ISO Standard Hydraulic Cylinder

D(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 25 145 135 130 120 120 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A5/A6 25 + 55 120 + 55 120 + 55 130 + 55 135 + 55 145 + 55 "n" pcs.

Vacuum Unit

135 150 165 L2 45 60 75 90 105 120 135 150 165 180 L3 56.8 71.8 86.8 101.8 116.8 131.8 146.8 161.8 176.8 191.8 L4 67.5 82.5 97.5 112.5 127.5 142.5 157.5 172.5 187.5 202.5 L5 62.5 75 87.5 112.5 125 137.5 150 162.5 187.5 200 L6 73 85.5 98 123 135.5 148 160.5 173 198 210.5 Metric size 06 8.3 4 9.7 8.7 08 11.4 6 Inch size 07 9.7 4.76 12.3 11.3 09 11.4 6 1 Common pilot pressure supply (PS

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The rotation range under the adjustment of an angle at 120 is indicated below. The rotation range under the adjustment of an angle at 120 is indicated below. R o t a ti o n r a n g e e R g Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clock-wise direction.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The rotation range under the adjustment of an angle at 120 is indicated below. The rotation range under the adjustment of an angle at 120 is indicated below. R o t a ti o n r a n g e e R g Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clock-wise direction.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Igm: Leakage current of the servo motor (Found from Table 11.4.) 120 120 100 100 Leakage current Leakage current 80 80 60 60 40 40 [mA] [mA] 20 20 0 2 0 14 100 5.5 38 2 3.5 8 1422 38 80 150 5.5 30 60 100 3.5 8 22 60 150 30 80 Cable size[mm2] Cable size[mm2] a. 200V class b. 400V class Fig. 11.3 Leakage current example (lg1, lg2) for CV cable run in metal conduit 11 30 11.

PFxx-OMU0002

(Displays 0 when the (Displays 0 when the (Displays 0 when the value is below 120 L/min) value is below 240 L/min) value is below 480 L/min) 150 to 3150 L/min 300 to 6300 L/min 600 to 12600 L/min 5.0 0 to 5%F.S.

C85

51 to 100 101 to 150 51 to 100 101 to 150 1 to 50 65.2(71.2) {75.2(81.2)} 65.2(69.2) {75.2(79.2)} 76(79.5) {86(89.5)} 82(85.5) {92(95.5)} 97.5(101) {118(121.5)} 113(116.5) {144(147.5)} 68(74) {78(84)} 68(72) {78(82)} 78(81.5) {88(91.5)} 84(87.5) {94(97.5)} 73(79) {83(89)} 73(77) {83(87)} 86(89.5) {96(99.5)} 92(95.5) {102(105.5)} 99.5(103) {120(123.5)} 115(118.5) {146(149.5)} 107.5(111) {

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 150, 250, 350, 450 Example) LJ1H1011PB-150-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model Performance 0.02 AC servomotor (50W) Incremental system Ground ball screw 12mm, 12mm lead High rigidity direct acting guide With coupling LC1-1B1H(Refer to page

C85

51 to 100 101 to 150 51 to 100 101 to 150 1 to 50 65.2(71.2) {75.2(81.2)} 65.2(69.2) {75.2(79.2)} 76(79.5) {86(89.5)} 82(85.5) {92(95.5)} 97.5(101) {118(121.5)} 113(116.5) {144(147.5)} 68(74) {78(84)} 68(72) {78(82)} 78(81.5) {88(91.5)} 84(87.5) {94(97.5)} 73(79) {83(89)} 73(77) {83(87)} 86(89.5) {96(99.5)} 92(95.5) {102(105.5)} 99.5(103) {120(123.5)} 115(118.5) {146(149.5)} 107.5(111) {

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ0 L VQ4 kit VQ5 VQZ VQD P. 2-4-146 P. 2-4-150 P. 2-4-154 Terminal block box L Enclosure IP65 compliant kit Enclosure IP65 compliant Enclosure IP65 compliant W type only P. 2-4-146 P. 2-4-150 P. 2-4-154 P. 2-4-158 C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block 2-4-117 2-4-118 Cylinder Speed Chart Use as a guide for selection.

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

MXS Series Air Slide Table

200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table deflection mm

Air Slide Table Series MXQ

MXW 0.02 MXQ16-30 MXQ16-20 MXJ MXQ16-20 0.02 0.04 MXQ16-10 0.01 MXQ16-10 MXP 0 0 50 100 200 150 150 100 200 300 400 0 50 100 200 MXY Load (N) Load (N) Load (N) MTS 20 20 20 Lr=160 mm 0.08 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-10 MXQ20-20 MXQ20-30 0.12 MXQ20-50 MXQ20-75 MXQ20-40 MXQ20-50 MXQ20-40 MXQ20-150 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount

7.5

L1 L2 L3 L4 110.5 123 135.5 148 160.5 160.5 173 185.5 198 100 112.5 125 137.5 150 150 162.5 175 187.5 77.8 87.8 97.8 107.8 117.8 127.8 137.8 147.8 157.8 19.5 20.5 22 23 24 19 20 21.5 22.5 20 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D B (S, R, RS) 1 2 P J Stations (Pitch) P = 10 [

ITV

(For details, refer to "Specific Product Precautions 1" on page 849). 2 (mm) 3 4 5 6 7 8 9 10 Manifold stations n L1 L2 60 75 90 105 120 135 150 165 180 110.5 123 148 160.5 173 185.5 198 223 235.5 Weight of DIN rail (g) 20 22 27 29 31 34 36 41 43 813 Electro-Pneumatic Regulator Series ITV1000/2000/3000 RoHS How to Order ITV 3 0 1 0 S 0 1 2 Model 1 2 3 1000 type 2000 type 3000 type Pressure

Manifold Specifications

14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 C4C C6C Separation lever (Push type) VV5Z3-45FU DStation B(2 to 10 stations) C4C C6C VV5Z3-45FUStation C4C C6C VV5Z3-45FBStation (11 to 20 stations) (Pitch) (Pitch) (mm) 8 223 212.5 200 11.5 Stations L1 L2 L3 L4 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

MRQ D20The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 4-2 of Example 4. The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 3-2 of Example 3.

CRB2/CRBU2/CRB1

The stopper ring is mounted on 120 counterclockwise from the standard position shown in Fig. 1-2 in Example 1.

Table of Contents

MRQ D20The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 4-2 of Example 4. The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 3-2 of Example 3.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

MRQ D20The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 4-2 of Example 4. The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 3-2 of Example 3.