CQ2

Note D-F7, J79 D-F7V D-J79C D-F7W, J79W D-F7WV D-F7BAL D-F7F D-A7, A80 D-A73C, A80C D-A7H, A80H D-A79W Switch mounting screw 32/40/50 (M3 X 0.5 X 10 l) 63/80/10 BQ-2 Switch interface Switch mounting nut 2.3-119 Series CQ2 Rod End Allowable Load With auto switch Without auto switch 300 300 100 Allowable lateral load W (N) Allowable lateral load W (N) 100 200 200 80 80 63 100 100 63 50 40

CJ2

, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 74.7 (Max. approx.

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

SX

actuation 600 500 400 300 200 100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

MVGQ

CC 25, 50, 75, 100 125, 150, 175, 200 M L MVGQ 80/100 RB Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R port P, E port D: Push-turn locking slotted type Port size Electrical entry Nil: Without sub-plate 24, 12, 6, 5, 3 VDC M8 connector 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC Grommet L plug connector M plug connector 24, 12 VDC 100, 110, 200, 220 VAC DIN terminal G: Lead wire length 300 mm L: With lead wire (Length 300 mm) D, Y: With connector WO: Without connector cable MN: Without lead

7

9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

SV

300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer

Step Motor Driver （ Pulse input type ）

100 100 100 ORIG time 200 200 200 ORIG speed 60 60 60 ORIG ACC/DEC 1000 1000 1000 Creep speed 10 10 10 ORIG sensor 0 0 0 ORIG SW Dir 0 0 0 Undefined parameter21 0 0 0 91 - Appendix 1.3 LES series setting value LES Step data default Model LES8 LES16 LES25 Lead[mm] 4 8 5 10 8 16 No. 0 0 0 Movement MOD ABS ABS ABS Speed 200 400 200 400 200 400 Position 0.00 0.00 0.00 Acceleration 5000 5000

SYJ300/500/700

Bracket AC (50/60 Hz) Nil: Without bracket F: With bracket 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 3 port For type W, DC voltage is only available.

New

With surge voltage suppressor Note 1) 2) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N Conduit terminal 100 VAC With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T Conduit 100 VAC With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note 1) AC voltage coil for H of DIN terminal type does not have full-wave rectifier.

Series AK1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Thermo-con/Rack Mount Type

Overcurrent protector 10 A 14 A Current consumption 5 A (100 V) to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

New

For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min

Applicable Auto Switch Model

(Tolerance 30%) 5.3-36 Solid State Switch/Tie-rod Mounting D-F5l/D-J5l Applicable Actuator Series Grommet Series Bore size (mm) CDA1, CDBA1, CDV3, CDVS1, 40, 50, 63, 80, 100 CDLA, CNA CDL1 40, 50, 63, 80, 100, 125, 140, 160 CDS1 125, 140, 160, 180, 200 CE2 40, 50, 63, 80, 100 MDB 32, 40, 63, 80, 100 Specifications D-F5l/D-J5l PLC: Programmable Logic Controller D-F59 D-F5P D-J59 D-J51 Auto

JA/JAH/JB/JS

125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.