AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 2 size added to applicable tubing sizes Metric size (Release button: White color) 2, 3.2, 4, 6, 8, 10, 12 Inch size (Release button: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS3001F

CM2

185 210 17 35 25 72 85 97 110 135 12.5 25 37.5 50 75 149 162 174 187 212 17 35 32 77 90 102 115 140 12.5 25 37.5 50 75 181 194 206 219 244 19 46 40 Rear flange Built-in One-touch fitting CM2G20SCM220A, #5 SCM220A, #5, #19 CM2G25SCM225A, #5 SCM225A, #5, #19 CM2G32SCM232A, #5 SCM232A, #5, #19 CM2G40SCM240A, #5 SCM240A, #5, #19 The data shows auto switch equipped styles.

CATALOG VC10

VALVE Pressure Differential . . . . . . . . . . . 25 PSI 15 PSI Vacuum. . . . . . . . . . . . . . . . . . . . . . . down to 5 microns down to 5 microns Repair Packs . . . . . . . . . . . . . . . . . . K72TDD (A.C. or D.C.)