C95

50 55 70 80 100 120 200 222 244 273 321 356 212 237 259 293 341 381 32 40 50 63 80 100 6-12-24 25 Refer to page 6-16-1 for details on auto switches.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

CL

V Grommet Reed switch Solid state switch Relay, PLC PLC 40 to 100 Yes Yes 100 V, 200 V 12 V 2-wire 24 V PLC 100 V 200 V Terminal conduit 40 to 160 40 to 100 Relay, PLC DIN terminal Diagnostic indication (2-color indication) 40 to 160 40 to 100 Grommet 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (

CQS

45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 Special long bolt for through hole mounting is available as an option.

Cylinder with Lock

63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50

Modular F.R.L. Units

147.1 18 35.5 38.4 40 35.5 50 52 26 8.5 12.5 70 2.3 35 186.9 155.6 153.9 149.6 154.1 169.6 174.1 AF40-06-A 3/4 75 149.1 20 35.5 38.4 40 35.5 50 52 25 8.5 12.5 70 2.3 34 188.9 157.6 155.9 151.6 156.1 171.6 176.1 AF50-A 3/4, 1 90 220.1 24 45 30 45 70 66 35 11 13 90 3.2 47 259.9 228.6 226.9 222.6 227.1 242.6 247.1 AF60-A 1 95 234.1 24 47.5 30 47.5 70 66 35 11 13 90 3.2 47 273.9 242.6 240.9

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22-MXS16L-20

CV/MVGQ

Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 10 35 55 75 80 90 100 100 100 75 80 90 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (

CV/MVGQ

110 + 50 (n 2) n = 2, 4, 6, 8 Same side 15 90 100 110 35 100 100 110 100 1 Different sides 2 Same side 100 100 110 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 100 100 110 90 100

Air Cylinder Series CS1

0 +0.3 +0.1 Y-18 8 70 54 50 125 40 100 M40 x 1.5 42.5 23 60 69.3 57 M40 x 1.5 0.1 0.3 +0.1 0 +0.3 +0.1 Y-20 8 70 54 50 125 40 100 M45 x 1.5 42.5 27 70 80.8 67 M45 x 1.5 0.1 0.3 +0.1 0 +0.3 +0.1 Y-25 53 9 86 81 M56 x 2 63 160 50 126 34 85 98.1 82 M56 x 2 0.1 0.3 Use a single knuckle joint or a double knuckle joint individually.

REA/REB

70 100 300 500600 70 100 300 500600 Maximum speed U (mm/s) Maximum speed U (mm/s) 72 Sine Rodless Cylinder High Precision Guide Type Series REBH Max.

Thermo-con/Rack Mount Type

25C Ambient temperature 25C 1000 1000 Ambient temperature 35C 500 500 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Heating Capacity HECR002-A Circulating fluid: Tap water Circulating fluid: Ethylene glycol 20% 1000 900 800 700 600 500 400 300 200 100 0 1000 900 800 700 600 500 400 300 200 100 0 Heating capacity [W]

REA/REB

5 3 4 5 CC M3 2 1.5 1 1 RB 0.5 0.5 M1 M2 J 70 100 300 500 600 70 100 300 500 600 DMaximum speed (mm/s) Maximum speed (mm/s) -X 20Data 10-2-77 77 Series REBH Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1= WL Yaw moment M3 = W(L A) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5

REA/REB

5 3 4 5 CC M3 2 1.5 1 1 RB 0.5 0.5 M1 M2 J 70 100 300 500 600 70 100 300 500 600 DMaximum speed (mm/s) Maximum speed (mm/s) -X 20Data 10-2-77 77 Series REBH Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1= WL Yaw moment M3 = W(L A) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5

AC

Model Port size Q M B B A B C D P E F G H J K L M5 x 0.8 25 40 53 70 75 90 95 66 97.5 129 165 169 244 258 7 11 14 18 20 24 24 25 40 53 70 70 90 95 86.5 120.5 27.5 40 56 73 73 AF1000 AF2000 AF3000 AF4000 AF4000-06 AF5000 AF6000 8, 1 4 1 17 16 17 14 23 23 30 41 50 50 70 70 27 40 54 54 66 66 22 23 26 25 35 35 5.4 6.5 8.5 8.5 11 11 8.4 8 10.5 10.5 13 13 40 53 70 70 90 90 2.3 2.3 2.3 2.3 3.2 3.2

CL

V Grommet Reed switch Solid state switch Relay, PLC PLC 40 to 100 Yes Yes 100 V, 200 V 12 V 2-wire 24 V PLC 100 V 200 V Terminal conduit 40 to 160 40 to 100 Relay, PLC DIN terminal Diagnostic indication (2-color indication) 40 to 160 40 to 100 Grommet 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Floating Joint

20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15